JPS63127420A - Thin metallic film type magnetic disk for intra-surface recording - Google Patents
Thin metallic film type magnetic disk for intra-surface recordingInfo
- Publication number
- JPS63127420A JPS63127420A JP27265186A JP27265186A JPS63127420A JP S63127420 A JPS63127420 A JP S63127420A JP 27265186 A JP27265186 A JP 27265186A JP 27265186 A JP27265186 A JP 27265186A JP S63127420 A JPS63127420 A JP S63127420A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- intra
- recording
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 67
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 11
- 239000000956 alloy Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 7
- 229910020630 Co Ni Inorganic materials 0.000 claims abstract description 6
- 229910002440 Co–Ni Inorganic materials 0.000 claims abstract description 6
- 229910018104 Ni-P Inorganic materials 0.000 claims abstract description 4
- 229910018536 Ni—P Inorganic materials 0.000 claims abstract description 4
- 239000010408 film Substances 0.000 claims description 57
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 229910018106 Ni—C Inorganic materials 0.000 claims description 2
- 230000005415 magnetization Effects 0.000 abstract description 8
- 229910018487 Ni—Cr Inorganic materials 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 238000010030 laminating Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 abstract 1
- 239000011241 protective layer Substances 0.000 abstract 1
- 229910001096 P alloy Inorganic materials 0.000 description 7
- 230000004907 flux Effects 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 229910020676 Co—N Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- -1 hypophosphite ions Chemical class 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、金属薄膜型面内記録用磁気ディスクに関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a metal thin film type magnetic disk for longitudinal recording.
記憶装置の磁気記録媒体である磁気ディスクは、基本的
には非磁性基板とその表面に形成された磁性膜とからな
り、従来よりその磁性膜として酸化鉄粉末を主成分とす
る粉末を塗布した磁性粉末塗布型磁気ディスクが用いら
れてきたが、近時は高密度記録の要請から、Ｃｏ−Ｎｉ
系合金等の強磁性金属を磁性膜とする金属薄膜型の磁気
ディスクの開発が進められている。磁気ディスクの磁化
記録形成には垂直磁化と面内磁化とがあるが、記録再生
に関して浮上型ヘッドの技術が完成し、面内磁気記録方
式が技術的に先行していることから、金属薄膜型面内記
録用磁気ディスクの需要性は日増しに増大している。A magnetic disk, which is the magnetic recording medium of a storage device, basically consists of a non-magnetic substrate and a magnetic film formed on its surface. Conventionally, the magnetic film is coated with a powder mainly composed of iron oxide powder. Magnetic powder-coated magnetic disks have been used, but due to the recent demand for high-density recording, Co-Ni
Development of metal thin film type magnetic disks in which the magnetic film is made of ferromagnetic metals such as alloys is progressing. There are two types of magnetic recording: perpendicular magnetization and in-plane magnetization.Since floating head technology has been completed for recording and reproducing, and the in-plane magnetic recording method is technologically ahead, metal thin film type The demand for magnetic disks for longitudinal recording is increasing day by day.
面内記録用磁気ディスクの磁性膜は、高密度の面内磁化
を行うために、面内異方性を有すると同時に、磁化記録
に必要な磁化特性、特に高保磁力（Ｈｃ）と高残留磁束
密度（Ｂｒ）を有することが必要である。The magnetic film of a magnetic disk for in-plane recording has in-plane anisotropy in order to perform high-density in-plane magnetization, and at the same time has the magnetization characteristics necessary for magnetization recording, especially high coercive force (Hc) and high residual magnetic flux. It is necessary to have a density (Br).
また、その磁性膜は、膜厚が薄く、均質性にすぐれてい
ることが必要である。膜厚が厚いと、分解能の低下等に
より記録密度が低くなり、また均質性に乏しいと、記録
時の出力変動等の原因となる。Further, the magnetic film needs to be thin and have excellent homogeneity. If the film is thick, the recording density will be low due to a decrease in resolution, and if the film is not homogeneous, it will cause output fluctuations during recording.
更に、磁気ディスクの表面はうねりが少なく、かつ平滑
性にすぐれていなければならない。平坦性や平滑性に欠
けると、表面にアクセスする磁気ヘッドのフローティン
グ不良を惹起するからである。また、記録・再生・消去
の繰り返しに耐えるように、機械的強度を有すると共に
、潤滑性と摩耗抵抗性が高り、磁気ヘッドとの摺接によ
る摩耗・損傷の少ないことが望まれる。Furthermore, the surface of the magnetic disk must have little waviness and excellent smoothness. This is because a lack of flatness or smoothness will cause a floating failure of the magnetic head that accesses the surface. In addition, it is desired that the magnetic head has mechanical strength so as to withstand repeated recording, reproducing, and erasing operations, has high lubricity and wear resistance, and has little wear and damage due to sliding contact with the magnetic head.
