JPH05101364A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPH05101364A
JPH05101364A JP28085291A JP28085291A JPH05101364A JP H05101364 A JPH05101364 A JP H05101364A JP 28085291 A JP28085291 A JP 28085291A JP 28085291 A JP28085291 A JP 28085291A JP H05101364 A JPH05101364 A JP H05101364A
Authority
JP
Japan
Prior art keywords
magnetic
film
magnetic film
coercive force
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28085291A
Other languages
Japanese (ja)
Inventor
Hideo Murata
英夫 村田
Motoe Nakajima
源衛 中嶋
Hajime Shinohara
肇 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP28085291A priority Critical patent/JPH05101364A/en
Publication of JPH05101364A publication Critical patent/JPH05101364A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To improve coercive force without adding Pt so much to a magnetic film by forming the magnetic film of an alloy consisting of respectively specific atomic % of one or two kinds of Cr, V and Nb and Pt, and the balance Co and unavoidable impurities. CONSTITUTION:After the surface of a substrate consisting of an aluminum alloy contg. 4wt.% magnesium is worked smoothly, a plating film of an Ni-P alloy is formed and is washed. A substrate film consisting of Cr, the magnetic film consisting of a Co-Cr-Pt-Nb alloy and a protective film consisting of C are thereafter successively laminated by a DC magnetron sputtering device. The magnetic film is formed of the alloy consisting, by atomic % of 1 to 18% Cr, 0.1 to 4% one or two kinds of V and Nb, 1 to 12% Pt, and the balance Co and unavoidable impurities in such a case. The coercive force is increased to about 17000e even if the Pt is added not so much to the magnetic film in this way.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えば磁気ヘッドとの
間において情報の記録および再生を行なうための磁気記
録媒体に関し、特にCo−Cr−Pt系合金磁性膜を形
成した磁気記録媒体においてPt添加量が少ない磁性膜
でも保磁力が大きくなるようにしたものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium for recording and reproducing information with, for example, a magnetic head, and particularly Pt in a magnetic recording medium formed with a Co--Cr--Pt alloy magnetic film. The coercive force is increased even with a small amount of added magnetic film.

【0002】[0002]

【従来の技術】磁気ディスク装置では、磁気記録媒体に
微小間隔で磁気ヘッドを対向させ、磁気記録媒体に記録
された磁気情報を磁気ヘッドが読みとったり、磁気ヘッ
ドから磁気記録媒体に磁気的に記録するようになってい
る。磁気ディスク装置により記録、再生を行なう場合に
は磁気ヘッドと磁気記録媒体とを例えば0.2〜0.3
μmの微小間隔に保持するのが通常である。従って磁気
ヘッドと磁気記録媒体との接触による摩擦、摩耗および
/または両者の衝突に伴う損傷を防止するため、浮動ヘ
ッドスライダを使用する。すなわち磁気ヘッドスライダ
が、磁気記録媒体の表面との相対速度により、両者の間
隔に発生する流体力学的な浮上力を利用して、両者の微
小間隔を保持するように構成している。
2. Description of the Related Art In a magnetic disk device, a magnetic head is opposed to a magnetic recording medium at minute intervals so that the magnetic head reads magnetic information recorded on the magnetic recording medium or magnetically records the magnetic information from the magnetic head onto the magnetic recording medium. It is supposed to do. When recording and reproducing by a magnetic disk device, the magnetic head and the magnetic recording medium are, for example, 0.2 to 0.3.
It is usual to keep the distance to a minute interval of μm. Therefore, a floating head slider is used to prevent friction, wear, and / or damage caused by collision between the magnetic head and the magnetic recording medium. That is, the magnetic head slider is configured to maintain a minute gap between the two by utilizing the hydrodynamic levitation force generated in the gap between the two due to the relative velocity with the surface of the magnetic recording medium.

