JPS6314584B2 - - Google Patents

Info

Publication number
JPS6314584B2
JPS6314584B2 JP57188843A JP18884382A JPS6314584B2 JP S6314584 B2 JPS6314584 B2 JP S6314584B2 JP 57188843 A JP57188843 A JP 57188843A JP 18884382 A JP18884382 A JP 18884382A JP S6314584 B2 JPS6314584 B2 JP S6314584B2
Authority
JP
Japan
Prior art keywords
magnetic pole
linear pulse
pulse motor
scale
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57188843A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5980150A (ja
Inventor
Zenichiro Miwa
Hiroshi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP18884382A priority Critical patent/JPS5980150A/ja
Priority to US06/543,927 priority patent/US4578622A/en
Priority to DE19833338864 priority patent/DE3338864A1/de
Publication of JPS5980150A publication Critical patent/JPS5980150A/ja
Publication of JPS6314584B2 publication Critical patent/JPS6314584B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
JP18884382A 1982-10-26 1982-10-26 リニアパルスモ−タ Granted JPS5980150A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP18884382A JPS5980150A (ja) 1982-10-26 1982-10-26 リニアパルスモ−タ
US06/543,927 US4578622A (en) 1982-10-26 1983-10-20 Linear pulse motor
DE19833338864 DE3338864A1 (de) 1982-10-26 1983-10-26 Linearer schrittmotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18884382A JPS5980150A (ja) 1982-10-26 1982-10-26 リニアパルスモ−タ

Publications (2)

Publication Number Publication Date
JPS5980150A JPS5980150A (ja) 1984-05-09
JPS6314584B2 true JPS6314584B2 (de) 1988-03-31

Family

ID=16230806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18884382A Granted JPS5980150A (ja) 1982-10-26 1982-10-26 リニアパルスモ−タ

Country Status (1)

Country Link
JP (1) JPS5980150A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237850A (ja) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd リニアパルスモータ
JPS60237851A (ja) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd リニアパルスモータ
JPS60237853A (ja) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd リニアパルスモ−タ
JPS61285063A (ja) * 1985-06-08 1986-12-15 Omron Tateisi Electronics Co リニアパルスモ−タ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS563570A (en) * 1979-06-21 1981-01-14 Yokogawa Hokushin Electric Corp Linear pulse motor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199113U (de) * 1976-01-08 1976-08-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS563570A (en) * 1979-06-21 1981-01-14 Yokogawa Hokushin Electric Corp Linear pulse motor

Also Published As

Publication number Publication date
JPS5980150A (ja) 1984-05-09

Similar Documents

Publication Publication Date Title
US5841250A (en) Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus
US4681506A (en) Table feed apparatus
US4594520A (en) Linear pulse motor
US4761574A (en) Linear pulse motor
US4578622A (en) Linear pulse motor
JPS6314584B2 (de)
EP0353074B1 (de) Linearantrieb
JPS6347070B2 (de)
JPH0140596B2 (de)
US4879482A (en) Linear pulse motor
JPS63242161A (ja) 直動形磁気軸受モ−タ
JP2006197773A (ja) リニアモータ
JPS6249819B2 (de)
JP2879934B2 (ja) ステージ装置
JPS6395849A (ja) リニアパルスモ−タ
JP3803193B2 (ja) リニアモータ
JPS59156149A (ja) リニヤモ−タ
JPH0130384B2 (de)
JPS60241768A (ja) リニアパルスモ−タ
JPH0584144B2 (de)
JPS60241767A (ja) リニアパルスモ−タ
JPS60249862A (ja) リニアステツピングモ−タ
JPS5935558A (ja) モ−タ用コアの製造方法
JPS6311900Y2 (de)
JPH0118667B2 (de)