JPS61199224A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS61199224A
JPS61199224A JP4045085A JP4045085A JPS61199224A JP S61199224 A JPS61199224 A JP S61199224A JP 4045085 A JP4045085 A JP 4045085A JP 4045085 A JP4045085 A JP 4045085A JP S61199224 A JPS61199224 A JP S61199224A
Authority
JP
Japan
Prior art keywords
layer
magnetic
nonmagnetic
substrate
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4045085A
Other languages
Japanese (ja)
Inventor
Tomoji Morita
森田 知二
Mitsumasa Umezaki
梅崎 光政
Hirobumi Ouchi
博文 大内
Isato Nishinakagawa
西中川 勇人
Yasuhiro Okamura
康弘 岡村
Teruji Futami
二見 照治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4045085A priority Critical patent/JPS61199224A/en
Publication of JPS61199224A publication Critical patent/JPS61199224A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a magnetic recording medium which is improved in the crystal orientation of a magnetic medium layer and is improved in magnetic characteristics and the number of times of CSS by providing a specific nonmagnetic underlying layer on a nonmagnetic substrate via a nonmagnetic hardened layer and providing the magnetic medium layer on the nonmagnetic underlying layer. CONSTITUTION:The nonmagnetic hardened layer 2 consisting of an alumite film, etc. is formed on the nonmagnetic substrate 1 consisting of an Al alloy, etc. in order to improve the surface characteristic of the substrate 1 and the surface of said layer is finished to a specular surface. The nonmagnetic underlying layer 3 is then formed by using one kind among TiO2, TiC and TiN on the layer 2 within the range of 50-2,400Angstrom film thickness. The magnetic medium layer 4 consisting of thin gamma-Fe2O3, Co and Co alloy thin films, etc. is formed on the layer 3. The crystal orientation and magnetic characteristics of the layer are made better by providing the layer 3 than in the case of forming directly the magnetic medium layer 4 on the layer 2. The high reliability magnetic disk or the like which increases the number of times of CSS is thus obtd.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、たとえばコバルト、コバルト合金。[Detailed description of the invention] [Industrial application field] This invention applies, for example, to cobalt and cobalt alloys.

鉄、鉄合金、ニッケル、ニッケル合金などの金属強磁性
体よりなる磁性層、あるいは酸化鉄、酸化クロムなどの
金属酸化物強磁性体よりなる磁性層を有する磁気記録媒
体に関するものである。
The present invention relates to a magnetic recording medium having a magnetic layer made of a metal ferromagnetic material such as iron, iron alloy, nickel, or nickel alloy, or a magnetic layer made of a metal oxide ferromagnetic material such as iron oxide or chromium oxide.

〔従来の技術〕[Conventional technology]

近年、コンピュータ・システムにおける磁気ディスク等
の外部記憶装置の重要性が増大し、高記録密度化に対す
る要求はますます高まっている。
In recent years, the importance of external storage devices such as magnetic disks in computer systems has increased, and the demand for higher recording densities is increasing.

磁気記録装置は記録再生ヘッドおよび磁気ディスクの主
構成部から構成され、1a気デイスクは高速で回転し記
録再生ヘッドは磁気ディスクより微小間隔浮上している
。磁気記録装置の高性能化に伴い、この浮上間隔を小さ
くするために記鈴再生ヘッドの荷重を小さくするととも
に接触始動・停止(コンタクト−スタート・ストップ:
08B)型ヘッドシステムが採用されている。磁気ディ
スクすなわち磁気記録媒体の高記録密度化、高性能化を
図るためには、記録媒体の薄層化、均−一様化。
A magnetic recording device is composed of the main components of a recording/reproducing head and a magnetic disk.The 1A disk rotates at high speed, and the recording/reproducing head floats a minute distance above the magnetic disk. As the performance of magnetic recording devices improves, the load on the recording and reproducing head is reduced in order to reduce the flying distance, and contact start/stop (contact start/stop) is used.
08B) type head system is adopted. In order to increase the recording density and performance of magnetic disks, that is, magnetic recording media, it is necessary to make the recording media thinner and more uniform.

