JPH05189741A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH05189741A
JPH05189741A JP1951292A JP1951292A JPH05189741A JP H05189741 A JPH05189741 A JP H05189741A JP 1951292 A JP1951292 A JP 1951292A JP 1951292 A JP1951292 A JP 1951292A JP H05189741 A JPH05189741 A JP H05189741A
Authority
JP
Japan
Prior art keywords
magnetic
recording medium
film
coercive force
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1951292A
Other languages
Japanese (ja)
Inventor
Hajime Shinohara
肇 篠原
Hideo Murata
英夫 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP1951292A priority Critical patent/JPH05189741A/en
Publication of JPH05189741A publication Critical patent/JPH05189741A/en
Pending legal-status Critical Current

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  • Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To enhance coercive force, to reduce noise and to improve electromagnetic transducing characteristics by forming a magnetic film with a specified alloy having a required ratio among the components. CONSTITUTION:The CoCrPtNiB magnetic film of this magnetic recording medium is formed with an alloy consisting of, by atom, 5-15% Ni, 1-15% Cr, 1-12% Pt, 0.1-5% B and the balance Co. High coercive force of >=1,200 Oe, >=30 dB S/N and reduced noise are attained and electromagnetic transducing characteristics are improved because of high saturation magnetization of >=10kG. When 0.1-5% Ru and 0.1-5% Ti are added to the film forming alloy, similar effects are produced without deteriorating the corrosion resistance.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えば磁気ヘッドとの
間において情報の記録および再生を行なうための磁気記
録媒体に関し、特にノイズを低減し、かつ保磁力を向上
したものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium for recording and reproducing information with, for example, a magnetic head, and more particularly to reducing noise and improving coercive force.

【0002】[0002]

【従来の技術】磁気ディスク装置では、磁気記録媒体に
微小間隔で磁気ヘッドを対向させ、磁気記録媒体に記録
された磁気情報を磁気ヘッドが読みとったり、磁気ヘッ
ドから磁気記録媒体に磁気的に記録するようになってい
る。磁気記録媒体は、基板材料にCo−Ni−Cr、C
o−Cr−Ta、Co−Cr−Pt等の合金からなる磁
性膜を被着して形成されており、最近では磁気記録媒体
を高記録密度にするため、磁性膜の保磁力を大きくする
ことが種々提案されている。
2. Description of the Related Art In a magnetic disk device, a magnetic head is opposed to a magnetic recording medium at minute intervals so that the magnetic head reads magnetic information recorded on the magnetic recording medium or magnetically records the magnetic information from the magnetic head onto the magnetic recording medium. It is supposed to do. The magnetic recording medium uses Co-Ni-Cr, C as the substrate material.
It is formed by depositing a magnetic film made of an alloy such as o-Cr-Ta or Co-Cr-Pt. Recently, in order to make the magnetic recording medium have a high recording density, it is necessary to increase the coercive force of the magnetic film. Have been proposed.

【0003】例えば特開平1−256017号公報に
は、磁性膜をCo−Cr−Ta−Ptの四元系合金で作
成した磁気記録媒体が開示されている。そしてPt添加
量1〜15at%で保磁力が約1200Oeより大き
く、また角形比が0.8以上になるとしている。また外
国専門誌Magnetism and Magnetic Materials. 86 (199
0) 159-168.には、Co−Cr−Pt磁性膜においてP
tの含有量により磁気特性がどのような影響を受けるか
を記載している。そして図1(b)に示すようにPt1
2at%で保磁力が1000Oe以上になり、角形比は
Pt6〜18%で0.7〜0.9になり、また残留磁化
及び飽和磁化についても図1(a)に示す傾向があると
している。
For example, Japanese Patent Laid-Open No. 1-256017 discloses a magnetic recording medium in which a magnetic film is made of a quaternary alloy of Co--Cr--Ta--Pt. When the amount of Pt added is 1 to 15 at%, the coercive force is larger than about 1200 Oe and the squareness ratio is 0.8 or more. In addition, foreign specialized magazines Magnetism and Magnetic Materials. 86 (199
0) 159-168., In a Co-Cr-Pt magnetic film, P
It describes how the magnetic properties are affected by the content of t. Then, as shown in FIG. 1 (b), Pt1
The coercive force is 1000 Oe or more at 2 at%, the squareness ratio is 0.7 to 0.9 at Pt 6 to 18%, and the residual magnetization and the saturation magnetization tend to be as shown in FIG.