【0003】上記磁性膜を形成する材料としては、Cr
層上にCoCrTaの磁性層を形成したものは、Cr層
上にCoNi、CoNiCr等の磁性層を形成したもの
より磁気特性が優れていることが知られている。また磁
気特性を向上するため、Cr層上に、CoNiPtの磁
性層を形成したものが特開昭62−141628号公報
と特開昭61−142524号公報に開示され、一般に
Pt添加量は15%以上にして保磁力を向上させてい
る。さらにPtが高価なため、基板上にCr層を介して
形成する磁性膜において、CrTaPtCoの四元系元
素を使用するとともにPt添加量を少なくした磁性膜と
して保磁力を向上したものが特開平1−256017号
公報に開示されている。
As a material for forming the magnetic film, Cr is used.
It is known that a magnetic layer of CoCrTa formed on the layer has better magnetic properties than a magnetic layer of CoNi, CoNiCr or the like formed on the Cr layer. Further, a magnetic layer of CoNiPt formed on a Cr layer in order to improve magnetic properties is disclosed in JP-A-62-141628 and JP-A-61-142524. Generally, the amount of Pt added is 15%. The coercive force is improved as described above. Further, since Pt is expensive, in a magnetic film formed on a substrate via a Cr layer, a quaternary element of CrTaPtCo is used and a Pt addition amount is reduced as a magnetic film having improved coercive force. -256017.

【0004】[0004]

【発明が解決しようとする課題】上記従来技術に記載し
たように、Cr層上にPtを含む磁性膜を形成して保磁
力を向上した磁気記録媒体があるが、CrTaPtCo
の四元系元素で磁性膜を形成した場合でも、Ptを15
原子%近く添加する必要があり、やはり高価なものにな
ってしまう。このため磁性膜におけるPt添加量をさら
に少なくして、高保磁力が得られるようにすることが望
まれていた。そこで本発明は、磁気記録媒体の保磁力を
向上するとともに、磁性膜のPt添加量を少なくするこ
とを目的とする。
As described in the above-mentioned prior art, there is a magnetic recording medium having a coercive force improved by forming a magnetic film containing Pt on a Cr layer.
Even if a magnetic film is formed with the quaternary element
It is necessary to add near atomic%, which is also expensive. Therefore, it has been desired to further reduce the amount of Pt added to the magnetic film so that a high coercive force can be obtained. Therefore, an object of the present invention is to improve the coercive force of the magnetic recording medium and reduce the amount of Pt added to the magnetic film.

【0005】[0005]

【課題を解決するための手段】本発明は、非磁性材料か
らなる基板の表面にCr下地膜を介して磁性材料からな
る磁性膜を設けてなる磁気記録媒体において、上記目的
を達成したものである。そのため磁性膜は、原子%でC
r1〜18%、VおよびNbのうちの1種または2種を
0.1〜4%、Pt1〜12%、残部をCoおよび不可
避的不純物からなる合金によって形成した。
The present invention achieves the above object in a magnetic recording medium in which a magnetic film made of a magnetic material is provided on the surface of a substrate made of a non-magnetic material via a Cr underlayer. is there. Therefore, the magnetic film is C in atomic%
r1 to 18%, one or two of V and Nb was 0.1 to 4%, Pt was 1 to 12%, and the balance was an alloy composed of Co and inevitable impurities.

【0006】上記において、磁性膜に含まれるCrが1
原子%未満では、保磁力が小さくかつノイズが多い。一
方Crが18原子%を越えると、残留磁化の減少により
出力の低下を招くと共に、ビットシフトも増大するため
好ましくない。また磁性膜に含まれるV、Nbは保磁力
の向上に寄与するが、0.1原子%未満ではその作用を
期待できず、また4原子%を越えると保磁力が低下する
傾向にある。磁性膜に含まれるPtは、12原子%を越
えて添加しても保磁力向上が図れず、1原子%未満では
保磁力向上が図れない。
In the above, Cr contained in the magnetic film is 1
If it is less than atomic%, the coercive force is small and there is much noise. On the other hand, when Cr exceeds 18 atomic%, the output is lowered due to the decrease of the residual magnetization, and the bit shift is increased, which is not preferable. Further, V and Nb contained in the magnetic film contribute to the improvement of the coercive force, but the effect cannot be expected if the content is less than 0.1 atom%, and the coercive force tends to decrease if the content exceeds 4 atom%. If Pt contained in the magnetic film exceeds 12 atom%, coercive force cannot be improved, and if it is less than 1 atom%, coercive force cannot be improved.

