JPS6311717Y2 - - Google Patents
Info
- Publication number
- JPS6311717Y2 JPS6311717Y2 JP1979082560U JP8256079U JPS6311717Y2 JP S6311717 Y2 JPS6311717 Y2 JP S6311717Y2 JP 1979082560 U JP1979082560 U JP 1979082560U JP 8256079 U JP8256079 U JP 8256079U JP S6311717 Y2 JPS6311717 Y2 JP S6311717Y2
- Authority
- JP
- Japan
- Prior art keywords
- dust remover
- slit
- laser
- printing
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000007921 spray Substances 0.000 claims description 8
- 238000007648 laser printing Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 239000013078 crystal Substances 0.000 description 19
- 238000007639 printing Methods 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 239000010419 fine particle Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 5
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 239000003595 mist Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011856 silicon-based particle Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010330 laser marking Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979082560U JPS6311717Y2 (enExample) | 1979-06-15 | 1979-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979082560U JPS6311717Y2 (enExample) | 1979-06-15 | 1979-06-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55181338U JPS55181338U (enExample) | 1980-12-26 |
| JPS6311717Y2 true JPS6311717Y2 (enExample) | 1988-04-05 |
Family
ID=29315779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979082560U Expired JPS6311717Y2 (enExample) | 1979-06-15 | 1979-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311717Y2 (enExample) |
-
1979
- 1979-06-15 JP JP1979082560U patent/JPS6311717Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55181338U (enExample) | 1980-12-26 |
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