JPS62191867U - - Google Patents

Info

Publication number
JPS62191867U
JPS62191867U JP7795286U JP7795286U JPS62191867U JP S62191867 U JPS62191867 U JP S62191867U JP 7795286 U JP7795286 U JP 7795286U JP 7795286 U JP7795286 U JP 7795286U JP S62191867 U JPS62191867 U JP S62191867U
Authority
JP
Japan
Prior art keywords
thin film
electrode side
substrate
rotating blade
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7795286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7795286U priority Critical patent/JPS62191867U/ja
Publication of JPS62191867U publication Critical patent/JPS62191867U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP7795286U 1986-05-23 1986-05-23 Pending JPS62191867U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7795286U JPS62191867U (enrdf_load_stackoverflow) 1986-05-23 1986-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7795286U JPS62191867U (enrdf_load_stackoverflow) 1986-05-23 1986-05-23

Publications (1)

Publication Number Publication Date
JPS62191867U true JPS62191867U (enrdf_load_stackoverflow) 1987-12-05

Family

ID=30926445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7795286U Pending JPS62191867U (enrdf_load_stackoverflow) 1986-05-23 1986-05-23

Country Status (1)

Country Link
JP (1) JPS62191867U (enrdf_load_stackoverflow)

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