JPS63132299U - - Google Patents
Info
- Publication number
- JPS63132299U JPS63132299U JP2443787U JP2443787U JPS63132299U JP S63132299 U JPS63132299 U JP S63132299U JP 2443787 U JP2443787 U JP 2443787U JP 2443787 U JP2443787 U JP 2443787U JP S63132299 U JPS63132299 U JP S63132299U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- receiving member
- base
- heat
- transportation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 3
Landscapes
- Tunnel Furnaces (AREA)
- Furnace Charging Or Discharging (AREA)
Description
第１図は本考案に係る運搬用治具上に支持台を
乗せた状態を示す斜視図であり、支持台は多数の
シリコンウエハーを載置した状態にある。第２図
〜第４図は本考案に係る運搬用治具の第１実施例
を示すもので、第２図はその平面図、第３図は同
側面図、第４図は第２図の―線に沿つて見た
拡大断面図である。また、第５図及び第６図は本
考案に係る運搬用治具の第２実施例を示すもので
、第５図はその平面図、第６図は同側面図である
。さらに、第７図及び第８図は本考案に係る運搬
用治具の第３実施例を示すもので、第７図はその
平面図、第８図は第７図の―線に沿つて見た
拡大断面図である。第９図は多数のシリコンウエ
ハーを載置した状態の支持台を斜視図である。
符号の説明、１０……運搬用治具、１１……突
起、１２……受皿部、２０……受部材、２１……
切り欠き、３０……支持台、４０……シリコンウ
エハー。
FIG. 1 is a perspective view showing a support stand placed on a transportation jig according to the present invention, and a large number of silicon wafers are placed on the support stand. 2 to 4 show a first embodiment of the transportation jig according to the present invention, FIG. 2 is a plan view thereof, FIG. 3 is a side view of the same, and FIG. 4 is the same as that shown in FIG. - an enlarged sectional view taken along the line. 5 and 6 show a second embodiment of the transportation jig according to the present invention, with FIG. 5 being a plan view thereof and FIG. 6 being a side view thereof. Furthermore, FIGS. 7 and 8 show a third embodiment of the transportation jig according to the present invention, FIG. 7 is a plan view thereof, and FIG. 8 is a view taken along the line - in FIG. 7. FIG. FIG. 9 is a perspective view of a support stand on which a large number of silicon wafers are placed. Explanation of symbols, 10...Transportation jig, 11...Protrusion, 12...Saucer portion, 20...Receiving member, 21...
Notch, 30...Support stand, 40...Silicon wafer.
Claims (1)
ハー等の被加熱処理材料を載置するための耐熱性
支持台に接触した状態で、この支持台の炉に対す
る搬入・搬出を行なうための運搬用治具において
、 この治具の基体を石英によつて形成するととも
に、この基体の、前記支持台が接触すべき上面側
の少なくとも一部分に、炭化珪素からなる受部材
を取付け、 この受部材に前記支持台をその下面にて接触さ
せた状態で載置するようにしたことを特徴とする
耐熱性支持台の運搬用治具。 (2) 前記受部材の前記基体に対する取付けは、
当該受部材の下面に形成した切り欠きまたは突起
を、前記基体の上側に形成した突起または切り欠
きに係合させて行なうようにしたことを特徴とす
る実用新案登録請求の範囲第１項に記載の運搬用
治具。[Claims for Utility Model Registration] (1) Carrying a heat-resistant support into a furnace in contact with a heat-resistant support for placing a material to be heated, such as a silicon wafer made of silicon carbide;・In a transportation jig for carrying out transportation, the base of the jig is formed of quartz, and a receiving member made of silicon carbide is provided on at least a portion of the upper surface of the base that should be in contact with the support base. A jig for transporting a heat-resistant support stand, characterized in that the support stand is placed in a state in which a lower surface thereof is in contact with the receiving member. (2) Attachment of the receiving member to the base body includes:
Claim 1 of the Utility Model Registration Claim, characterized in that the notch or protrusion formed on the lower surface of the receiving member is engaged with the protrusion or notch formed on the upper side of the base body. jig for transportation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2443787U JPS63132299U (en) | 1987-02-20 | 1987-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2443787U JPS63132299U (en) | 1987-02-20 | 1987-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63132299U true JPS63132299U (en) | 1988-08-30 |
Family
ID=30823664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2443787U Pending JPS63132299U (en) | 1987-02-20 | 1987-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63132299U (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5978529A (en) * | 1982-10-28 | 1984-05-07 | Toshiba Ceramics Co Ltd | Silicon carbide material for manufacturing semiconductor |
| JPS59200431A (en) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | Tool for carrying wafer boat |
| JPS59200432A (en) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | Tool for carrying wafer boat |
| JPS624336A (en) * | 1985-07-01 | 1987-01-10 | Toshiba Ceramics Co Ltd | Wafer boat transporting jig |
-
1987
- 1987-02-20 JP JP2443787U patent/JPS63132299U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5978529A (en) * | 1982-10-28 | 1984-05-07 | Toshiba Ceramics Co Ltd | Silicon carbide material for manufacturing semiconductor |
| JPS59200431A (en) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | Tool for carrying wafer boat |
| JPS59200432A (en) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | Tool for carrying wafer boat |
| JPS624336A (en) * | 1985-07-01 | 1987-01-10 | Toshiba Ceramics Co Ltd | Wafer boat transporting jig |
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