JPS63126801U - - Google Patents

Info

Publication number
JPS63126801U
JPS63126801U JP1927587U JP1927587U JPS63126801U JP S63126801 U JPS63126801 U JP S63126801U JP 1927587 U JP1927587 U JP 1927587U JP 1927587 U JP1927587 U JP 1927587U JP S63126801 U JPS63126801 U JP S63126801U
Authority
JP
Japan
Prior art keywords
order
microscope
objective lens
chamfering
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1927587U
Other languages
Japanese (ja)
Other versions
JPH0421041Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987019275U priority Critical patent/JPH0421041Y2/ja
Publication of JPS63126801U publication Critical patent/JPS63126801U/ja
Application granted granted Critical
Publication of JPH0421041Y2 publication Critical patent/JPH0421041Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係るシートゲージを用いた測
定方法を説明した斜視図、第２図〜第５図はシー
トゲージの記載例を示した図である。 １０……シートゲージ、１２……図形要素、１
４……顕微鏡、１６……対物レンズ、１８……ス
テージ、２０……部品、２２……接眼レンズ。 FIG. 1 is a perspective view illustrating a measuring method using a sheet gauge according to the present invention, and FIGS. 2 to 5 are diagrams showing examples of descriptions of the sheet gauge. 10...Sheet gauge, 12...Graphic element, 1
4... Microscope, 16... Objective lens, 18... Stage, 20... Parts, 22... Eyepiece lens.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 顕微鏡の対物レンズと被検査物との間に介挿し
て微細工業製品の数値的精度検査を行うべく、光
透過性を有するシート材表面に、コーナーの曲率
半径、Ｃ面取量、角度等の図形要素及び測定目盛
等の測定手段を規則的に変化させたものを順番、
且つ等倍に記載されたことを特徴とするシートゲ
ージ。 In order to perform numerical precision inspection of micro-industrial products by inserting it between the objective lens of a microscope and the object to be inspected, the surface of the sheet material with light transparency is marked with the radius of curvature of the corner, the amount of chamfering, the angle, etc. In order, the measurement means such as graphic elements and measurement scales are changed regularly.
A sheet gauge characterized by being written at the same size.
JP1987019275U 1987-02-12 1987-02-12 Expired JPH0421041Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987019275U JPH0421041Y2 (en) 1987-02-12 1987-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987019275U JPH0421041Y2 (en) 1987-02-12 1987-02-12

Publications (2)

Publication Number Publication Date
JPS63126801U true JPS63126801U (en) 1988-08-18
JPH0421041Y2 JPH0421041Y2 (en) 1992-05-14

Family

ID=30813732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987019275U Expired JPH0421041Y2 (en) 1987-02-12 1987-02-12

Country Status (1)

Country Link
JP (1) JPH0421041Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538162A (en) * 1976-07-08 1978-01-25 United Technologies Corp Method of and apparatus for observing and measuring objects through pinhole

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538162A (en) * 1976-07-08 1978-01-25 United Technologies Corp Method of and apparatus for observing and measuring objects through pinhole

Also Published As

Publication number Publication date
JPH0421041Y2 (en) 1992-05-14

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