JPH05182171A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH05182171A
JPH05182171A JP1950892A JP1950892A JPH05182171A JP H05182171 A JPH05182171 A JP H05182171A JP 1950892 A JP1950892 A JP 1950892A JP 1950892 A JP1950892 A JP 1950892A JP H05182171 A JPH05182171 A JP H05182171A
Authority
JP
Japan
Prior art keywords
magnetic
coercive force
film
recording medium
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1950892A
Other languages
Japanese (ja)
Inventor
Hidetoshi Hagiwara
英俊 萩原
Hideo Murata
英夫 村田
Motoe Nakajima
源衛 中嶋
Hajime Shinohara
肇 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP1950892A priority Critical patent/JPH05182171A/en
Publication of JPH05182171A publication Critical patent/JPH05182171A/en
Pending legal-status Critical Current

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  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To obtain a magnetic recording medium having large coercive force and decreased noise by forming the magnetic film from an alloy consisting, by atomic% of 7-15 Cr, 7-15 Pt, 0.5-3 B, and the balance Co with inevitable impurities. CONSTITUTION:The magnetic recording medium is film-formed by successively laminating a Cr base film, Co-Cr-Pt-B alloy magnetic film, and C protective film. The magnetic film added of B by 0.5-3 atomic% has >=2100 Oe coercive force, however, if the added amt. thereof exceeds 3 atomic%, the coercive force decreases. By adding 0.5-3 B, the squareness ratio increases to >=0.8, which is preferable for the output. However, if the add amt. of B exceeds 3 at.%, disk noise increases. It is pareferable to add 7-15 Pt and 7-15 Cr concerning the coercive force. Thus, the coercive force increases and the recording density is improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えば磁気ヘッドとの
間において情報の記録および再生を行なうための磁気記
録媒体に関し、特にノイズを低減して保磁力を向上した
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium for recording and reproducing information with, for example, a magnetic head, and more particularly to a magnetic recording medium having improved coercive force by reducing noise.

【0002】[0002]

【従来の技術】磁気ディスク装置では、磁気記録媒体に
微小間隔で磁気ヘッドを対向させ、磁気記録媒体に記録
された磁気情報を磁気ヘッドが読みとったり、磁気ヘッ
ドから磁気記録媒体に磁気的に記録するようになってい
る。磁気記録媒体は、基板材料にCo−Ni−Cr、C
o−Cr−Ta、Co−Cr−Pt等の合金からなる磁
性膜を被着して形成されており、最近では磁気記録媒体
を高記録密度にするため、磁性膜の保磁力を大きくする
ことが種々提案されている。
2. Description of the Related Art In a magnetic disk device, a magnetic head is opposed to a magnetic recording medium at minute intervals so that the magnetic head reads magnetic information recorded on the magnetic recording medium or magnetically records the magnetic information from the magnetic head onto the magnetic recording medium. It is supposed to do. The magnetic recording medium uses Co-Ni-Cr, C as the substrate material.
It is formed by depositing a magnetic film made of an alloy such as o-Cr-Ta or Co-Cr-Pt. Recently, in order to make the magnetic recording medium have a high recording density, it is necessary to increase the coercive force of the magnetic film. Have been proposed.