【0004】さらに特開平1−232522号公報に
は、磁気記録媒体の磁性膜として、Niの添加量が30
%以下のCoNi系合金で作成したものが開示されてい
る。そしてNiの添加量を30%以下にしたのは、それ
以上に添加すると磁性膜の残留磁化が大幅に低下し、電
磁変換特性が劣化するためであると記載している。また
CoNi系合金で作成した磁性膜は、保磁力が700〜
1500Oeとなり、飽和磁化が8000〜13900
ガウスになるとしており、さらに耐食性が向上すると記
載している。
Further, in JP-A-1-232522, a magnetic film of a magnetic recording medium has a Ni content of 30.
% Or less CoNi alloys are disclosed. It is described that the amount of Ni added is set to 30% or less because the remanent magnetization of the magnetic film is significantly reduced and the electromagnetic conversion characteristics are deteriorated when Ni is added more than 30%. A magnetic film made of a CoNi-based alloy has a coercive force of 700-
1500 Oe and saturation magnetization 8000 to 13900
It states that it will be Gaussian and further improves the corrosion resistance.

【0005】また第14回日本応用磁気学会(1990
年)では、CoCrTaおよびCoCrPtに対しBを
添加することにより保磁力が影響を受けることが発表さ
れている。そしてCoCrTaへのB添加量を増すと保
磁力が単調に減少し、CoCrPtの場合はBの添加量
を増すと保磁力は増加するとしている。またCoCrP
tにBを3〜7at%添加することにより約3000O
eの高保磁力が得られるとしている。
The 14th Japan Society for Applied Magnetics (1990)
(Year), it was announced that the coercive force is affected by adding B to CoCrTa and CoCrPt. The coercive force monotonically decreases as the amount of B added to CoCrTa increases, and the coercive force increases as the amount of B added increases in the case of CoCrPt. Also CoCrP
Approximately 3000 O by adding 3 to 7 at% of B to t
It is said that a high coercive force of e can be obtained.

【0006】[0006]

【発明が解決しようとする課題】上記従来技術に記載し
たように、Co系合金を使用した磁性膜が種々作成され
ているが、保磁力、残留磁化、S/N比の全てが十分に
好ましいものは得られていない。またCo系合金にNi
を添加した材料により作成した磁性膜は、保磁力と飽和
磁化の点において満足できるが、S/N比が小さくノイ
ズを十分に低減できないものがあった。これは、Niを
30%以下の添加量としていて、S/N比の向上を考慮
していないためである。またCoCrPtにBを添加し
た合金で作成した磁性膜は、前記のように保磁力が向上
することが知られている。しかしCoCrPtにBを5
〜7%添加した合金により磁性膜を形成したところ、保
磁力は向上したがS/N比が低下してノイズが大きくな
ることがあった。そこで本発明は、磁気記録媒体の保磁
力を向上するとともに、ノイズを低減しさらに飽和磁化
を好ましいものにすることを目的とする。
As described in the above-mentioned prior art, various magnetic films using a Co-based alloy have been prepared, but coercive force, remanent magnetization, and S / N ratio are all sufficiently preferable. Things have not been obtained. In addition, Co-based alloys with Ni
The magnetic film made of the material added with was satisfactory in terms of coercive force and saturation magnetization, but had a small S / N ratio and could not sufficiently reduce noise. This is because the added amount of Ni is 30% or less and the improvement of the S / N ratio is not considered. Further, it is known that the coercive force of the magnetic film made of the alloy in which B is added to CoCrPt is improved as described above. However, B is added to CoCrPt by 5
When a magnetic film was formed from an alloy added with ˜7%, the coercive force was improved, but the S / N ratio decreased and the noise increased in some cases. Therefore, it is an object of the present invention to improve the coercive force of a magnetic recording medium, reduce noise, and make saturation magnetization preferable.