本発明は、上記緒特性を兼ね備えた面内記録用磁気ディ
スクを提供するものである。The present invention provides a magnetic disk for longitudinal recording that has the above characteristics.
〔問題点を解決するための手段および作用〕本発明の面
内記録用磁気ディスクは、
アルミニウム合金製基板の表面をＮ１−Ｐ合金膜で被覆
し、これにＣｒ膜、Ｇｏ−Ｎｉ系またはＣｏ−Ｎｉ−Ｃ
ｒ系磁性膜および炭素質被膜がこの順に積層形成されて
いることを特徴としている。[Means and effects for solving the problems] The magnetic disk for longitudinal recording of the present invention is provided by coating the surface of an aluminum alloy substrate with an N1-P alloy film, which is coated with a Cr film, Go-Ni system or Co -Ni-C
It is characterized in that an r-based magnetic film and a carbonaceous film are laminated in this order.
以下、本発明の磁気ディスクについて詳しく説明する。The magnetic disk of the present invention will be explained in detail below.
アルミニウム合金製基板に、膜厚が薄く一様で、均質性
に冨む磁性膜を形成するには、基板表面が高度に平滑で
鏡面性でなければならない。このためには、基板表面に
硬質の皮膜を設けてその表面を精密研磨することが必要
である。むろん、その皮膜は、磁性層に磁気的影響を与
えないように非磁性または弱磁性体でなければならず、
また精密研磨を達成するためには、粒界を有しないもの
であることが望ましい。これらの要求に合致するものと
してＮ１−Ｐ合金皮膜が極めて好適である。In order to form a thin, uniform, and highly homogeneous magnetic film on an aluminum alloy substrate, the surface of the substrate must be highly smooth and mirror-like. For this purpose, it is necessary to provide a hard film on the surface of the substrate and precisely polish the surface. Of course, the film must be non-magnetic or weakly magnetic so as not to have a magnetic effect on the magnetic layer.
Further, in order to achieve precision polishing, it is desirable that the material has no grain boundaries. A N1-P alloy film is extremely suitable as one that meets these requirements.
このＮｉ −Ｐ合金膜は無電解めっき法により形成する
ことができる。その皮膜は、非磁性、硬度の確保、およ
び膜強度や平滑性等の点から、Ｐ量ニア〜１３重量％の
ものが好ましい。また膜厚（研磨後）は、下地層として
の効果を得るために、１０μｍ以上であることが望まし
いが、２５μｍまでで十分であり、それを越える必要は
特にない。This Ni--P alloy film can be formed by electroless plating. The film preferably has a P content of about 13% by weight from the viewpoint of ensuring non-magnetic properties, hardness, and film strength and smoothness. Further, the film thickness (after polishing) is preferably 10 μm or more in order to obtain the effect as an underlayer, but up to 25 μm is sufficient and there is no particular need to exceed it.
上記Ｎ１−Ｐ合金皮膜を形成した基板に、Ｃｒ膜を設け
るのは、その上に形成される磁性膜に面内異方性をもた
せるためである。Ｃｏ−Ｎｉ系またはＣｏ−Ｎｉ−Ｃｒ
系合金磁性膜（六方晶）は、そのＣ軸が面内に平行とな
るように形成されることにより面内異方性となる。この
ために、Ｃｒ膜を下地層として形成する。そのＣｒ１Ｉ
ｌの膜厚は、約１３００Å以上を必要とするが、約５０
００人を越える必要はない。The reason why the Cr film is provided on the substrate on which the N1-P alloy film is formed is to impart in-plane anisotropy to the magnetic film formed thereon. Co-Ni system or Co-Ni-Cr
The system alloy magnetic film (hexagonal crystal) has in-plane anisotropy by being formed so that its C axis is parallel to the in-plane. For this purpose, a Cr film is formed as a base layer. That Cr1I
The film thickness of l needs to be about 1300 Å or more, but about 50 Å or more is required.
There is no need to exceed 00 people.