【0003】例えば特開平1−256017号公報に
は、磁性膜をCo−Cr−Ta−Ptの四元系合金で作
成した磁気記録媒体が開示されている。そしてPt添加
量1〜15at%で保磁力が約1200Oeより大き
く、また角形比が0.8以上になるとしている。また第
14回日本応用磁気学会(1990年)では、Co−C
r−TaおよびCo−Cr−Ptに対しBを添加するこ
とにより保磁力が影響を受けることが発表されている。
そしてCo−Cr−TaにBを添加すると保磁力が単調
に減少し、Co−Cr−Ptの場合はBの添加とともに
保磁力は増加するとしている。またCo−Cr−Ptに
Bを3〜7at%添加することにより約3000Oeの
高保磁力が得られるとしている。
For example, Japanese Patent Laid-Open No. 1-256017 discloses a magnetic recording medium in which a magnetic film is made of a quaternary alloy of Co--Cr--Ta--Pt. When the amount of Pt added is 1 to 15 at%, the coercive force is larger than about 1200 Oe and the squareness ratio is 0.8 or more. In the 14th Japan Society for Applied Magnetics (1990), Co-C
It has been announced that the coercive force is affected by adding B to r-Ta and Co-Cr-Pt.
The coercive force monotonously decreases when B is added to Co-Cr-Ta, and the coercive force increases with the addition of B in the case of Co-Cr-Pt. It is also stated that a high coercive force of about 3000 Oe can be obtained by adding 3 to 7 at% of B to Co-Cr-Pt.

【0004】[0004]

【発明が解決しようとする課題】上記従来技術に記載し
たように、Co−Cr−Pt−Bの四元系元素の合金に
より磁性膜を作成した磁気記録媒体では、保磁力の向上
を図れることが知られている。本発明者らがCo−Cr
−PtにBを3〜7at%添加した合金により磁性膜を
形成して磁気記録媒体を作成したところ、保磁力は向上
するがB添加量が3at%を越えると低下する傾向にあ
り、合金成分の割合によっては一概にB添加が保磁力の
向上につながらないことを知った。またBの添加量が
2.5at%まではディスクノイズは単調に減少し、
2.5at%以上では増加する傾向にあることを知っ
た。そこで本発明は、磁気記録媒体の保磁力を向上する
とともに、ノイズを低減することを目的とする。
As described in the above-mentioned prior art, the coercive force can be improved in a magnetic recording medium in which a magnetic film is made of an alloy of a quaternary element of Co-Cr-Pt-B. It has been known. The present inventors have developed Co-Cr
When a magnetic film is formed by using an alloy in which 3 to 7 at% of B is added to -Pt to prepare a magnetic recording medium, coercive force is improved, but when the added amount of B exceeds 3 at%, it tends to decrease. It was found that the addition of B did not lead to an improvement in the coercive force depending on the ratio of. In addition, the disk noise decreases monotonously until the amount of B added reaches 2.5 at%.
I learned that it tends to increase above 2.5 at%. Therefore, it is an object of the present invention to improve the coercive force of a magnetic recording medium and reduce noise.

【0005】[0005]

【課題を解決するための手段】本発明者らは、Co−C
r−Ptの成分割合を変えると共にBの添加量を種々変
更した合金により磁性膜を作成し、保磁力の向上ととも
に、ディスクとしてのノイズを低減することを研究し
た。そして種々の実験によりBを3at%以下にして、
保磁力を向上するとともにノイズを低減できるようにし
た本発明を完成した。すなわち本発明は、非磁性材料か
らなる基板の表面に非磁性材料からなる下地膜を介して
磁性材料からなる磁性膜を設けてなる磁気記録媒体にお
いて、磁性膜を原子%でCr7〜15%、Pt7〜15
%、B0.5〜3%、残部Coおよび不可避的不純物か
らなる合金によって形成した。
The present inventors have found that Co--C
A magnetic film was made from an alloy in which the component ratio of r-Pt was changed and the addition amount of B was variously changed, and it was studied to improve coercive force and reduce noise as a disk. Then, by various experiments, B was set to 3 at% or less,
The present invention was completed to improve coercive force and reduce noise. That is, the present invention provides a magnetic recording medium in which a magnetic film made of a magnetic material is provided on the surface of a substrate made of a non-magnetic material via an undercoat film made of a non-magnetic material, and the magnetic film contains Cr of 7 to 15% in atomic%, Pt7-15
%, B 0.5 to 3%, the balance Co and unavoidable impurities.