磁気特性の改良(保磁力、角形比の向上)、および低浮
上量における安定したヘッド浮揚状態を確保しヘッドと
ディスクの衝突(ヘッド・クラッシュ)を防止するため
のディスク表面精度の向上。
Improved magnetic properties (improved coercive force and squareness ratio) and improved disk surface precision to ensure stable head flying at low flying heights and prevent head-disk collisions (head crashes).

耐ヘッドクラツシユ性等の向上が必要である。It is necessary to improve head crush resistance, etc.

それに伴い磁性媒体層を支持する基板の品質の向上が重
要となっている。
Accordingly, it has become important to improve the quality of the substrate that supports the magnetic medium layer.

高密度記録に適する基板の条件としては機械的平担性お
よび表面粗さが良好であり、欠陥が小さくその数も少な
いことが挙げられる。さらに、記録媒体の薄層化に伴い
基板の十分な硬度も必要とされてきた。すなわち、基板
が軟かいと磁気ヘッドが磁気ディスクに接続した際に陥
没などの変形を起こし、磁気ヘッドの安定した浮揚状態
が得られないばかりか、磁気記録装置の信頼性を表すコ
ンタクトスタートストップ(aSS)回数が小さくなる
という問題がある。
Conditions for a substrate suitable for high-density recording include good mechanical flatness and surface roughness, and a small number of defects. Furthermore, as the recording medium becomes thinner, the substrate needs to have sufficient hardness. In other words, if the substrate is soft, it will cause deformation such as depression when the magnetic head is connected to the magnetic disk, and not only will it be impossible to obtain a stable floating state of the magnetic head, but also the contact start/stop (which indicates the reliability of the magnetic recording device) will occur. aSS) There is a problem that the number of times becomes small.

従来、磁気ディスクの基板にはアルミ合金が使われてい
るが2表面硬化や表面精度をだすため。
Traditionally, aluminum alloys have been used for the substrates of magnetic disks, but this is done in order to achieve surface hardening and surface precision.

その上に硬化層を被覆している。この硬化層は研磨性の
良好なNi −P めっき膜やアルマイト膜が用いられ
てきた(たとえば、電々公社研究実用化報告第31巻第
9号IT31〜1T44頁、先行技術特願昭59−88
633号、特願昭59−1)1468号明細書)。この
膜を形成した後2機械加工を行い表面精度をあげ、磁性
媒体層を形成する。この磁性媒体層の磁気特性と結晶配
向性には密接な関係があり、結晶配向性は磁性媒体層の
下地膜の種類に影響されることが分かっている(たとえ
ば、太田ら、第8回日本応用磁気学会学術講演概要集、
15PE−8(1984))。たとえば、r−Fe20
3薄膜の場合は[1)1]配向。
A hardened layer is coated thereon. For this hardened layer, a Ni-P plating film or an alumite film with good abrasiveness has been used (for example, Electric Corporation Research and Practical Application Report Vol. 31, No. 9, IT pages 31-1T44, Prior Art Patent Application No. 59-88
No. 633, Japanese Patent Application No. 1468). After forming this film, two machining processes are performed to improve the surface precision and form a magnetic medium layer. There is a close relationship between the magnetic properties and crystal orientation of this magnetic medium layer, and it is known that the crystal orientation is influenced by the type of underlying film of the magnetic medium layer (for example, Ota et al. Abstracts of Academic Lectures of the Japan Society of Applied Magnetics,
15PE-8 (1984)). For example, r-Fe20
3 thin film has [1)1] orientation.

c(1およびCQ 合金薄膜の場合はC軸配向した場合
が磁気特性が良好であることがわかっている。
It is known that in the case of c(1 and CQ alloy thin films), magnetic properties are better when the C-axis is oriented.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし2種々の硬化層を形成し磁性媒体層を形成すると
、はとんどの場合望ましい結晶配向性になりに<<、そ
の結果磁化曲線から求められる角形比S*が悪化するな
ど磁気特性が良(ならないという問題点があった。
However, when two different hardened layers are formed to form a magnetic medium layer, in most cases the desired crystal orientation is not achieved, resulting in poor magnetic properties such as a worsening of the squareness ratio S* determined from the magnetization curve. (There was a problem with this.

