JPH029426U - - Google Patents
Info
- Publication number
- JPH029426U JPH029426U JP8706688U JP8706688U JPH029426U JP H029426 U JPH029426 U JP H029426U JP 8706688 U JP8706688 U JP 8706688U JP 8706688 U JP8706688 U JP 8706688U JP H029426 U JPH029426 U JP H029426U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- wafers
- grooves
- holes
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 claims description 11
- 239000012779 reinforcing material Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000003466 welding Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Description
第１図は本考案の１例を示す補強材で補強され
たウエハ用石英ボートの斜視図であり、第２図は
その側面図である。第３図はウエハを載置したウ
エハ支持ロツドの変形方向を説明する図であり、
第４図は各種石英支持ロツドと各種補強材とを形
状、位置などを変えて組み合わせた例を示す図で
あり、第５図は試験例を説明する図である。第６
図は従来のウエハ用石英ボートの一例を示す斜視
図であり、第７図は従来のウエハ支持方法の一例
を示す略図である。
１……ウエハ用石英ボート、３……石英支持ロ
ツド、４……ウエハ保持用溝、５……支板、６…
…溝、７……孔、８……補強材、９……石英カバ
ー。
FIG. 1 is a perspective view of a wafer quartz boat reinforced with a reinforcing material, showing an example of the present invention, and FIG. 2 is a side view thereof. FIG. 3 is a diagram illustrating the deformation direction of the wafer support rod on which the wafer is placed.
FIG. 4 is a diagram showing an example in which various quartz support rods and various reinforcing materials are combined with different shapes and positions, and FIG. 5 is a diagram illustrating a test example. 6th
This figure is a perspective view showing an example of a conventional quartz boat for wafers, and FIG. 7 is a schematic diagram showing an example of a conventional wafer supporting method. DESCRIPTION OF SYMBOLS 1... Quartz boat for wafer, 3... Quartz support rod, 4... Wafer holding groove, 5... Support plate, 6...
...Groove, 7...hole, 8...reinforcement material, 9...quartz cover.
Claims (1)
支板に溶着等して構成され炉内で半導体ウエハを
熱処理するために用いられるウエハ保持用石英ボ
ートにおいて、上記一対の支板には石英ロツドと
隣接する所望位置に溝、孔を設け、該溝、孔中に
ＳｉまたはＳｉＣ等からなる高耐熱性補強材を配
したことを特徴とするウエハ用石英ボート。 In a quartz boat for holding wafers, which is constructed by welding a plurality of quartz rods for supporting semiconductor wafers to a pair of base plates and is used for heat-treating semiconductor wafers in a furnace, the pair of base plates has a quartz rod adjacent to the quartz rods. A quartz boat for wafers, characterized in that grooves and holes are provided at desired positions, and a highly heat-resistant reinforcing material made of Si, SiC, etc. is arranged in the grooves and holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8706688U JPH029426U (en) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8706688U JPH029426U (en) | 1988-06-30 | 1988-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH029426U true JPH029426U (en) | 1990-01-22 |
Family
ID=31311700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8706688U Pending JPH029426U (en) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029426U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970030251A (en) * | 1995-11-30 | 1997-06-26 | 김광호 | Baffles in Diffusion Furnace for Semiconductor Device Manufacturing |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS60189930A (en) * | 1984-03-12 | 1985-09-27 | Toshiba Ceramics Co Ltd | Wafer holding device |
| JPS6245826B2 (en) * | 1979-04-17 | 1987-09-29 | Seikoo Epuson Kk |
-
1988
- 1988-06-30 JP JP8706688U patent/JPH029426U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS6245826B2 (en) * | 1979-04-17 | 1987-09-29 | Seikoo Epuson Kk | |
| JPS60189930A (en) * | 1984-03-12 | 1985-09-27 | Toshiba Ceramics Co Ltd | Wafer holding device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970030251A (en) * | 1995-11-30 | 1997-06-26 | 김광호 | Baffles in Diffusion Furnace for Semiconductor Device Manufacturing |
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