【0007】[0007]

【課題を解決するための手段】本発明者らは、CoCr
PtNiにBを種々の割合で添加した合金により磁性膜
を作成し、保磁力、S/N比、飽和磁化の全てにおいて
望ましい磁性膜を完成した。すなわち本発明の磁気記録
媒体は、その磁性膜を、原子%でNi5〜15%、Cr
1〜15%、Pt1〜12%、B0.1〜5%、残部C
oからなる合金によって作成した。また本発明は、磁性
膜を前記組成に対してRuを0.1〜5%添加して作成
したり、あるいはさらにTiを0.1〜5%添加して作
成したものを含む。上記においてNiを5〜15%と
し、Crを1〜15%とし、Ptを1〜12%としたの
は、それら範囲外ではS/N比が劣るためである。Bを
0.1〜5%とにしたのは、その範囲外では保磁力とS
/N比の点で劣るからである。RuとTiの添加量を前
記範囲にしたのは、その範囲外では耐食性が劣るからで
ある。
The present inventors have found that CoCr
Magnetic films were prepared from alloys in which B was added to PtNi in various proportions, and desired magnetic films were completed in terms of coercive force, S / N ratio, and saturation magnetization. That is, in the magnetic recording medium of the present invention, the magnetic film is composed of Ni 5 to 15% in atomic% and Cr.
1-15%, Pt 1-12%, B 0.1-5%, balance C
It was made of an alloy of o. The present invention also includes a magnetic film formed by adding 0.1 to 5% of Ru to the above composition, or 0.1 to 5% of Ti. In the above description, Ni is 5 to 15%, Cr is 1 to 15%, and Pt is 1 to 12% because the S / N ratio is poor outside these ranges. B is set to 0.1 to 5% because the coercive force and S are outside the range.
This is because the / N ratio is inferior. The addition amounts of Ru and Ti are set within the above range because the corrosion resistance is poor outside the range.

【0008】[0008]

【作用】上記の磁気記録媒体は、磁性膜がCoNiCr
PtBの五元系元素からなり、Niは5〜15原子%含
有するようにしたので、保磁力が1200Oe以上と大
きく、S/N比は30以上となってノイズの低減を図る
ことができ、さらに飽和磁化が10Kガウス以上になる
ので電磁変換特性を好ましいものにすることができる。
In the above magnetic recording medium, the magnetic film is CoNiCr.
Since it is composed of a quinary element of PtB and contains Ni in an amount of 5 to 15 atomic%, the coercive force is as large as 1200 Oe or more, and the S / N ratio is 30 or more, so that noise can be reduced, Further, since the saturation magnetization is 10 K gauss or more, the electromagnetic conversion characteristics can be made favorable.

【0009】[0009]

【実施例】3.5インチ径のアルミニウム合金基板(外
径95mm、内径25mm、厚さ1.27mm)の表面
にNiP無電解メッキ膜を5〜15μmの厚さに形成
し、表面を鏡面加工してディスクを作成した。このディ
スクを洗浄後、表面にテクスチャー加工をし、表面の面
粗さをRa7nmとした。再びディスクを洗浄後、DC
マグネトロンスパッター装置を用い、スパッタ室内を1
×1−-5Torr以下に排気後、Arガスを導入し、室
内の圧力を5mmTorrに保持し、投入圧力2000
W、成膜速度40nm/分の条件で下地Cr層を50n
mの厚さに成膜した。この時、ディスクの温度は200
℃であった。さらにこの下地膜の上に磁性膜を成膜し
た。なお磁性膜はCoNiCrPtB合金(表1に示
す)と、それにRuを添加した合金(表2に示す)、さ
らにTiを添加した合金(表2に示す)で作成した。磁
性膜のスパッタ時の投入電力は200W、成膜速度10
0nm/分で膜厚を50nmとした。この全工程中ディ
スク温度はほぼ200℃に保った。さらに磁性膜上に保
護膜としてカーボン膜を成膜し、その成膜条件は投入電
力1000W、成膜速度8nm/分で厚さを30nmと
した。
Example A NiP electroless plating film is formed on the surface of a 3.5 inch diameter aluminum alloy substrate (outer diameter 95 mm, inner diameter 25 mm, thickness 1.27 mm) to a thickness of 5 to 15 μm, and the surface is mirror-finished. I made a disc. After the disk was washed, the surface was textured so that the surface roughness was Ra7 nm. After cleaning the disk again, DC
Use a magnetron sputter device to move 1 inside the sputter chamber.
After evacuation below × 1--5 Torr, Ar gas was introduced, to maintain the pressure of the chamber to 5MmTorr, put pressure 2000
W, 50 n of underlying Cr layer under conditions of film formation speed 40 nm / min
The film was formed to a thickness of m. At this time, the temperature of the disk is 200
It was ℃. Further, a magnetic film was formed on this base film. The magnetic film was made of a CoNiCrPtB alloy (shown in Table 1), an alloy to which Ru was added (shown in Table 2), and an alloy to which Ti was added (shown in Table 2). Input power for sputtering the magnetic film is 200 W, deposition rate is 10
The film thickness was 50 nm at 0 nm / min. The disk temperature was maintained at approximately 200 ° C. during this entire process. Further, a carbon film was formed as a protective film on the magnetic film, and the film forming conditions were an input power of 1000 W, a film forming rate of 8 nm / min and a thickness of 30 nm.

