JPS6314150U - - Google Patents
Info
- Publication number
- JPS6314150U JPS6314150U JP10781086U JP10781086U JPS6314150U JP S6314150 U JPS6314150 U JP S6314150U JP 10781086 U JP10781086 U JP 10781086U JP 10781086 U JP10781086 U JP 10781086U JP S6314150 U JPS6314150 U JP S6314150U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- purge device
- air purge
- light
- electrical signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 4
- 238000010926 purge Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Optical Measuring Cells (AREA)
Description
第１図はこの考案の一実施例を示す表面欠陥検
出装置の構成図、第２図はこの考案の動作説明図
、第３図は従来の表面欠陥検出装置を示す構成図
、第４図、第５図は従来装置の動作説明図である
。
図中、１はレーザ装置、２は光学系、３はスキ
ヤナ、４はスキヤナドライバ、６は光ガイド、７
は光電変換器、８は信号処理器、１１はエアパー
ジ装置、１２は減音板である。なお、図中同一符
号は同一又は相当部分を示す。
Fig. 1 is a block diagram of a surface defect detection device showing an embodiment of this invention, Fig. 2 is an explanatory diagram of the operation of this invention, Fig. 3 is a block diagram showing a conventional surface defect detection device, Fig. 4, FIG. 5 is an explanatory diagram of the operation of the conventional device. In the figure, 1 is a laser device, 2 is an optical system, 3 is a scanner, 4 is a scanner driver, 6 is a light guide, 7
8 is a photoelectric converter, 8 is a signal processor, 11 is an air purge device, and 12 is a sound reduction plate. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
を適切な大きさにするための光学系及び被検査物
上に走査するための走査系より構成される照射系
と、被検査物からの反射光を受光し電気信号に変
換する受光系と、この受光系により変換された電
気信号を処理し良否判定等をする信号処理系と上
記照射系と被検査物間の光路及び被検査物表面の
ゴミ・ホコリ等を吹き飛ばすためのエアパージ装
置とを備えた表面欠陥検出器に於いて、上記エア
パージ装置との間に被検査物が介在するように位
置し、かつ上記エアパージ装置のエアの流れを遮
えぎる減音板を備えたことを特徴とする表面欠陥
検出器。 An irradiation system consisting of a light source such as a laser, an optical system for adjusting the light emitted from the light source to an appropriate size, and a scanning system for scanning the object to be inspected, and reflection from the object to be inspected. A light receiving system that receives light and converts it into an electrical signal, a signal processing system that processes the electrical signal converted by this light receiving system and makes pass/fail judgments, and an optical path between the irradiation system and the object to be inspected and the surface of the object to be inspected. In a surface defect detector equipped with an air purge device for blowing away dirt, dust, etc., the object to be inspected is located between the air purge device and the object to be inspected, and the air flow of the air purge device is blocked. A surface defect detector characterized by being equipped with a sound attenuating plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10781086U JPS6314150U (en) | 1986-07-14 | 1986-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10781086U JPS6314150U (en) | 1986-07-14 | 1986-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6314150U true JPS6314150U (en) | 1988-01-29 |
Family
ID=30984431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10781086U Pending JPS6314150U (en) | 1986-07-14 | 1986-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6314150U (en) |
-
1986
- 1986-07-14 JP JP10781086U patent/JPS6314150U/ja active Pending
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