JPS63145158U

JPS63145158U -

Info

Publication number: JPS63145158U
Application number: JP14382286U
Authority: JP
Priority date: 1986-09-19
Filing date: 1986-09-19
Publication date: 1988-09-26

Description

[Brief explanation of the drawing]

第１図はこの考案の一実施例を示す表面欠陥検
出器の構成図、第２図は被検査物の溝方向検出系
の詳細図、第３図は方向検出系の動作説明図、第
４図は従来の表面欠陥検出器を示す構成図、第５
図は従来装置の動作説明図、第６図、第７図は回
折パターン及び検出信号の説明図である。図において、１はレーザ装置、２は光学系、３
はスキヤナ、４はスキヤナドライバ、６は光ガイ
ド、７は光電変換器、８は信号処理系、１１は被
検査物回転治具、１２はモータ、１３はアパーチ
ヤ板、１４は光検知器、１５は制御系である。な
お図中同一あるいは相当部分には同一符号を付し
て示してある。 Fig. 1 is a configuration diagram of a surface defect detector showing an embodiment of this invention, Fig. 2 is a detailed diagram of the groove direction detection system of the inspected object, Fig. 3 is an explanatory diagram of the operation of the direction detection system, and Fig. 4 is a diagram illustrating the operation of the direction detection system. The figure is a configuration diagram showing a conventional surface defect detector.
The figure is an explanatory diagram of the operation of a conventional device, and FIGS. 6 and 7 are explanatory diagrams of a diffraction pattern and a detection signal. In the figure, 1 is a laser device, 2 is an optical system, and 3 is a laser device.
is a scanner, 4 is a scanner driver, 6 is a light guide, 7 is a photoelectric converter, 8 is a signal processing system, 11 is an inspection object rotating jig, 12 is a motor, 13 is an aperture plate, 14 is a photodetector, 15 is a control system. Note that the same or corresponding parts in the figures are indicated by the same reference numerals.

Claims

[Scope of utility model registration request]

An irradiation system consisting of a light source such as a laser, an optical system for adjusting the light emitted from the light source to an appropriate size, and a scanning system for scanning the object to be inspected, and reflection from the object to be inspected. A surface defect detector is equipped with a light receiving system that receives light and converts it into an electrical signal, and a signal processing system that processes the electrical signal converted by the light receiving system and makes a quality judgment. an irradiation system that irradiates a light beam to an object to be inspected that has a certain groove; an aperture plate that has a hole approximately in the center through which the light beam passes and a hole near the end through which diffracted reflected light from the object to be inspected passes; A photodetector that receives diffracted reflected light from the object to be inspected via the aperture plate, a motor that rotates the object to be inspected, and a beam that scans the groove direction of the object based on the output signal of the photodetector. A surface defect detector comprising: a control system that controls the motor so that the motor is oriented in an appropriate direction.