【0010】上記のようにして作成した磁気記録媒体に
ついて、保磁力Hc、飽和磁化4πMsおよび残留磁化
4πMrをVSMを用い印加磁場10Kガウスで測定し
た。測定に使用した磁気ヘッドは、CaTiO3 をスラ
イダー材とし、MnZnフェライトにセンダストの薄膜
をスパッターで成膜したMIGヘッドを用いた。また磁
気ヘッドのトラック幅は13μm、スライダー幅は60
0μm、ジンバルバネ圧9.5gで、ディスクの半径は
24mmの位置でディスク回転数3600rpmの条件
で測定した。
The coercive force Hc, the saturation magnetization 4πMs and the residual magnetization 4πMr of the magnetic recording medium prepared as described above were measured using VSM under an applied magnetic field of 10 K gauss. The magnetic head used for the measurement was a MIG head in which CaTiO 3 was used as a slider material and a sendust thin film was formed on MnZn ferrite by sputtering. The track width of the magnetic head is 13 μm and the slider width is 60 μm.
The measurement was performed at 0 μm, a gimbal spring pressure of 9.5 g, and a disk radius of 24 mm at a disk rotation speed of 3600 rpm.

【0011】まずディスクに線記録密度30KFclで
書き込み、0〜20MHzの帯材でノイズを含まない再
生信号をスペクトロアナライザーにより測定する。次に
使用した測定機器の磁気ヘッドを含むノイズを同一条件
で測定し、さらにrms電圧側を使用してノイズ電力を
測定し、更生用データとする。媒体ノイズは、再生時の
ノイズより測定機器ノイズを差し引いた値を、rms値
更生用データと比較参照し、算出した。このような方法
で前記作成した磁気記録媒体のS/N比を用いた。そし
て得られた測定結果を下記の表1と表2に示した。
First, a linear recording density of 30KFcl is written on a disk, and a reproduction signal containing no noise is measured by a spectroanalyzer with a band material of 0 to 20 MHz. Next, the noise including the magnetic head of the measuring instrument used is measured under the same conditions, and the noise power is further measured using the rms voltage side to obtain rehabilitation data. The medium noise was calculated by comparing the value obtained by subtracting the measuring instrument noise from the noise during reproduction with the rms value rehabilitation data. The S / N ratio of the magnetic recording medium prepared in the above manner was used. The obtained measurement results are shown in Tables 1 and 2 below.

【0012】[0012]

【表1】 [Table 1]

【0013】表1よりPt含有量が1%未満および15
%より大きいとS/N比が劣る。またCrは含有させな
い場合、および18%以上ではS/N比が劣り、Niは
3%未満、および18%以上ではS/N比が劣り、Bは
1%未満および6%以上でS/N比が劣ることがわか
る。また表1より飽和磁化に関しては、Pt含有量が1
5%と多くなると劣り、残留磁化に関しては、Cr添加
量が16%と多くなると劣っている。さらに保磁力に関
しては、Ptの添加量が0になると劣っている。以上よ
り磁性膜を、原子%でNi5〜15%、Cr1〜15
%、Pt1〜12%、B0.1〜5%、残部Coからな
る合金によって作成するのが望ましい。
From Table 1, the Pt content is less than 1% and 15
If it is larger than%, the S / N ratio is inferior. Further, when Cr is not contained, or when it is 18% or more, the S / N ratio is inferior, Ni is less than 3%, and when 18% or more, the S / N ratio is inferior, and B is less than 1% and S / N is 6% or more. It turns out that the ratio is inferior. Further, from Table 1, regarding the saturation magnetization, the Pt content is 1
When it is as large as 5%, it is inferior, and when it comes to the residual magnetization, when it is as large as 16%, it is inferior. Furthermore, the coercive force is inferior when the added amount of Pt becomes zero. From the above, the magnetic film is made to have an atomic% of Ni5 to 15% and Cr1 to 15%.
%, Pt 1 to 12%, B 0.1 to 5%, and the balance Co is desirable.