【0006】[0006]

【作用】上記の磁気記録媒体は、磁性膜がCo−Cr−
Pt−Bの四元系元素からなり、Bは0.5〜3原子%
含有するようにしたので、保磁力が2000Oe以上と
大きくて記録密度が向上し、しかもノイズが3μVrm
s以下になってノイズ低減を図ることができる。
In the above magnetic recording medium, the magnetic film is Co--Cr--.
It is composed of Pt-B quaternary elements, and B is 0.5 to 3 atom%.
Since it is contained, the coercive force is as large as 2000 Oe or more, the recording density is improved, and the noise is 3 μVrm.
It becomes s or less, and noise can be reduced.

【0007】[0007]

【実施例】マグネシウムを4重量%含有するアルミニウ
ム合金からなる基板の表面を旋削加工により平滑に形成
し、外径95mm、内径25mm、厚さ1.27mmの
基板とした。次にこの基板の表面にNi−P合金からな
るメッキ膜を5〜15μmの厚さに形成し、磁気記録媒
体の起動時および停止時における磁気ヘッド若しくはス
ライダとの接触摺動特性(CSS)を確保する。上記の
ようにして被着したメッキ膜の表面を平滑に研磨すると
ともに、磁気ヘッド若しくはスライダとの吸着を防止す
るためのテクスチャ加工を施す。
Example The surface of a substrate made of an aluminum alloy containing 4% by weight of magnesium was formed into a smooth surface by turning, to obtain a substrate having an outer diameter of 95 mm, an inner diameter of 25 mm and a thickness of 1.27 mm. Next, a Ni-P alloy plating film having a thickness of 5 to 15 μm is formed on the surface of this substrate, and the contact sliding characteristics (CSS) with the magnetic head or slider at the time of starting and stopping the magnetic recording medium are measured. Secure. The surface of the plated film deposited as described above is polished to be smooth, and texture processing is performed to prevent adsorption to the magnetic head or slider.

【0008】次に基板を洗浄後、例えばDCマグネトロ
ンスパッタ装置により、Crからなる下地膜と、Co−
Cr−Pt−B合金からなる磁性膜と、Cからなる保護
膜とを順次積層して成膜する。この場合下地膜の成膜に
は、スパッタ室内を1×10-5Toor以下に排気後、
基板を200℃において30分間加熱し、Arガスを導
入してスパッタ室内を5mToorに保持し、投入電力
2000W、成膜速度40nm/分の条件により、膜厚
100nmに成膜した。次にこの下地膜の上に、Cr1
2原子%、Pt12原子%、Bの添加量0〜3原子%、
残部CoのCo−Cr−Pt−BからなるB添加量の異
なる種々の磁性膜を上記同様にして、投入電力2000
W、成膜速度100nm/分の条件で50nmの膜厚に
成膜した。この磁性膜のスパッタではバイアス電圧−4
00Vを印加した。また保護膜は投入電力1000W、
成膜速度8nm/分の条件で前記磁性膜上に膜厚30n
mで成膜した。
Next, after cleaning the substrate, a base film made of Cr and Co--
A magnetic film made of a Cr-Pt-B alloy and a protective film made of C are sequentially stacked to form a film. In this case, for forming the base film, after exhausting the inside of the sputtering chamber to 1 × 10 −5 Toor or less,
The substrate was heated at 200 ° C. for 30 minutes, Ar gas was introduced to maintain the inside of the sputtering chamber at 5 mToor, and a film having a thickness of 100 nm was formed under conditions of an input power of 2000 W and a film forming rate of 40 nm / min. Next, on this base film, Cr1
2 atomic%, Pt 12 atomic%, B addition amount 0 to 3 atomic%,
With various balance magnetic films made of Co—Cr—Pt—B with different Co additions and different in B addition amount, the applied power 2000
A film having a thickness of 50 nm was formed under the conditions of W and the film forming speed of 100 nm / min. A bias voltage of -4 is used for sputtering this magnetic film
00V was applied. In addition, the protective film is 1000 W input power,
A film thickness of 30 n is formed on the magnetic film under the condition that the film forming speed is 8 nm / min.
The film was formed at m.