【0007】[0007]

【作用】上記の磁気記録媒体は、磁性膜にV若しくはN
bの1種又は2種を0.1〜4原子%含んでいるので、
Ptをそれほど多く添加しなくても保磁力が約1700
Oeと大きくなる。
In the above magnetic recording medium, the magnetic film has V or N
Since it contains 0.1 to 4 atom% of 1 or 2 of b,
Coercive force of about 1700 without adding too much Pt
It becomes large with Oe.

【0008】[0008]

【実施例】マグネシウムを4重量%含有するアルミニウ
ム合金からなる基板の表面を旋削加工により平滑に形成
し、外径95mm、内径25mm、厚さ1.27mmの
基板とした。次にこの基板の表面にNi−P合金からな
るメッキ膜を5〜15μmの厚さに形成し、磁気記録媒
体の起動時および停止時における磁気ヘッド若しくはス
ライダとの接触摺動特性(CSS)を確保する。上記の
ようにして被着したメッキ膜の表面を平滑に研磨すると
ともに、磁気ヘッド若しくはスライダとの吸着を防止す
るためのテクスチャ加工を施す。
Example The surface of a substrate made of an aluminum alloy containing 4% by weight of magnesium was formed into a smooth surface by turning, to obtain a substrate having an outer diameter of 95 mm, an inner diameter of 25 mm and a thickness of 1.27 mm. Next, a Ni-P alloy plating film having a thickness of 5 to 15 μm is formed on the surface of this substrate, and the contact sliding characteristics (CSS) with the magnetic head or slider at the time of starting and stopping the magnetic recording medium are measured. Secure. The surface of the plated film deposited as described above is polished to be smooth, and texture processing is performed to prevent adsorption to the magnetic head or slider.

【0009】次に基板を洗浄後、例えばDCマグネトロ
ンスパッタ装置により、Crからなる下地膜と、Co−
Cr−Pt−Nb合金からなる磁性膜と、Cからなる保
護膜とを順次積層して成膜する。この場合下地膜の成膜
には、スパッタ室内を1×10-5Toor以下に排気
後、基板を200℃において30分間加熱し、Arガス
を導入してスパッタ室内を5Toorに保持し、投入電
力2000W、成膜速度400Å/分の条件により、膜
厚1000Åに成膜した。次にこの下地膜の上に、Nb
とVをそれぞれ0.1〜6原子%に変化させてCo−C
r−Pt−Nb若しくはCo−Cr−Pt−Vからなる
磁性膜を上記と同様にして、投入電力2000W、成膜
速度1000Å/分の条件で600Åの膜厚に成膜し
た。また保護膜は投入電力1000W、成膜速度80Å
/分の条件で前記磁性膜上に膜厚300Åで成膜した。
Next, after cleaning the substrate, a base film made of Cr and Co-- are formed by, for example, a DC magnetron sputtering apparatus.
A magnetic film made of a Cr-Pt-Nb alloy and a protective film made of C are sequentially stacked to form a film. In this case, for forming the base film, the sputtering chamber was evacuated to 1 × 10 −5 Torr or less, the substrate was heated at 200 ° C. for 30 minutes, and Ar gas was introduced to maintain the sputtering chamber at 5 Torr. A film having a film thickness of 1000 Å was formed under the conditions of 2000 W and a film forming rate of 400 Å / min. Next, on this base film, Nb
And V are each changed to 0.1 to 6 atomic% and Co-C
A magnetic film made of r-Pt-Nb or Co-Cr-Pt-V was formed in the same manner as above to a film thickness of 600 Å under conditions of an input power of 2000 W and a film formation rate of 1000 Å / min. The protective film has a power input of 1000 W and a film formation rate of 80
A film having a thickness of 300 Å was formed on the magnetic film under the condition of / min.

