JPS63120205A - 傾斜モアレ式形状測定方法 - Google Patents

傾斜モアレ式形状測定方法

Info

Publication number
JPS63120205A
JPS63120205A JP26614586A JP26614586A JPS63120205A JP S63120205 A JPS63120205 A JP S63120205A JP 26614586 A JP26614586 A JP 26614586A JP 26614586 A JP26614586 A JP 26614586A JP S63120205 A JPS63120205 A JP S63120205A
Authority
JP
Japan
Prior art keywords
lattice
measured
shape
point
inclination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26614586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426683B2 (enExample
Inventor
Jiro Matsuo
松尾　次郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP26614586A priority Critical patent/JPS63120205A/ja
Publication of JPS63120205A publication Critical patent/JPS63120205A/ja
Publication of JPH0426683B2 publication Critical patent/JPH0426683B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP26614586A 1986-11-08 1986-11-08 傾斜モアレ式形状測定方法 Granted JPS63120205A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26614586A JPS63120205A (ja) 1986-11-08 1986-11-08 傾斜モアレ式形状測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26614586A JPS63120205A (ja) 1986-11-08 1986-11-08 傾斜モアレ式形状測定方法

Publications (2)

Publication Number Publication Date
JPS63120205A true JPS63120205A (ja) 1988-05-24
JPH0426683B2 JPH0426683B2 (enExample) 1992-05-08

Family

ID=17426930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26614586A Granted JPS63120205A (ja) 1986-11-08 1986-11-08 傾斜モアレ式形状測定方法

Country Status (1)

Country Link
JP (1) JPS63120205A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102022985A (zh) * 2009-09-18 2011-04-20 学校法人福冈工业大学 三维信息测量装置和三维信息测量方法
JP2019018223A (ja) * 2017-07-14 2019-02-07 株式会社アマダホールディングス Ｕ形状加工品の折曲げ加工方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034947A (enExample) * 1973-08-01 1975-04-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034947A (enExample) * 1973-08-01 1975-04-03

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102022985A (zh) * 2009-09-18 2011-04-20 学校法人福冈工业大学 三维信息测量装置和三维信息测量方法
JP2019018223A (ja) * 2017-07-14 2019-02-07 株式会社アマダホールディングス Ｕ形状加工品の折曲げ加工方法

Also Published As

Publication number Publication date
JPH0426683B2 (enExample) 1992-05-08

Similar Documents

Publication Publication Date Title
US6937350B2 (en) Apparatus and methods for optically monitoring thickness
US7199884B2 (en) Thin thickness measurement method and apparatus
US6376329B1 (en) Semiconductor wafer alignment using backside illumination
US6504615B1 (en) Optical instrument for measuring shape of wafer
US20020113973A1 (en) Method of detecting posture of object and apparatus using the same
JPS60235424A (ja) ウエハパターンとこのウエハ上に投影されたマスクパターンとの間のオーバレイ誤差測定装置
JPH0650720A (ja) 高さ測定方法および装置
USH1972H1 (en) Autofocus system using common path interferometry
JP3031529B2 (ja) Ｈ形鋼の断面寸法測定方法および装置
JP2000121324A (ja) 厚さ測定装置
JPH08132118A (ja) 走行中の材料の形状および／または平坦性の測定方法および装置
JPH0758172B2 (ja) 形状測定方法およびその装置
JPS63120205A (ja) 傾斜モアレ式形状測定方法
JP2009109355A (ja) 距離測定装置及びその方法、距離測定装置を用いた厚さ測定装置
JP3048107B2 (ja) 物体の寸法の計測方法及び装置
CN103471508A (zh) 一种剪切位移散斑测量方法及装置
KR0129054B1 (ko) 강판의 판 변형 측정방법 및 그 장치
JP3073374B2 (ja) 形鋼材の寸法測定装置
JP2827251B2 (ja) 位置検出装置
TWI826340B (zh) 檢測設備
JPH06331329A (ja) 非接触三次元形状計測装置
JP3457918B2 (ja) 対向平面平行度測定方法及び装置
JP2827250B2 (ja) 位置検出装置
JPH10122837A (ja) 形鋼のオンライン測定装置の校正方法および装置、並びに校正治具搭載用架台
JPH06109435A (ja) 表面変位計