【0009】上記のようにして作製した種々の磁気記録
媒体の保磁力を測定して図1に示した。図1からわかる
ように、磁性膜としてBを0.5〜3原子%添加したも
のは保磁力が2100Oe以上になり、Bの添加量が3
原子%を越えると保磁力が低下する傾向にあることが分
かる。また同様にして前記種々の磁気記録媒体のそれぞ
れの磁性膜の角形比を測定して図2に示した。図2から
Bの添加量が0.5〜3原子%で角形比が0.8以上に
なり、出力にとって望ましいことが分かる。さらに前記
種々の磁気記録媒体のそれぞれの出力とディスクノイズ
を測定して図3に示した。なお各磁気記録媒体につい
て、キャップ長0.5μmの薄膜ヘッドを使用し、フラ
イングハイト0.11μm、記録線密度24KFCI
で、信号記録再生を行ない、再生出力信号とメディアノ
イズを求めた。図3よりBの添加量が0.5〜3原子%
で出力が120μVrms以上になって望ましく、ディ
スクノイズも3μVrms以下になって望ましいことが
わかる。なおBの添加量が3at%を越えると、ディス
クノイズは増加する傾向にある。
The coercive force of various magnetic recording media produced as described above was measured and shown in FIG. As can be seen from FIG. 1, a magnetic film containing 0.5 to 3 atomic% of B has a coercive force of 2100 Oe or more, and the addition amount of B is 3 or more.
It can be seen that the coercive force tends to decrease when the atomic percentage is exceeded. Similarly, the squareness ratios of the magnetic films of the various magnetic recording media were measured and shown in FIG. It can be seen from FIG. 2 that the squareness ratio is 0.8 or more when the addition amount of B is 0.5 to 3 atom%, which is desirable for output. Further, the output and disk noise of each of the various magnetic recording media were measured and shown in FIG. For each magnetic recording medium, a thin film head with a cap length of 0.5 μm was used, with a flying height of 0.11 μm and a recording linear density of 24 KFCI.
Then, signal recording and reproduction were performed, and the reproduction output signal and media noise were obtained. From FIG. 3, the addition amount of B is 0.5 to 3 atom%.
It can be seen that the output is desirable to be 120 μVrms or more, and the disk noise is desirably 3 μVrms or less. When the addition amount of B exceeds 3 at%, the disk noise tends to increase.

【0010】前記磁気記録媒体において、磁性膜をCr
12at%、B2at%、(残部Co)にしてPt量を
変化させて種々の磁性膜を作成し、それぞれの保磁力を
測定して図4に示した。図4よりPt添加量が7〜15
at%で保磁力が1300Oe以上になり、Ptはその
範囲にするのが望ましいと考えられる。また同様に磁性
膜をPt10at%、B2at%、(残部Co)にして
Cr量を変化させて種々の磁性膜を作成し、それぞれの
保磁力を測定して図5に示した。図5よりCr量が7〜
15at%で保磁力が2000Oe以上になり、その範
囲にするのが望ましいと考えられる。
In the magnetic recording medium, the magnetic film is made of Cr.
Various magnetic films were prepared by changing the Pt amount to 12 at%, B2 at%, and the balance Co, and the coercive force of each was measured and shown in FIG. From FIG. 4, the Pt addition amount is 7 to 15
At coercive force, the coercive force becomes 1300 Oe or more, and it is considered preferable to set Pt in this range. Similarly, various magnetic films were prepared by changing the amount of Cr with Pt at 10 at%, B2 at% and (remainder Co) as the magnetic film, and the coercive force of each was measured and shown in FIG. From FIG. 5, the amount of Cr is 7 to
At 15 at%, the coercive force becomes 2000 Oe or more, and it is considered desirable to set it in that range.

