JPS61171251U - - Google Patents
Info
- Publication number
- JPS61171251U JPS61171251U JP5345085U JP5345085U JPS61171251U JP S61171251 U JPS61171251 U JP S61171251U JP 5345085 U JP5345085 U JP 5345085U JP 5345085 U JP5345085 U JP 5345085U JP S61171251 U JPS61171251 U JP S61171251U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wafer
- holding
- shaped
- fulcrum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345085U JPS61171251U (pt) | 1985-04-10 | 1985-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345085U JPS61171251U (pt) | 1985-04-10 | 1985-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61171251U true JPS61171251U (pt) | 1986-10-24 |
Family
ID=30574325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5345085U Pending JPS61171251U (pt) | 1985-04-10 | 1985-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61171251U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016124059A (ja) * | 2014-12-26 | 2016-07-11 | キヤノンマーケティングジャパン株式会社 | ワイヤ放電加工装置および加工槽 |
-
1985
- 1985-04-10 JP JP5345085U patent/JPS61171251U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016124059A (ja) * | 2014-12-26 | 2016-07-11 | キヤノンマーケティングジャパン株式会社 | ワイヤ放電加工装置および加工槽 |