JPS63140039U - - Google Patents

Info

Publication number
JPS63140039U
JPS63140039U JP3229487U JP3229487U JPS63140039U JP S63140039 U JPS63140039 U JP S63140039U JP 3229487 U JP3229487 U JP 3229487U JP 3229487 U JP3229487 U JP 3229487U JP S63140039 U JPS63140039 U JP S63140039U
Authority
JP
Japan
Prior art keywords
electrode
grounded
gas
grounded electrode
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3229487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3229487U priority Critical patent/JPS63140039U/ja
Publication of JPS63140039U publication Critical patent/JPS63140039U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Treatment Of Fiber Materials (AREA)
JP3229487U 1987-03-05 1987-03-05 Pending JPS63140039U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3229487U JPS63140039U (enrdf_load_stackoverflow) 1987-03-05 1987-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3229487U JPS63140039U (enrdf_load_stackoverflow) 1987-03-05 1987-03-05

Publications (1)

Publication Number Publication Date
JPS63140039U true JPS63140039U (enrdf_load_stackoverflow) 1988-09-14

Family

ID=30838838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3229487U Pending JPS63140039U (enrdf_load_stackoverflow) 1987-03-05 1987-03-05

Country Status (1)

Country Link
JP (1) JPS63140039U (enrdf_load_stackoverflow)

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