JPS63137451U - - Google Patents
Info
- Publication number
- JPS63137451U JPS63137451U JP3080987U JP3080987U JPS63137451U JP S63137451 U JPS63137451 U JP S63137451U JP 3080987 U JP3080987 U JP 3080987U JP 3080987 U JP3080987 U JP 3080987U JP S63137451 U JPS63137451 U JP S63137451U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- microchannel plate
- power source
- focusing lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims 4
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
Description
第１図は本考案の一実施例の構成を示す概略図
、第２図はフイルタ回路の例を示す図である。
２：イオン源、３：集束レンズ、４：材料、５
：偏向器、６：ＭＣＰ、７：電源、１０：導線、
１１：ローパスフイルタ回路。
FIG. 1 is a schematic diagram showing the configuration of an embodiment of the present invention, and FIG. 2 is a diagram showing an example of a filter circuit. 2: Ion source, 3: Focusing lens, 4: Material, 5
: Deflector, 6: MCP, 7: Power supply, 10: Conductor,
11: Low pass filter circuit.
Claims (1)
上に細く集束するための集束レンズと、該荷電粒
子ビームを対象上で二次元的に走査するための偏
向器と、前記集束レンズと対象との間に配置され
るマイクロチヤンネルプレートと、該マイクロチ
ヤンネルプレートの入射面と出射面との間に印加
する電圧を発生する電源と、該電源の出力電圧を
前記マイクロチヤンネルプレートの入射面と出射
面まで供給する導線とを備え、前記導線の前記チ
ヤンネルプレートとの接続点近傍に商用周波数の
信号を遮断するフイルタ回路を挿入したことを特
徴とする荷電粒子ビーム装置。 a charged particle beam source, a focusing lens for narrowly focusing the charged particle beam on an object, a deflector for two-dimensionally scanning the charged particle beam on the object, and a connection between the focusing lens and the object. A microchannel plate disposed between the microchannel plate, a power source that generates a voltage to be applied between the incident surface and the output surface of the microchannel plate, and a power source that applies the output voltage of the power source to the incident surface and the output surface of the microchannel plate. What is claimed is: 1. A charged particle beam device comprising: a supply conductor, and a filter circuit for blocking a commercial frequency signal is inserted near a connection point of the conductor with the channel plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3080987U JPS63137451U (en) | 1987-03-03 | 1987-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3080987U JPS63137451U (en) | 1987-03-03 | 1987-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137451U true JPS63137451U (en) | 1988-09-09 |
Family
ID=30835963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3080987U Pending JPS63137451U (en) | 1987-03-03 | 1987-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137451U (en) |
-
1987
- 1987-03-03 JP JP3080987U patent/JPS63137451U/ja active Pending
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