JPS63115237U - - Google Patents
Info
- Publication number
- JPS63115237U JPS63115237U JP1987007885U JP788587U JPS63115237U JP S63115237 U JPS63115237 U JP S63115237U JP 1987007885 U JP1987007885 U JP 1987007885U JP 788587 U JP788587 U JP 788587U JP S63115237 U JPS63115237 U JP S63115237U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- substrate
- detection
- laser beam
- trimming device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 2
- 238000009966 trimming Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例を示すブロツク図、
第２図は本考案の一実施例のタイムチヤート、第
３図は本考案の他の実施例を示すブロツク図であ
る。
主要部分の符号の説明、１……発光素子、６…
…受光素子、７……コンパレータ、８……レーザ
光オンオフ回路。
FIG. 1 is a block diagram showing an embodiment of the present invention.
FIG. 2 is a time chart of one embodiment of the present invention, and FIG. 3 is a block diagram showing another embodiment of the present invention. Explanation of symbols of main parts, 1...Light emitting element, 6...
. . . Light receiving element, 7 . . . Comparator, 8 . . . Laser light on/off circuit.
Claims (1)
ングを行うレーザトリミング装置であつて、検出
光に対する前記基板と前記被加工物とにおける反
射率の変化を検出する検出手段と、前記検出手段
からの検出信号に応答して前記レーザビームの照
射を開始するように制御する開始制御手段とを設
けたことを特徴とするレーザトリミング装置。 A laser trimming device that trims a workpiece on a substrate with a laser beam, the device comprising a detection means for detecting a change in reflectance of the substrate and the workpiece with respect to detection light, and a detection signal from the detection means. 1. A laser trimming device comprising: start control means for controlling to start irradiation of the laser beam in response to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007885U JPS63115237U (en) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007885U JPS63115237U (en) | 1987-01-22 | 1987-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115237U true JPS63115237U (en) | 1988-07-25 |
Family
ID=30791754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987007885U Pending JPS63115237U (en) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115237U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008290117A (en) * | 2007-05-24 | 2008-12-04 | National Institute Of Advanced Industrial & Technology | Laser beam machining apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58205689A (en) * | 1982-05-24 | 1983-11-30 | Hitachi Ltd | Method for detecting reflected light amount of laser beam |
| JPS5987990A (en) * | 1982-11-10 | 1984-05-21 | Nisshin Steel Co Ltd | Laser beam machine |
| JPS6052083B2 (en) * | 1981-04-23 | 1985-11-18 | 日本碍子株式会社 | Manufacturing method of high purity ceramic powder |
-
1987
- 1987-01-22 JP JP1987007885U patent/JPS63115237U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6052083B2 (en) * | 1981-04-23 | 1985-11-18 | 日本碍子株式会社 | Manufacturing method of high purity ceramic powder |
| JPS58205689A (en) * | 1982-05-24 | 1983-11-30 | Hitachi Ltd | Method for detecting reflected light amount of laser beam |
| JPS5987990A (en) * | 1982-11-10 | 1984-05-21 | Nisshin Steel Co Ltd | Laser beam machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008290117A (en) * | 2007-05-24 | 2008-12-04 | National Institute Of Advanced Industrial & Technology | Laser beam machining apparatus |