JPS63123794U - - Google Patents

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Publication number
JPS63123794U
JPS63123794U JP1417087U JP1417087U JPS63123794U JP S63123794 U JPS63123794 U JP S63123794U JP 1417087 U JP1417087 U JP 1417087U JP 1417087 U JP1417087 U JP 1417087U JP S63123794 U JPS63123794 U JP S63123794U
Authority
JP
Japan
Prior art keywords
stages
blade
molecular pump
turbo
chord length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1417087U
Other languages
English (en)
Other versions
JPH0540318Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1417087U priority Critical patent/JPH0540318Y2/ja
Publication of JPS63123794U publication Critical patent/JPS63123794U/ja
Application granted granted Critical
Publication of JPH0540318Y2 publication Critical patent/JPH0540318Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係わる分子ターボポンプの一
実施例を示す縦断側面図、第２図はその翼配列を
示す説明図である。 １……ハウジング、２……回転体、３，５，７
，９……動翼、４，６，８……静翼、４Ａ……静
翼段４の長翼弦長翼、４Ｂ……静翼段４の短翼弦
長翼、Ｃ……長翼弦長翼４Ａの翼弦長、……短
翼弦長翼４Ｂの翼弦長、α……長翼弦長翼４Ａの
翼角度、β……短翼弦長翼４Ｂの翼角度。

Claims (1)

    【実用新案登録請求の範囲】
  1. 回転体側の動翼段とハウジング側の静翼段とを
    交互に配設したターボ分子ポンプにおいて、前記
    各翼段のうち、少なくとも１つの翼段を、寸法若
    しくは翼角度の異なる複数種類の翼により構成し
    たことを特徴とするターボ分子ポンプ。
JP1417087U 1987-02-04 1987-02-04 Expired - Lifetime JPH0540318Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1417087U JPH0540318Y2 (ja) 1987-02-04 1987-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1417087U JPH0540318Y2 (ja) 1987-02-04 1987-02-04

Publications (2)

Publication Number Publication Date
JPS63123794U true JPS63123794U (ja) 1988-08-11
JPH0540318Y2 JPH0540318Y2 (ja) 1993-10-13

Family

ID=30803907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1417087U Expired - Lifetime JPH0540318Y2 (ja) 1987-02-04 1987-02-04

Country Status (1)

Country Link
JP (1) JPH0540318Y2 (ja)

Also Published As

Publication number Publication date
JPH0540318Y2 (ja) 1993-10-13

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