JPS63126801U - - Google Patents

Info

Publication number
JPS63126801U
JPS63126801U JP1987019275U JP1927587U JPS63126801U JP S63126801 U JPS63126801 U JP S63126801U JP 1987019275 U JP1987019275 U JP 1987019275U JP 1927587 U JP1927587 U JP 1927587U JP S63126801 U JPS63126801 U JP S63126801U
Authority
JP
Japan
Prior art keywords
order
microscope
objective lens
chamfering
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987019275U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421041Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987019275U priority Critical patent/JPH0421041Y2/ja
Publication of JPS63126801U publication Critical patent/JPS63126801U/ja
Application granted granted Critical
Publication of JPH0421041Y2 publication Critical patent/JPH0421041Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length-Measuring Instruments Using Mechanical Means (AREA)
JP1987019275U 1987-02-12 1987-02-12 Expired JPH0421041Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987019275U JPH0421041Y2 (OSRAM) 1987-02-12 1987-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987019275U JPH0421041Y2 (OSRAM) 1987-02-12 1987-02-12

Publications (2)

Publication Number Publication Date
JPS63126801U true JPS63126801U (OSRAM) 1988-08-18
JPH0421041Y2 JPH0421041Y2 (OSRAM) 1992-05-14

Family

ID=30813732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987019275U Expired JPH0421041Y2 (OSRAM) 1987-02-12 1987-02-12

Country Status (1)

Country Link
JP (1) JPH0421041Y2 (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538162A (en) * 1976-07-08 1978-01-25 United Technologies Corp Method of and apparatus for observing and measuring objects through pinhole

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538162A (en) * 1976-07-08 1978-01-25 United Technologies Corp Method of and apparatus for observing and measuring objects through pinhole

Also Published As

Publication number Publication date
JPH0421041Y2 (OSRAM) 1992-05-14

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