JPS63126801U - - Google Patents

Info

Publication number
JPS63126801U
JPS63126801U JP1987019275U JP1927587U JPS63126801U JP S63126801 U JPS63126801 U JP S63126801U JP 1987019275 U JP1987019275 U JP 1987019275U JP 1927587 U JP1927587 U JP 1927587U JP S63126801 U JPS63126801 U JP S63126801U
Authority
JP
Japan
Prior art keywords
order
microscope
objective lens
chamfering
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987019275U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421041Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987019275U priority Critical patent/JPH0421041Y2/ja
Publication of JPS63126801U publication Critical patent/JPS63126801U/ja
Application granted granted Critical
Publication of JPH0421041Y2 publication Critical patent/JPH0421041Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Instruments Using Mechanical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP1987019275U 1987-02-12 1987-02-12 Expired JPH0421041Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987019275U JPH0421041Y2 (enrdf_load_stackoverflow) 1987-02-12 1987-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987019275U JPH0421041Y2 (enrdf_load_stackoverflow) 1987-02-12 1987-02-12

Publications (2)

Publication Number Publication Date
JPS63126801U true JPS63126801U (enrdf_load_stackoverflow) 1988-08-18
JPH0421041Y2 JPH0421041Y2 (enrdf_load_stackoverflow) 1992-05-14

Family

ID=30813732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987019275U Expired JPH0421041Y2 (enrdf_load_stackoverflow) 1987-02-12 1987-02-12

Country Status (1)

Country Link
JP (1) JPH0421041Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538162A (en) * 1976-07-08 1978-01-25 United Technologies Corp Method of and apparatus for observing and measuring objects through pinhole

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538162A (en) * 1976-07-08 1978-01-25 United Technologies Corp Method of and apparatus for observing and measuring objects through pinhole

Also Published As

Publication number Publication date
JPH0421041Y2 (enrdf_load_stackoverflow) 1992-05-14

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