JPH0177254U - - Google Patents
Info
- Publication number
- JPH0177254U JPH0177254U JP1987172643U JP17264387U JPH0177254U JP H0177254 U JPH0177254 U JP H0177254U JP 1987172643 U JP1987172643 U JP 1987172643U JP 17264387 U JP17264387 U JP 17264387U JP H0177254 U JPH0177254 U JP H0177254U
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- objective lens
- lens
- magnetic pole
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172643U JPH0177254U (enExample) | 1987-11-13 | 1987-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172643U JPH0177254U (enExample) | 1987-11-13 | 1987-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0177254U true JPH0177254U (enExample) | 1989-05-24 |
Family
ID=31464601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172643U Pending JPH0177254U (enExample) | 1987-11-13 | 1987-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0177254U (enExample) |
-
1987
- 1987-11-13 JP JP1987172643U patent/JPH0177254U/ja active Pending