JPS63125672A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPS63125672A
JPS63125672A JP26860186A JP26860186A JPS63125672A JP S63125672 A JPS63125672 A JP S63125672A JP 26860186 A JP26860186 A JP 26860186A JP 26860186 A JP26860186 A JP 26860186A JP S63125672 A JPS63125672 A JP S63125672A
Authority
JP
Japan
Prior art keywords
crucible
thin film
film forming
forming apparatus
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26860186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535220B2 (enrdf_load_stackoverflow
Inventor
Nobutaka Koshirakawa
古白川　信孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP26860186A priority Critical patent/JPS63125672A/ja
Publication of JPS63125672A publication Critical patent/JPS63125672A/ja
Publication of JPH0535220B2 publication Critical patent/JPH0535220B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP26860186A 1986-11-13 1986-11-13 薄膜形成装置 Granted JPS63125672A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26860186A JPS63125672A (ja) 1986-11-13 1986-11-13 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26860186A JPS63125672A (ja) 1986-11-13 1986-11-13 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS63125672A true JPS63125672A (ja) 1988-05-28
JPH0535220B2 JPH0535220B2 (enrdf_load_stackoverflow) 1993-05-26

Family

ID=17460801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26860186A Granted JPS63125672A (ja) 1986-11-13 1986-11-13 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS63125672A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4966095A (en) * 1988-08-15 1990-10-30 Ricoh Company, Ltd. Apparatus for forming a thin film

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184369A (ja) * 1984-10-01 1986-04-28 Ulvac Corp イオン化装置
JPS61235557A (ja) * 1985-04-10 1986-10-20 Mitsubishi Electric Corp 薄膜蒸着装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184369A (ja) * 1984-10-01 1986-04-28 Ulvac Corp イオン化装置
JPS61235557A (ja) * 1985-04-10 1986-10-20 Mitsubishi Electric Corp 薄膜蒸着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4966095A (en) * 1988-08-15 1990-10-30 Ricoh Company, Ltd. Apparatus for forming a thin film

Also Published As

Publication number Publication date
JPH0535220B2 (enrdf_load_stackoverflow) 1993-05-26

Similar Documents

Publication Publication Date Title
JPH0397854A (ja) 薄膜形成装置
JPS63307263A (ja) 薄膜蒸着装置
JPS63125672A (ja) 薄膜形成装置
JPH06108236A (ja) 薄膜形成装置
JPS61272367A (ja) 薄膜形成装置
JPH04176863A (ja) 薄膜形成装置
JP4065725B2 (ja) ピアス式電子銃およびこれを備える真空蒸着装置
GB1093525A (en) Improvements in or relating to arrangements for the manufacture of electronic element s
JPH01119663A (ja) 薄膜形成装置
JP2575375B2 (ja) 薄膜形成装置
JPH05339720A (ja) 薄膜形成装置
JPS60262963A (ja) 化合物薄膜蒸着装置
JPS61279668A (ja) 薄膜形成装置
JPH03158458A (ja) クラスターイオンビーム装置
JPS6320820A (ja) 薄膜蒸着装置
JPS60125368A (ja) 薄膜蒸着装置
JPS6329925A (ja) 化合物薄膜形成装置
JPH0510423B2 (enrdf_load_stackoverflow)
JPH0735569B2 (ja) 薄膜形成装置
JPH03294474A (ja) 膜形成装置
JPH04323365A (ja) 薄膜形成装置
JPS6096759A (ja) 薄膜蒸着装置
JPS60124929A (ja) 薄膜蒸着装置
JPH04110463A (ja) 薄膜形成装置
JPS61174370A (ja) 蒸着装置