JPS63127975U - - Google Patents
Info
- Publication number
- JPS63127975U JPS63127975U JP1959387U JP1959387U JPS63127975U JP S63127975 U JPS63127975 U JP S63127975U JP 1959387 U JP1959387 U JP 1959387U JP 1959387 U JP1959387 U JP 1959387U JP S63127975 U JPS63127975 U JP S63127975U
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor wafer
- metal plate
- shaped jig
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 239000010419 fine particle Substances 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1959387U JPS63127975U (enrdf_load_stackoverflow) | 1987-02-12 | 1987-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1959387U JPS63127975U (enrdf_load_stackoverflow) | 1987-02-12 | 1987-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127975U true JPS63127975U (enrdf_load_stackoverflow) | 1988-08-22 |
Family
ID=30814328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1959387U Pending JPS63127975U (enrdf_load_stackoverflow) | 1987-02-12 | 1987-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127975U (enrdf_load_stackoverflow) |
-
1987
- 1987-02-12 JP JP1959387U patent/JPS63127975U/ja active Pending
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