JPS63122936A - 面板欠陥検出信号のサンプリング方法およびサンプリング装置 - Google Patents

面板欠陥検出信号のサンプリング方法およびサンプリング装置

Info

Publication number
JPS63122936A
JPS63122936A JP27049186A JP27049186A JPS63122936A JP S63122936 A JPS63122936 A JP S63122936A JP 27049186 A JP27049186 A JP 27049186A JP 27049186 A JP27049186 A JP 27049186A JP S63122936 A JPS63122936 A JP S63122936A
Authority
JP
Japan
Prior art keywords
face plate
sampling
measurement data
value
data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27049186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH052263B2 (Direct
Inventor
Hiroshi Tsuzuki
都築　広
Masashi Honda
本田　正志
Tadashi Hasegawa
正 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP27049186A priority Critical patent/JPS63122936A/ja
Publication of JPS63122936A publication Critical patent/JPS63122936A/ja
Publication of JPH052263B2 publication Critical patent/JPH052263B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP27049186A 1986-11-13 1986-11-13 面板欠陥検出信号のサンプリング方法およびサンプリング装置 Granted JPS63122936A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27049186A JPS63122936A (ja) 1986-11-13 1986-11-13 面板欠陥検出信号のサンプリング方法およびサンプリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27049186A JPS63122936A (ja) 1986-11-13 1986-11-13 面板欠陥検出信号のサンプリング方法およびサンプリング装置

Publications (2)

Publication Number Publication Date
JPS63122936A true JPS63122936A (ja) 1988-05-26
JPH052263B2 JPH052263B2 (Direct) 1993-01-12

Family

ID=17487021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27049186A Granted JPS63122936A (ja) 1986-11-13 1986-11-13 面板欠陥検出信号のサンプリング方法およびサンプリング装置

Country Status (1)

Country Link
JP (1) JPS63122936A (Direct)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate
JPS55133551A (en) * 1979-04-06 1980-10-17 Hitachi Ltd Device for driving circular face plate
JPS60113938A (ja) * 1983-11-26 1985-06-20 Toshiba Corp 表面検査装置
JPS61133843A (ja) * 1984-12-05 1986-06-21 Hitachi Electronics Eng Co Ltd 表面検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate
JPS55133551A (en) * 1979-04-06 1980-10-17 Hitachi Ltd Device for driving circular face plate
JPS60113938A (ja) * 1983-11-26 1985-06-20 Toshiba Corp 表面検査装置
JPS61133843A (ja) * 1984-12-05 1986-06-21 Hitachi Electronics Eng Co Ltd 表面検査装置

Also Published As

Publication number Publication date
JPH052263B2 (Direct) 1993-01-12

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