この発明は上記のような問題点を解決するためになされ
たもので、結晶配向性すなわち磁気特性が良好でCSS
回数が増大する信頼性の高い磁気記録媒体を得ることを
目的とする。
This invention was made to solve the above-mentioned problems, and it has good crystal orientation, that is, magnetic properties, and CSS
The purpose is to obtain a highly reliable magnetic recording medium that can be used repeatedly.

〔問題点を解決するための手段〕[Means for solving problems]

この発明の磁気記録媒体は非磁性硬化層と磁性媒体層の
間にy TiO2、TiCyおよびTjNのうちのいず
れか1種よりなる非磁性下地層を形成したものである。
The magnetic recording medium of the present invention has a nonmagnetic underlayer made of any one of yTiO2, TiCy, and TjN formed between the nonmagnetic hardened layer and the magnetic medium layer.

〔作用〕[Effect]

この発明に係るTi02p TiC、およびTINのう
ちのいずれか1種より成る非磁性下地層の形成により、
非磁性硬化層の悪影響を防止し、磁性媒体層の結晶配向
性を良くすることができ、非磁性硬化層の硬く表面精度
の良好な特性を減することがない。
By forming the nonmagnetic underlayer made of any one of Ti02p TiC and TIN according to the present invention,
The adverse effects of the nonmagnetic hardened layer can be prevented, the crystal orientation of the magnetic medium layer can be improved, and the properties of hardness and good surface precision of the nonmagnetic hardened layer are not diminished.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。第1
図において、(1)は非磁性基板であるアルミニウム合
金基板、(2)は非磁性硬化層、(3)は’r1o2非
磁性下非磁性下地層上磁性媒体層である。
An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, (1) is an aluminum alloy substrate which is a non-magnetic substrate, (2) is a non-magnetic hardened layer, and (3) is a 'r1o2 non-magnetic lower non-magnetic underlayer and a magnetic medium layer.

以下、具体的実施例によりこの発明をより詳細に説明す
るが、この発明はこれに限定されるものではない。
This invention will be explained in more detail below with reference to specific examples, but the invention is not limited thereto.

実施例 ディスク状アルミニウム合金基板(1)上に非磁性硬化
層(2)としてアルマイト膜を4μm被覆した。
EXAMPLE A disk-shaped aluminum alloy substrate (1) was coated with an alumite film having a thickness of 4 μm as a nonmagnetic hardened layer (2).

アルマイト膜を鏡面仕上げした後、非磁性下地層(3)
としてTlO2膜を反応スパッタ法により形成した。さ
らに、磁性媒体層(4)としてr −Fe2O3薄膜を
形成した。
After mirror finishing the alumite film, non-magnetic underlayer (3)
A TlO2 film was formed by a reactive sputtering method. Furthermore, an r -Fe2O3 thin film was formed as a magnetic medium layer (4).

TlO2膜の膜厚を変えた試料を作製し2種々の測定を
行い、結果を表にまとめた。結晶配向性については、X
線回折法により測定し、r−76203(スピネル型)
の222方向のビークエ(222)と31)方向のビー
クエ(31))  の比によって表現した。角形比S*
は磁化曲線より求めた。
Samples with different TlO2 film thicknesses were prepared and two different measurements were performed, and the results are summarized in a table. Regarding crystal orientation,
Measured by line diffraction method, r-76203 (spinel type)
It is expressed by the ratio of the beak in the 222nd direction (222) and the beak in the 31st direction (31)). Squareness ratio S*
was determined from the magnetization curve.

さらに、非磁性下地層の膜厚と各特性値の変化を、非磁
性下地層がTlO2の場合の例を第2図に。
Furthermore, FIG. 2 shows an example of the thickness of the non-magnetic underlayer and changes in each characteristic value when the non-magnetic underlayer is TlO2.

