JPS63117049U - - Google Patents

Info

Publication number
JPS63117049U
JPS63117049U JP725787U JP725787U JPS63117049U JP S63117049 U JPS63117049 U JP S63117049U JP 725787 U JP725787 U JP 725787U JP 725787 U JP725787 U JP 725787U JP S63117049 U JPS63117049 U JP S63117049U
Authority
JP
Japan
Prior art keywords
magnetic pole
pole piece
cylindrical member
electron beam
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP725787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518840Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP725787U priority Critical patent/JPH0518840Y2/ja
Publication of JPS63117049U publication Critical patent/JPS63117049U/ja
Application granted granted Critical
Publication of JPH0518840Y2 publication Critical patent/JPH0518840Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP725787U 1987-01-21 1987-01-21 Expired - Lifetime JPH0518840Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP725787U JPH0518840Y2 (enExample) 1987-01-21 1987-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP725787U JPH0518840Y2 (enExample) 1987-01-21 1987-01-21

Publications (2)

Publication Number Publication Date
JPS63117049U true JPS63117049U (enExample) 1988-07-28
JPH0518840Y2 JPH0518840Y2 (enExample) 1993-05-19

Family

ID=30790544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP725787U Expired - Lifetime JPH0518840Y2 (enExample) 1987-01-21 1987-01-21

Country Status (1)

Country Link
JP (1) JPH0518840Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018179115A1 (ja) * 2017-03-29 2018-10-04 株式会社 日立ハイテクノロジーズ 荷電粒子線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018179115A1 (ja) * 2017-03-29 2018-10-04 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
JPWO2018179115A1 (ja) * 2017-03-29 2020-01-16 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US10886101B2 (en) 2017-03-29 2021-01-05 Hitachi High-Tech Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPH0518840Y2 (enExample) 1993-05-19

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