JPS62167157U - - Google Patents
Info
- Publication number
- JPS62167157U JPS62167157U JP5571686U JP5571686U JPS62167157U JP S62167157 U JPS62167157 U JP S62167157U JP 5571686 U JP5571686 U JP 5571686U JP 5571686 U JP5571686 U JP 5571686U JP S62167157 U JPS62167157 U JP S62167157U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- defect
- light
- electrical signal
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図はこの考案の一実施例を示す表面欠陥検
出装置の構成図、第２図はこの考案の装置による
欠陥検出の説明図、第３図は従来の表面欠陥検出
装置を示す構成図、第４図は従来装置の動作説明
図である。
図中１７はメモリ装置、８はモータコントロー
ラを示す。
FIG. 1 is a configuration diagram of a surface defect detection device showing an embodiment of this invention, FIG. 2 is an explanatory diagram of defect detection by the device of this invention, and FIG. 3 is a configuration diagram showing a conventional surface defect detection device. FIG. 4 is an explanatory diagram of the operation of the conventional device. In the figure, 17 indicates a memory device, and 8 indicates a motor controller.
Claims (1)
を適切な大きさにするための光学系及び被検査体
上に走査するための走査系より構成される照射系
と、被検査物からの反射光を受光し電気信号に変
換する受光系及びこの電気信号を処理し、被検査
物表面に欠陥を検出した場合、その欠陥の位置、
角度等の情報を記憶するとともに被検査物を再検
査するごとく制御し、上記記憶情報と再検査結果
の相関をとり欠陥の有無を判定する手段とを具備
したことを特徴とする表面欠陥検出装置。 An irradiation system consisting of a light source such as a laser, an optical system for adjusting the light emitted from the light source to an appropriate size, and a scanning system for scanning the object to be inspected, and reflection from the object to be inspected. A light receiving system that receives light and converts it into an electrical signal, and processes this electrical signal. When a defect is detected on the surface of the object to be inspected, the location of the defect,
A surface defect detection device comprising means for storing information such as an angle, controlling the object to be inspected as if it were to be re-inspected, and determining the presence or absence of a defect by correlating the stored information with the re-inspection results. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5571686U JPS62167157U (en) | 1986-04-14 | 1986-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5571686U JPS62167157U (en) | 1986-04-14 | 1986-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62167157U true JPS62167157U (en) | 1987-10-23 |
Family
ID=30883873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5571686U Pending JPS62167157U (en) | 1986-04-14 | 1986-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62167157U (en) |
-
1986
- 1986-04-14 JP JP5571686U patent/JPS62167157U/ja active Pending
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