JPS6312744B2 - - Google Patents
Info
- Publication number
- JPS6312744B2 JPS6312744B2 JP58246682A JP24668283A JPS6312744B2 JP S6312744 B2 JPS6312744 B2 JP S6312744B2 JP 58246682 A JP58246682 A JP 58246682A JP 24668283 A JP24668283 A JP 24668283A JP S6312744 B2 JPS6312744 B2 JP S6312744B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- shaft
- guide
- main shaft
- drive shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 160
- 230000033001 locomotion Effects 0.000 description 19
- 230000007246 mechanism Effects 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 14
- 239000004033 plastic Substances 0.000 description 13
- 229920003023 plastic Polymers 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 239000002184 metal Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 150000002739 metals Chemical class 0.000 description 8
- 229910003460 diamond Inorganic materials 0.000 description 7
- 239000010432 diamond Substances 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 239000003082 abrasive agent Substances 0.000 description 5
- 238000003754 machining Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 229910001315 Tool steel Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 241000675108 Citrus tangerina Species 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58246682A JPS60141463A (ja) | 1983-12-29 | 1983-12-29 | 研磨用部品 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58246682A JPS60141463A (ja) | 1983-12-29 | 1983-12-29 | 研磨用部品 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60141463A JPS60141463A (ja) | 1985-07-26 |
| JPS6312744B2 true JPS6312744B2 (no) | 1988-03-22 |
Family
ID=17152046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58246682A Granted JPS60141463A (ja) | 1983-12-29 | 1983-12-29 | 研磨用部品 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60141463A (no) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63114867A (ja) * | 1986-11-04 | 1988-05-19 | Tdk Corp | ラツプ研摩装置 |
| JP2616914B2 (ja) * | 1986-12-10 | 1997-06-04 | 株式会社 アマダ | 可搬式金型研削装置 |
| GB9024709D0 (en) * | 1990-11-14 | 1991-01-02 | Penico Holdings Ltd | Support for a moving part |
| JPH05212658A (ja) * | 1992-01-31 | 1993-08-24 | Maruei Kikai Seisakusho:Kk | 立型コンピュータｎｃ装置付三次元研削盤によるワーク研削加工装置 |
| AT407968B (de) * | 1999-09-15 | 2001-07-25 | Modto Corp | Antriebseinrichtung für einen schleif-, läpp- oder polier-werkzeugkörper |
| JP4510710B2 (ja) * | 2005-07-05 | 2010-07-28 | 株式会社永田製作所 | 研摩装置 |
| CN103317412B (zh) * | 2013-07-10 | 2016-02-17 | 陈哲 | 全自动水钻磨抛机的磨抛进位及夹具工位转换机构 |
| JP6255303B2 (ja) * | 2014-05-14 | 2017-12-27 | 株式会社荏原製作所 | 研磨テーブル交換装置および研磨テーブルの取り出し方法 |
| JP6445357B2 (ja) * | 2015-03-11 | 2018-12-26 | 株式会社荏原製作所 | 半導体デバイス製造装置の構成部品を交換する装置 |
| KR101836342B1 (ko) | 2014-05-14 | 2018-04-19 | 가부시키가이샤 에바라 세이사꾸쇼 | 연마 테이블 교환 장치, 연마 테이블의 교환 방법, 및 반도체 디바이스 제조 장치의 구성 부품을 교환하는 장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55164462A (en) * | 1979-06-06 | 1980-12-22 | American Optical Corp | Head for polishing lens |
-
1983
- 1983-12-29 JP JP58246682A patent/JPS60141463A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55164462A (en) * | 1979-06-06 | 1980-12-22 | American Optical Corp | Head for polishing lens |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60141463A (ja) | 1985-07-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |