JPS63145158U - - Google Patents
Info
- Publication number
- JPS63145158U JPS63145158U JP14382286U JP14382286U JPS63145158U JP S63145158 U JPS63145158 U JP S63145158U JP 14382286 U JP14382286 U JP 14382286U JP 14382286 U JP14382286 U JP 14382286U JP S63145158 U JPS63145158 U JP S63145158U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- light
- motor
- photodetector
- surface defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14382286U JPS63145158U (fr) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14382286U JPS63145158U (fr) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145158U true JPS63145158U (fr) | 1988-09-26 |
Family
ID=31053858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14382286U Pending JPS63145158U (fr) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145158U (fr) |
-
1986
- 1986-09-19 JP JP14382286U patent/JPS63145158U/ja active Pending
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