磁性膜は、面内異方性をもつと同時に、磁気記録に必要
な磁気的性質として、特に保磁力（Ｈｃ）と残留磁束密
度（Ｂｒ）とが重要である。残留磁束密度（Ｂｒ）は飽
和磁束密度（Ｂｓ）と角型比（ＳＲ）とによって決定さ
れる。一般に、Ｈｃは５００〜１００００ ｅ 、、Ｂ
ｒ ・δ（δは磁性膜の膜厚。A magnetic film has in-plane anisotropy, and coercive force (Hc) and residual magnetic flux density (Br) are particularly important as magnetic properties necessary for magnetic recording. The residual magnetic flux density (Br) is determined by the saturation magnetic flux density (Bs) and the squareness ratio (SR). Generally, Hc is 500-10000 e,, B
r ・δ (δ is the thickness of the magnetic film.
μｍ）は３００〜９００Ｇ・μの範囲が適当であり、こ
れらの条件を満たすように磁性膜の成分・膜厚が決定さ
れる。これらの点から、本発明は、磁性膜材をＣｏ−Ｎ
ｉ系またはＣｏ−Ｎｉ−Ｃｒ系合金とする。そのＣｏ−
Ｎｉ系合金はＮｉ：１０〜４０原子％、残部Ｃｏからな
るものが、またＣｏ−Ｎｉ−Ｃｒ系合金は、Ｎｉ：５〜
４０原子％、Ｃｒ：３〜１５原子％、残部Ｃｏからなる
組成のものが好ましい、また、その膜厚は５００〜２０
００人の範囲が適当である。μm) is suitably in the range of 300 to 900 G·μ, and the components and film thickness of the magnetic film are determined to satisfy these conditions. From these points, the present invention uses Co-N as a magnetic film material.
i-based or Co-Ni-Cr based alloy. That Co-
Ni-based alloys consist of Ni: 10 to 40 atomic % and the balance is Co, and Co-Ni-Cr alloys contain Ni: 5 to 40 atomic percent.
It is preferable to have a composition consisting of 40 at% Cr, 3 to 15 at% Cr, and the balance Co, and the film thickness is 500 to 20%.
A range of 00 people is appropriate.
磁性膜の表面に積層される炭素質被膜は、ダイヤモンド
状炭素、グラファイト状炭素もしくはアモルファス炭素
、またはそれらの混合した薄膜であり、磁性膜を磁気ヘ
ッドとの接触による摩耗・損傷から保護する。そのため
の炭素質膜の膜厚は少なくとも１５０人が必要であるが
、あまり厚くなると、磁性膜と磁気ヘッドとの間の実効
距離が長くなり、記録性能が低下するので、約６００人
を上限とする。The carbonaceous film laminated on the surface of the magnetic film is a thin film of diamond-like carbon, graphite-like carbon, amorphous carbon, or a mixture thereof, and protects the magnetic film from wear and damage caused by contact with the magnetic head. For this purpose, the thickness of the carbonaceous film requires at least 150 people, but if it becomes too thick, the effective distance between the magnetic film and the magnetic head becomes longer and the recording performance deteriorates, so the upper limit is about 600 people. do.
上記のＣｒ膜、磁性膜および炭素質膜は、いずれもスパ
ッタリングにより好適に形成される。The above-mentioned Cr film, magnetic film, and carbonaceous film are all suitably formed by sputtering.
本発明の磁気ディスクを製作するには、まずアルミニウ
ム合金製基板の表面を切削または研削したのち、その表
面に、無電解めっき法により、２価のＮｉイオンと次亜
リン酸イオンとを主成分とするめっき液を用いてＮ１−
Ｐ合金膜を形成する。To manufacture the magnetic disk of the present invention, first, the surface of an aluminum alloy substrate is cut or ground, and then divalent Ni ions and hypophosphite ions are coated on the surface by electroless plating. Using a plating solution of
Form a P alloy film.
そのＮ１−Ｐ合金膜の表面を研磨し、所望により研磨の
後、ディスクとヘッドとの間の静摩擦性向上のためのテ
スクチャリング研磨を施したうえ、その研磨面に、スパ
ッタリングにより、Ｃｒ膜、磁性膜および炭素質膜を順
次積層形成することにより目的とする磁気ディスクを得
る。そのスパンタリングにおけるスパッタ室内のＡｒガ
ス圧力は、約Ｉ Ｘ １０−′Ｊ〜５ Ｘ １Ｏ−２Ｔ
ｏｒｒが適当であり、また、磁性膜と炭素質膜のスパッ
クリングは、磁性膜表面の酸化等による変質を防止する
ために連続して行うことが望ましい。The surface of the N1-P alloy film is polished, and if desired, after polishing, texturing polishing is applied to improve the static friction between the disk and the head, and a Cr film is formed on the polished surface by sputtering. A desired magnetic disk is obtained by sequentially laminating a magnetic film and a carbonaceous film. The Ar gas pressure in the sputtering chamber during the sputtering is approximately I x 10-'J to 5 x 10-2T
orr is appropriate, and it is desirable that the spuckling of the magnetic film and carbonaceous film be performed continuously in order to prevent deterioration of the surface of the magnetic film due to oxidation or the like.