【0014】[0014]

【表2】 [Table 2]

【0015】表2よりRu添加量は0.1〜5%にし、
Ti添加量は0.1〜5%にするのが、HcおよびS/
N比の点で望ましい。
From Table 2, the added amount of Ru is 0.1-5%,
The amount of Ti added should be 0.1-5% for Hc and S /
It is desirable in terms of N ratio.

【0016】[0016]

【発明の効果】本発明の磁気記録媒体は、CoNiCr
PtBの五元系元素であってNiを5〜15%にし、ま
たBを0.1〜5%にした合金で磁性膜を作成している
ので、S/N比が大きくなってノイズが低減され、しか
も残留磁化がある程度大きいために電磁変換特性が向上
し、さらに保磁力も向上したものとなる。
The magnetic recording medium of the present invention is made of CoNiCr.
Since the magnetic film is made of an alloy containing 5 to 15% of PtB and 5 to 15% of Ni and 0.1 to 5% of B, the S / N ratio is increased and the noise is reduced. In addition, since the residual magnetization is large to some extent, the electromagnetic conversion characteristics are improved and the coercive force is also improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】従来例の磁性膜の残留磁化と飽和磁化とを示す
図(a)と、保磁力と角形比を示す図(b)である。
FIG. 1A is a diagram showing a residual magnetization and a saturation magnetization of a conventional magnetic film, and FIG. 1B is a diagram showing a coercive force and a squareness ratio.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 非磁性材料からなる基板の表面に、非磁
性材料からなる下地膜を介して磁性材料からなる磁性膜
を設けてなる磁気記録媒体において、磁性膜を原子%で
Ni5〜15%、Cr1〜15%、Pt1〜12%、B
0.1〜5%、残部Coからなる合金によって形成した
ことを特徴とする磁気記録媒体。
1. A magnetic recording medium in which a magnetic film made of a magnetic material is provided on a surface of a substrate made of a non-magnetic material via an undercoat film made of a non-magnetic material, the magnetic film having an atomic% of Ni of 5 to 15%. , Cr 1-15%, Pt 1-12%, B
A magnetic recording medium formed of an alloy of 0.1 to 5% and the balance being Co.
【請求項2】 非磁性材料からなる基板の表面に、非磁
性材料からなる下地膜を介して磁性材料からなる磁性膜
を設けてなる磁気記録媒体において、磁性膜を原子%で
Ni5〜15%、Cr1〜15%、Pt1〜12%、B
0.1〜5%、Ru0.1〜5%、残部Coからなる合
金によって形成したことを特徴とする磁気記録媒体。
2. A magnetic recording medium in which a magnetic film made of a magnetic material is provided on a surface of a substrate made of a non-magnetic material via an undercoat film made of a non-magnetic material, wherein the magnetic film is Ni 5 to 15% in atomic%. , Cr 1-15%, Pt 1-12%, B
A magnetic recording medium formed of an alloy of 0.1 to 5%, Ru 0.1 to 5%, and the balance Co.
【請求項3】 請求項2の磁気記録媒体において、磁性
膜を形成する合金にさらにTiを原子%で0.1〜5%
添加させた磁気記録媒体。
3. The magnetic recording medium according to claim 2, wherein the alloy forming the magnetic film further contains Ti in an atomic percentage of 0.1 to 5%.
Added magnetic recording medium.
JP1951292A 1992-01-08 1992-01-08 Magnetic recording medium Pending JPH05189741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1951292A JPH05189741A (en) 1992-01-08 1992-01-08 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1951292A JPH05189741A (en) 1992-01-08 1992-01-08 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH05189741A true JPH05189741A (en) 1993-07-30

Family

ID=12001421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1951292A Pending JPH05189741A (en) 1992-01-08 1992-01-08 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH05189741A (en)

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