非磁性下地層がTicの場合の例を第3図にそれぞれ示
す。図中9曲線1)はI(222)/工(31))の変
化1曲線12はS*の変化2曲線13は088回数の比
の変化を表す。
An example in which the nonmagnetic underlayer is made of Tic is shown in FIG. In the figure, curve 1) represents a change in I (222)/Equation (31)), curve 12 represents a change in S*, and curve 13 represents a change in the ratio of 088 times.

注)  TlO2膜厚が0又(形成しない)の時のC8
S回数を1として比で表した。
Note) C8 when TlO2 film thickness is 0 or not (not formed)
It was expressed as a ratio with the S number being 1.

表および第2図より明らかなようにt  TiO2の膜
厚が50λを越えると、結晶配向性およびS*の値が向
上していく。一方、  ’rlo2  の膜厚が240
0人を越え30001以上になると、CSS回数の悪化
がみられた。’r1o2 の膜厚が厚すぎると、非磁性
硬化層の効果が薄れてしまい、(88回数の悪化につな
がったと考えられる。また、3000人以上だと熱膨張
係数の違いから、クラックがはいることが多く、300
0人以上は望ましくない。
As is clear from the table and FIG. 2, when the thickness of tTiO2 exceeds 50λ, the crystal orientation and the S* value improve. On the other hand, the film thickness of 'rlo2 is 240
When the number exceeded 0 and reached 30,001 or more, the number of CSSs worsened. If the film thickness of 'r1o2 is too thick, the effect of the non-magnetic hardened layer is weakened, which is thought to have led to the deterioration of the number of times (88 times. Often 300
More than 0 people is not desirable.

上記実施例では、  TiO2膜の場合について説明し
たが、  Tic 、 TlN の場合であっても同様
の結果が得られ、上記実施例と同様の効果を奏する。
In the above embodiment, the case of a TiO2 film was explained, but similar results can be obtained even in the case of Tic or TIN, and the same effects as in the above embodiment can be obtained.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば、非磁性基板と、この
非磁性基板に被覆された非磁性硬化層と。
As described above, according to the present invention, there is provided a nonmagnetic substrate and a nonmagnetic hardened layer coated on the nonmagnetic substrate.

この非磁性硬化層に被覆されたTiO2、TiC、およ
びTiNのうちのいずれか1種よりなる非磁性下地層と
、この非磁性下地層に被覆された磁性媒体層を備えたの
で、結晶配向性および磁気特性が向上し、CEI8回数
が増大し、信頼性の高い磁気記録媒体が得られる効果が
ある。
This nonmagnetic hardened layer is coated with a nonmagnetic underlayer made of any one of TiO2, TiC, and TiN, and the nonmagnetic underlayer is coated with a magnetic medium layer. Also, the magnetic properties are improved, the number of CEI8 times is increased, and a highly reliable magnetic recording medium can be obtained.

また、  TlO2、Tic 、およびTINのうちの
いずれか1種よりなる非磁性下地層の厚さを50〜24
00人の範囲にすると、一層上述の効果が増大する。
In addition, the thickness of the nonmagnetic underlayer made of any one of TlO2, Tic, and TIN is set to 50 to 24 mm.
If the number of people is within the range of 00 people, the above-mentioned effect will be further enhanced.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例により得られた磁気記録媒
体を示す断面図であり、第2図およげ第3図は非磁性下
地層の膜厚と各特性値の変化を示す特性図である。 +1)は非磁性基板、(2)は非磁性硬化層、(3)は
’rlo2非磁性下非磁性下地層上磁性媒体層、
FIG. 1 is a cross-sectional view showing a magnetic recording medium obtained by an embodiment of the present invention, and FIGS. 2 and 3 are characteristic diagrams showing changes in the thickness of the nonmagnetic underlayer and each characteristic value. be. +1) is a non-magnetic substrate, (2) is a non-magnetic hardened layer, (3) is a 'rlo2 non-magnetic lower non-magnetic underlayer and a magnetic medium layer,

Claims (2)

