JPS6314496B2 - - Google Patents

Info

Publication number
JPS6314496B2
JPS6314496B2 JP57153251A JP15325182A JPS6314496B2 JP S6314496 B2 JPS6314496 B2 JP S6314496B2 JP 57153251 A JP57153251 A JP 57153251A JP 15325182 A JP15325182 A JP 15325182A JP S6314496 B2 JPS6314496 B2 JP S6314496B2
Authority
JP
Japan
Prior art keywords
image
conversion circuit
pattern
image signal
storage device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57153251A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5941847A (ja
Inventor
Juji Ebihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57153251A priority Critical patent/JPS5941847A/ja
Publication of JPS5941847A publication Critical patent/JPS5941847A/ja
Publication of JPS6314496B2 publication Critical patent/JPS6314496B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP57153251A 1982-08-31 1982-08-31 パタ−ン欠陥の表示装置 Granted JPS5941847A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57153251A JPS5941847A (ja) 1982-08-31 1982-08-31 パタ−ン欠陥の表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57153251A JPS5941847A (ja) 1982-08-31 1982-08-31 パタ−ン欠陥の表示装置

Publications (2)

Publication Number Publication Date
JPS5941847A JPS5941847A (ja) 1984-03-08
JPS6314496B2 true JPS6314496B2 (enrdf_load_html_response) 1988-03-31

Family

ID=15558365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57153251A Granted JPS5941847A (ja) 1982-08-31 1982-08-31 パタ−ン欠陥の表示装置

Country Status (1)

Country Link
JP (1) JPS5941847A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147635A (ja) * 1984-08-14 1986-03-08 Nippon Jido Seigyo Kk パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法
JPS62127987A (ja) * 1985-11-28 1987-06-10 Yokogawa Electric Corp プリント板パタ−ン検査方法
US6831998B1 (en) 2000-06-22 2004-12-14 Hitachi, Ltd. Inspection system for circuit patterns and a method thereof

Also Published As

Publication number Publication date
JPS5941847A (ja) 1984-03-08

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