JPS6314038B2 - - Google Patents

Info

Publication number
JPS6314038B2
JPS6314038B2 JP59181844A JP18184484A JPS6314038B2 JP S6314038 B2 JPS6314038 B2 JP S6314038B2 JP 59181844 A JP59181844 A JP 59181844A JP 18184484 A JP18184484 A JP 18184484A JP S6314038 B2 JPS6314038 B2 JP S6314038B2
Authority
JP
Japan
Prior art keywords
cleaning
ammonium
mol
cleaning liquid
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59181844A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6160799A (ja
Inventor
Osamu Shimada
Kohei Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP18184484A priority Critical patent/JPS6160799A/ja
Publication of JPS6160799A publication Critical patent/JPS6160799A/ja
Publication of JPS6314038B2 publication Critical patent/JPS6314038B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Detergent Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP18184484A 1984-08-31 1984-08-31 洗浄液 Granted JPS6160799A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18184484A JPS6160799A (ja) 1984-08-31 1984-08-31 洗浄液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18184484A JPS6160799A (ja) 1984-08-31 1984-08-31 洗浄液

Publications (2)

Publication Number Publication Date
JPS6160799A JPS6160799A (ja) 1986-03-28
JPS6314038B2 true JPS6314038B2 (enrdf_load_stackoverflow) 1988-03-29

Family

ID=16107801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18184484A Granted JPS6160799A (ja) 1984-08-31 1984-08-31 洗浄液

Country Status (1)

Country Link
JP (1) JPS6160799A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8601939A (nl) * 1986-07-28 1988-02-16 Philips Nv Werkwijze voor het verwijderen van ongewenste deeltjes van een oppervlak van een substraat.
US4817652A (en) * 1987-03-26 1989-04-04 Regents Of The University Of Minnesota System for surface and fluid cleaning
CN1169196C (zh) * 1997-04-03 2004-09-29 日本电气株式会社 制造半导体器件的方法
US6592676B1 (en) * 1999-01-08 2003-07-15 Interuniversitair Micro-Elektronica Centrum Chemical solution and method for reducing the metal contamination on the surface of a semiconductor substrate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3811833A (en) * 1972-06-30 1974-05-21 Du Pont Stabilized hydrogen peroxide compositions containing ammonium ions,and process for bleaching therewith

Also Published As

Publication number Publication date
JPS6160799A (ja) 1986-03-28

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