【0010】上記のようにして作製した種々の磁気記録
媒体の保磁力を測定して図1に示した。図1からわかる
ように、磁性膜としてNb若しくはVを含むものは、添
加量3原子%付近で約1700Oeと最大になり、4原
子%を越えると1500Oe以下に低下する傾向にあっ
た。
The coercive force of various magnetic recording media produced as described above was measured and shown in FIG. As can be seen from FIG. 1, the magnetic film containing Nb or V had a maximum at about 1700 Oe when the addition amount was around 3 atom%, and tended to decrease to 1500 Oe or below when the addition amount exceeded 4 atom%.

【0011】また上記実施例において、磁性膜を、Nb
1.5原子%、Pt5原子%、Crを0〜20原子%で
変化させ、残部をCoとして形成した磁気記録媒体を作
成し、その保磁力を測定して図2に示した。また同様に
磁性膜を、V2原子%、Pt10原子%、Crを0〜2
0原子%で変化させ、残部をCoとして形成した磁気記
録媒体を作成し、その保磁力を測定して図2に示した。
図2より、磁性膜としてCo−Cr−Pt−Nbで作成
したものは、Cr添加量が約11%で保磁力が最大とな
り、Co−Cr−Pt−Vで作成したものは、Cr添加
量が約18%で保磁力が最大になった。しかしCr添加
量が18%を越えると飽和磁化量Bsの減少が大きくな
り、磁気記録媒体としては良い特性が得られないので、
Cr添加量は1原子%より多く18原子%より少なくす
るのが好ましい。
In the above embodiment, the magnetic film is Nb.
A magnetic recording medium was prepared in which 1.5 at%, 5 at% Pt, and 0 to 20 at% Cr were changed, and the balance was formed as Co, and the coercive force thereof was measured and shown in FIG. Similarly, for the magnetic film, V2 atomic%, Pt10 atomic%, Cr 0-2
A magnetic recording medium in which the balance was changed to 0 atom% and the balance was Co was formed, and its coercive force was measured and shown in FIG.
From FIG. 2, the magnetic film made of Co-Cr-Pt-Nb has the maximum coercive force at about 11% Cr addition, and the one made of Co-Cr-Pt-V shows the Cr addition amount. Has a maximum coercive force of about 18%. However, when the Cr addition amount exceeds 18%, the saturation magnetization amount Bs is greatly reduced, and good characteristics cannot be obtained as a magnetic recording medium.
The amount of Cr added is preferably more than 1 atom% and less than 18 atom%.

【0012】また上記実施例において、磁性膜は以下の
表1の組成として磁気記録媒体を作成し、それらの飽和
磁化量Bs、角形比Rsを測定して記載した。表1から
Crは18原子%以下、V、Nbは4原子%以下の場合
が望ましいことがわかる。
Further, in the above-mentioned examples, the magnetic film was prepared by preparing magnetic recording media having the compositions shown in Table 1 below, and the saturation magnetization amount Bs and the squareness ratio Rs thereof were measured and described. It can be seen from Table 1 that it is desirable that Cr is 18 atomic% or less and V and Nb are 4 atomic% or less.

【0013】[0013]

【表1】 [Table 1]