【0011】[0011]

【発明の効果】本発明の磁気記録媒体は、Co−Cr−
Pt−Bの四元系元素でBを0.5〜3at%にした合
金で磁性膜を作成しているので、保磁力が大きくかつ、
ノイズが低減されたものを得ることができる。
The magnetic recording medium of the present invention is a Co-Cr-
Since the magnetic film is made of an alloy in which B is 0.5 to 3 at% with a quaternary element of Pt-B, the coercive force is large and
The one with reduced noise can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の四元系元素で作成した磁性膜における
B添加量と保磁力との関係図である。
FIG. 1 is a graph showing the relationship between the amount of B added and the coercive force in a magnetic film made of a quaternary element according to the present invention.

【図2】本発明の四元系元素で作成した磁性膜における
B添加量と角形比との関係図である。
FIG. 2 is a relationship diagram between the B addition amount and the squareness ratio in the magnetic film made of the quaternary element of the present invention.

【図3】本発明の四元系元素で作成した磁性膜における
B添加量と、ディスクとしての出力及びノイズの関係図
である。
FIG. 3 is a graph showing the relationship between the amount of B added to the magnetic film made of the quaternary element of the present invention, and the output and noise of the disk.

【図4】本発明の四元系元素で作成した磁性膜における
Pt添加量と保磁力との関係図である。
FIG. 4 is a diagram showing the relationship between the amount of Pt added and the coercive force in a magnetic film made of a quaternary element according to the present invention.

【図5】本発明の四元系元素で作成した磁性膜における
Cr添加量と保磁力との関係図である。
FIG. 5 is a graph showing the relationship between the amount of added Cr and the coercive force in a magnetic film made of a quaternary element according to the present invention.

フロントページの続き (72)発明者 篠原 肇 埼玉県熊谷市三ケ尻5200番地日立金属株式 会社磁性材料研究所内Front Page Continuation (72) Inventor Hajime Shinohara 5200 Sankejiri, Kumagaya City, Saitama Hitachi Metals Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 非磁性材料からなる基板の表面に非磁性
材料からなる下地膜を介して磁性材料からなる磁性膜を
設けてなる磁気記録媒体において、磁性膜を原子%でC
r7〜15%、Pt7〜15%、B0.5〜3%、残部
Coおよび不可避的不純物からなる合金によって形成し
たことを特徴とする磁気記録媒体。
1. A magnetic recording medium in which a magnetic film made of a magnetic material is provided on a surface of a substrate made of a non-magnetic material via an undercoat film made of a non-magnetic material, the magnetic film being C in atomic%
A magnetic recording medium characterized by being formed of an alloy comprising r7-15%, Pt7-15%, B0.5-3%, the balance Co and inevitable impurities.
JP1950892A 1992-01-08 1992-01-08 Magnetic recording medium Pending JPH05182171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1950892A JPH05182171A (en) 1992-01-08 1992-01-08 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1950892A JPH05182171A (en) 1992-01-08 1992-01-08 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH05182171A true JPH05182171A (en) 1993-07-23

Family

ID=12001314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1950892A Pending JPH05182171A (en) 1992-01-08 1992-01-08 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH05182171A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5523173A (en) * 1994-12-27 1996-06-04 International Business Machines Corporation Magnetic recording medium with a CoPtCrB alloy thin film with a 1120 crystallographic orientation deposited on an underlayer with 100 orientation
US6064546A (en) * 1994-04-21 2000-05-16 Hitachi, Ltd. Magnetic storage apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6064546A (en) * 1994-04-21 2000-05-16 Hitachi, Ltd. Magnetic storage apparatus
US6452758B2 (en) 1994-04-21 2002-09-17 Hitachi, Ltd. Magnetic storage apparatus
US5523173A (en) * 1994-12-27 1996-06-04 International Business Machines Corporation Magnetic recording medium with a CoPtCrB alloy thin film with a 1120 crystallographic orientation deposited on an underlayer with 100 orientation

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