JPS63135222U - - Google Patents
Info
- Publication number
- JPS63135222U JPS63135222U JP2850987U JP2850987U JPS63135222U JP S63135222 U JPS63135222 U JP S63135222U JP 2850987 U JP2850987 U JP 2850987U JP 2850987 U JP2850987 U JP 2850987U JP S63135222 U JPS63135222 U JP S63135222U
- Authority
- JP
- Japan
- Prior art keywords
- light
- semiconductor substrate
- receiving element
- photoelectric encoder
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987028509U JPH0413622Y2 (US20070167544A1-20070719-C00007.png) | 1987-02-27 | 1987-02-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987028509U JPH0413622Y2 (US20070167544A1-20070719-C00007.png) | 1987-02-27 | 1987-02-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63135222U true JPS63135222U (US20070167544A1-20070719-C00007.png) | 1988-09-05 |
JPH0413622Y2 JPH0413622Y2 (US20070167544A1-20070719-C00007.png) | 1992-03-30 |
Family
ID=30831542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987028509U Expired JPH0413622Y2 (US20070167544A1-20070719-C00007.png) | 1987-02-27 | 1987-02-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0413622Y2 (US20070167544A1-20070719-C00007.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015017916A (ja) * | 2013-07-12 | 2015-01-29 | 株式会社ミツトヨ | 検出ヘッド、光学式エンコーダ、及び光学式エンコーダの調整方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61125076A (ja) * | 1984-11-21 | 1986-06-12 | Toshiba Corp | イメ−ジセンサおよびその製造方法 |
-
1987
- 1987-02-27 JP JP1987028509U patent/JPH0413622Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61125076A (ja) * | 1984-11-21 | 1986-06-12 | Toshiba Corp | イメ−ジセンサおよびその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015017916A (ja) * | 2013-07-12 | 2015-01-29 | 株式会社ミツトヨ | 検出ヘッド、光学式エンコーダ、及び光学式エンコーダの調整方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0413622Y2 (US20070167544A1-20070719-C00007.png) | 1992-03-30 |