【0014】また上記実施例において、磁性膜を、V:
1.5at%としCrを0〜20原子%で変化させ、残
部をCoとして形成した磁気記録媒体を作成し、その保
磁力(Hc)を測定した結果を図3に示した。また同様
に磁性膜を、Ta:3.2at%とし、Crを0〜20
at%で変化させ、残部をCoとして形成した磁性膜の
保磁力を測定した結果を図3に示した。図3からCo−
Cr−Vのものは、Crの添加量15at%で保磁力が
最大となり、Co−Cr−TaではCrの添加量18a
t%で保磁力が最大となる。しかし飽和磁束密度(B
s)は図4に示すように、Crの添加量とともに急激に
低下してしまうため、磁気記録媒体としては良い特性が
得られないので、Crの添加量は18at%より少なく
することが望ましい。
In the above embodiment, the magnetic film is V:
FIG. 3 shows the results of measuring the coercive force (Hc) of a magnetic recording medium having 1.5 at% and varying Cr in the range of 0 to 20 at%, with the balance being Co. Similarly, the magnetic film is Ta: 3.2 at% and Cr is 0 to 20.
FIG. 3 shows the result of measuring the coercive force of the magnetic film formed by changing the at% and changing the balance to Co. From Figure 3 Co-
Cr-V has the maximum coercive force when the amount of Cr added is 15 at%, while the amount of added Cr is 18 a for Co-Cr-Ta.
The coercive force becomes maximum at t%. However, the saturation magnetic flux density (B
As shown in FIG. 4, since s) sharply decreases with the amount of Cr added, good characteristics cannot be obtained as a magnetic recording medium. Therefore, the amount of Cr added is preferably less than 18 at%.

【0015】[0015]

【発明の効果】本発明の磁気記録媒体は、Cr下地層の
上に、Co−Cr−Pt−NbまたはCo−Cr−Pt
−Vの磁性膜を形成し、それぞれのNb若しくはVの添
加量を0.1〜4原子%にしたので、約1700Oeの
高保磁力の磁気記録媒体が得られる。また高価なPtの
添加量は12原子%以下にするので経済的である。
The magnetic recording medium of the present invention comprises Co-Cr-Pt-Nb or Co-Cr-Pt on a Cr underlayer.
Since a -V magnetic film was formed and the amount of each Nb or V added was 0.1 to 4 atomic%, a magnetic recording medium having a high coercive force of about 1700 Oe can be obtained. In addition, the amount of expensive Pt added is 12 atomic% or less, which is economical.

【図面の簡単な説明】[Brief description of drawings]

【図1】磁性膜におけるVまたはNb添加量と保磁力と
の関係図である。
FIG. 1 is a relationship diagram between a coercive force and a V or Nb addition amount in a magnetic film.

【図2】磁性膜におけるCr添加量と保磁力との関係図
である。
FIG. 2 is a relationship diagram between the amount of Cr added and the coercive force in the magnetic film.

【図3】磁性膜におけるCr含有量と保磁力との関係図
である。
FIG. 3 is a diagram showing the relationship between the Cr content in a magnetic film and the coercive force.

【図4】磁性膜におけるCr含有量と飽和磁束密度との
関係図である。
FIG. 4 is a diagram showing the relationship between Cr content and saturation magnetic flux density in a magnetic film.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 非磁性材料からなる基板の表面にCr下
地膜を介して磁性材料からなる磁性膜を設けてなる磁気
記録媒体において、磁性膜を原子%でCr1〜18%、
VおよびNbのうちの1種または2種を0.1〜4%、
Pt1〜12%、残部をCoおよび不可避的不純物から
なる合金によって形成したことを特徴とする磁気記録媒
体。
1. A magnetic recording medium in which a magnetic film made of a magnetic material is provided on a surface of a substrate made of a non-magnetic material via a Cr underlayer, and the magnetic film is Cr 1 to 18% in atomic%,
0.1 to 4% of one or two of V and Nb,
A magnetic recording medium, characterized in that Pt is 1 to 12% and the balance is made of an alloy containing Co and inevitable impurities.
JP28085291A 1991-10-01 1991-10-01 Magnetic recording medium Pending JPH05101364A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28085291A JPH05101364A (en) 1991-10-01 1991-10-01 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28085291A JPH05101364A (en) 1991-10-01 1991-10-01 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH05101364A true JPH05101364A (en) 1993-04-23

Family

ID=17630880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28085291A Pending JPH05101364A (en) 1991-10-01 1991-10-01 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH05101364A (en)

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