JPH0472630U - - Google Patents
Info
- Publication number
- JPH0472630U JPH0472630U JP11700890U JP11700890U JPH0472630U JP H0472630 U JPH0472630 U JP H0472630U JP 11700890 U JP11700890 U JP 11700890U JP 11700890 U JP11700890 U JP 11700890U JP H0472630 U JPH0472630 U JP H0472630U
- Authority
- JP
- Japan
- Prior art keywords
- shield box
- prober
- closing mechanism
- gas damper
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Description
第１図はこの考案の一実施例によるプローバ用
シールドボツクスフタ開閉機構を示すシールドボ
ツクスの断面図、第２図は従来のプローバ用シー
ルドボツクスの側面図である。
図において、２はフタ、３はアングル、４はガ
スダンパー、５はボールキヤツチ、６はシールド
ボツクスである。尚、図中、同一符号は同一、又
は相当部分を示す。
FIG. 1 is a sectional view of a shield box showing a prober shield box lid opening/closing mechanism according to an embodiment of the present invention, and FIG. 2 is a side view of a conventional prober shield box. In the figure, 2 is a lid, 3 is an angle, 4 is a gas damper, 5 is a ball catch, and 6 is a shield box. In the drawings, the same reference numerals indicate the same or equivalent parts.
Claims (1)
バーするシールドボツクスにおいて上記シールド
ボツクスフタ開閉機構にガスダンパー及びボール
キヤツチを使用したことを特徴とするプローバ用
シールドボツクスフタ開閉機構。 A shield box cover opening/closing mechanism for a prober, characterized in that a gas damper and a ball catch are used in the shield box lid opening/closing mechanism for a shield box covering a prober for testing semiconductor wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11700890U JPH0472630U (en) | 1990-11-06 | 1990-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11700890U JPH0472630U (en) | 1990-11-06 | 1990-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0472630U true JPH0472630U (en) | 1992-06-26 |
Family
ID=31864876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11700890U Pending JPH0472630U (en) | 1990-11-06 | 1990-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0472630U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008131048A (en) * | 2006-11-17 | 2008-06-05 | Suss Microtec Test Systems Gmbh | Probe station for semiconductor inspection having emi shield function |
-
1990
- 1990-11-06 JP JP11700890U patent/JPH0472630U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008131048A (en) * | 2006-11-17 | 2008-06-05 | Suss Microtec Test Systems Gmbh | Probe station for semiconductor inspection having emi shield function |