JPS63128411U - - Google Patents

Info

Publication number
JPS63128411U
JPS63128411U JP1871687U JP1871687U JPS63128411U JP S63128411 U JPS63128411 U JP S63128411U JP 1871687 U JP1871687 U JP 1871687U JP 1871687 U JP1871687 U JP 1871687U JP S63128411 U JPS63128411 U JP S63128411U
Authority
JP
Japan
Prior art keywords
measuring device
length measuring
correction
measurement
measurement beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1871687U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1871687U priority Critical patent/JPS63128411U/ja
Publication of JPS63128411U publication Critical patent/JPS63128411U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例の光学系構成図であ
る。 １……レーザ発振器、４……補正用ビーム、１
４，１５……位相差検出回路、１６……計算機。 FIG. 1 is a block diagram of an optical system according to an embodiment of the present invention. 1... Laser oscillator, 4... Correction beam, 1
4, 15... Phase difference detection circuit, 16... Calculator.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] レーザ光の干渉を利用した測長器において、ビ
ームを２分割する手段を設け、その一方を測定用
ビームとし、もう一方を補正用ビームとし、補正
用ビームは測定用ビームに対して反対方向から測
定対象物の変位を測定するようにマイケルソン型
干渉計を構成し、それ専用の信号処理回路を備え
たことを特徴とするレーザ干渉測長器。 In a length measuring device that uses laser beam interference, a means is provided to split the beam into two, one of which is used as a measurement beam and the other as a correction beam, and the correction beam is inserted from the opposite direction to the measurement beam. A laser interferometric length measuring device comprising a Michelson interferometer configured to measure the displacement of an object to be measured, and equipped with a dedicated signal processing circuit.
JP1871687U 1987-02-13 1987-02-13 Pending JPS63128411U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1871687U JPS63128411U (en) 1987-02-13 1987-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1871687U JPS63128411U (en) 1987-02-13 1987-02-13

Publications (1)

Publication Number Publication Date
JPS63128411U true JPS63128411U (en) 1988-08-23

Family

ID=30812642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1871687U Pending JPS63128411U (en) 1987-02-13 1987-02-13

Country Status (1)

Country Link
JP (1) JPS63128411U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006133035A (en) * 2004-11-04 2006-05-25 Nec Electronics Corp Device and method for measuring laser interference
JP2009236554A (en) * 2008-03-26 2009-10-15 Mitsutoyo Corp Method, apparatus, and system for evaluation and calibration of dual-wavelength laser interferometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006133035A (en) * 2004-11-04 2006-05-25 Nec Electronics Corp Device and method for measuring laser interference
JP2009236554A (en) * 2008-03-26 2009-10-15 Mitsutoyo Corp Method, apparatus, and system for evaluation and calibration of dual-wavelength laser interferometer

Similar Documents

Publication Publication Date Title
JPS63128411U (en)
SE8604958D0 (en) METINSTRUMENT
JPS6183911A (en) Optical type displacement measuring apparatus
FR2347653A1 (en) INSTRUMENT FOR MEASURING INCLINATIONS AND CHECKING THE ALIGNMENT CHARACTERISTICS OF VEHICLE WHEELS
JPH01107905U (en)
JPS63187005U (en)
JPS6232309U (en)
JPS62106104U (en)
JPS6065612U (en) infrared thickness gauge
JPS63181805U (en)
JPS62140313U (en)
JPS5971108U (en) Optical high-precision dimension measuring device
JPH02128906U (en)
JPH01142820U (en)
JPS61105805U (en)
JPH0271203U (en)
JPH0453505U (en)
JPS61119712U (en)
JPH0316017U (en)
JPH01128109U (en)
JPS6433013U (en)
JPH01167606U (en)
JPS61170012U (en)
JPH03127944U (en)
JPH0181257U (en)