【特許請求の範囲】[Claims] (1)非磁性基板と、この非磁性基板に被覆された非磁
性硬化層と、この非磁性硬化層に被覆されたTiO_2
、TiC、およびTiNのうちのいずれか1種よりなる
非磁性下地層と、この非磁性下地層に被覆された磁性媒
体層を備えた磁気記録媒体。
(1) A nonmagnetic substrate, a nonmagnetic hardened layer coated on this nonmagnetic substrate, and a TiO_2 coated on this nonmagnetic hardened layer.
A magnetic recording medium comprising a nonmagnetic underlayer made of any one of , TiC, and TiN, and a magnetic medium layer coated on the nonmagnetic underlayer.
(2)TiO_2、TiC、およびTiNのうちのいず
れか1種より形成された非磁性下地層の膜厚を50〜2
400Åの範囲にしたことを特徴とする特許請求の範囲
第1項記載の磁気記録媒体。
(2) The thickness of the non-magnetic underlayer made of any one of TiO_2, TiC, and TiN is 50~2
2. The magnetic recording medium according to claim 1, wherein the magnetic recording medium has a thickness of 400 Å.
JP4045085A 1985-03-01 1985-03-01 Magnetic recording medium Pending JPS61199224A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4045085A JPS61199224A (en) 1985-03-01 1985-03-01 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4045085A JPS61199224A (en) 1985-03-01 1985-03-01 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS61199224A true JPS61199224A (en) 1986-09-03

Family

ID=12580974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4045085A Pending JPS61199224A (en) 1985-03-01 1985-03-01 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS61199224A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4990362A (en) * 1989-06-16 1991-02-05 Nkk Corporation Method of manufacturing a titanium magnetic disk substrate
US5120615A (en) * 1989-06-16 1992-06-09 Nkk Corporation Magnetic disk substrate and method of manufacturing the same
US5188677A (en) * 1989-06-16 1993-02-23 Nkk Corporation Method of manufacturing a magnetic disk substrate
US5360677A (en) * 1989-02-23 1994-11-01 Nkk Corporation Magnetic disk substrate
US5536549A (en) * 1993-08-02 1996-07-16 Tulip Memory Systems, Inc. Austenitic stainless steel substrate for magnetic-recording media
US5626920A (en) * 1991-10-04 1997-05-06 Tulip Memory Systems, Inc. Method for coating metal disc substrates for magnetic-recording media
US5707705A (en) * 1993-09-08 1998-01-13 Tulip Memory Systems, Inc. Titanium or titanium-alloy substrate for magnetic-recording media

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5360677A (en) * 1989-02-23 1994-11-01 Nkk Corporation Magnetic disk substrate
US4990362A (en) * 1989-06-16 1991-02-05 Nkk Corporation Method of manufacturing a titanium magnetic disk substrate
US5120615A (en) * 1989-06-16 1992-06-09 Nkk Corporation Magnetic disk substrate and method of manufacturing the same
US5188677A (en) * 1989-06-16 1993-02-23 Nkk Corporation Method of manufacturing a magnetic disk substrate
US5626920A (en) * 1991-10-04 1997-05-06 Tulip Memory Systems, Inc. Method for coating metal disc substrates for magnetic-recording media
US5811182A (en) * 1991-10-04 1998-09-22 Tulip Memory Systems, Inc. Magnetic recording medium having a substrate and a titanium nitride underlayer
US5536549A (en) * 1993-08-02 1996-07-16 Tulip Memory Systems, Inc. Austenitic stainless steel substrate for magnetic-recording media
US5900126A (en) * 1993-08-02 1999-05-04 Tulip Memory Systems, Inc. Method for manufacturing austenitic stainless steel substrate for magnetic-recording media
US5707705A (en) * 1993-09-08 1998-01-13 Tulip Memory Systems, Inc. Titanium or titanium-alloy substrate for magnetic-recording media
US5961792A (en) * 1993-09-08 1999-10-05 Tulip Memory Systems, Inc. Method for making titanium or titanium-alloy substrate for magnetic-recording media

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