アルミニウム合金（Ａβ−Ｍｇ）型基板の表面を切削加
工したのち、無電解めっき法により、１０重量％のＰを
含むＮｉ −Ｐ合金めっき膜を形成し、その表面に精密
研磨を施して鏡面性の表面に仕上げる（研摩後のＮ１−
Ｐ合金めっき膜厚；１５μｍ）。ついで、その表面にス
パッタリングにより、Ｃ「膜（膜厚： ２５００人＞、
Ｎｉ量：２０原子％のＣｏ−Ｎｉ系合金磁性膜（膜厚：
８００人）、およびダイヤモンド状炭素質被膜（膜厚：
４００人）を順次積層形成した。After cutting the surface of an aluminum alloy (Aβ-Mg) type substrate, a Ni-P alloy plating film containing 10% by weight of P is formed by electroless plating, and the surface is precisely polished to give it a mirror finish. (N1- after polishing)
P alloy plating film thickness: 15 μm). Then, a C film (thickness: 2500>) was formed on the surface by sputtering.
Co-Ni alloy magnetic film with Ni amount: 20 at% (film thickness:
800 people), and diamond-like carbonaceous coating (film thickness:
400 people) were sequentially laminated.
前記製作条件下に得られた磁気ディスクの磁気特性およ
び表面の摩擦特性につき次の結果を得た。The following results were obtained regarding the magnetic properties and surface friction properties of the magnetic disk obtained under the above manufacturing conditions.
（Ａ）磁気特性
保磁カニ８３００ｅ
残留磁束：５３０Ｇ・μ
角型比７０．８３
ＣＢ）摩擦特性
（ｉ）測定条件
Ｍｎ−Ｚｎ型フェライトベント使用
荷重：１０ｇ
ディスク回転数： １１００ｒｐ
試験個所：ディスク外縁付近
（ｉｉ）測定結果′
静摩擦係数： ０．３１
動摩擦係数： ０．２３
〔発明の効果〕
本発明の磁気ディスクは、面内磁化記録性能にすぐれ、
高密度記録が可能であり、また磁気ヘッドとの接触・衝
突による摩耗・損傷に対する抵抗性が高く、記録・再生
・消去の繰り返しに耐える。(A) Magnetic properties Coercive crab 8300e Residual magnetic flux: 530G・μ Squareness ratio 70.83 CB) Friction properties (i) Measurement conditions Mn-Zn type ferrite vent Working load: 10g Disk rotation speed: 1100rp Test location: Disk outer edge Near (ii) Measurement results' Static friction coefficient: 0.31 Dynamic friction coefficient: 0.23 [Effects of the invention] The magnetic disk of the present invention has excellent in-plane magnetization recording performance,
It is capable of high-density recording, has high resistance to wear and damage caused by contact and collision with magnetic heads, and can withstand repeated recording, reproduction, and erasing.
従って、本発明磁気ディスクは、電子計算機、ビデオ、
オーディオ等の記録媒体としての記録性能・信頼性を高
めるものであり、大なる工業的価値を有している。Therefore, the magnetic disk of the present invention can be used for electronic computers, videos, etc.
It improves recording performance and reliability as a recording medium for audio, etc., and has great industrial value.
Claims (1)
基板に、Ｃｒ膜、Ｃｏ−Ｎｉ系もしくはＣｏ−Ｎｉ−Ｃ
ｒ系磁性膜、および炭素質被膜が、この順に積層されて
なる金属薄膜型面内記録用磁気ディスク。(1) On an aluminum alloy substrate provided with a Ni-P alloy film, a Cr film, a Co-Ni system or a Co-Ni-C
A metal thin film type longitudinal recording magnetic disk comprising an r-based magnetic film and a carbonaceous film laminated in this order.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27265186A JPS63127420A (en) | 1986-11-15 | 1986-11-15 | Thin metallic film type magnetic disk for intra-surface recording |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27265186A JPS63127420A (en) | 1986-11-15 | 1986-11-15 | Thin metallic film type magnetic disk for intra-surface recording |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127420A true JPS63127420A (en) | 1988-05-31 |
Family
ID=17516889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27265186A Pending JPS63127420A (en) | 1986-11-15 | 1986-11-15 | Thin metallic film type magnetic disk for intra-surface recording |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127420A (en) |
-
1986
- 1986-11-15 JP JP27265186A patent/JPS63127420A/en active Pending
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