JPS62112844U - - Google Patents
Info
- Publication number
- JPS62112844U JPS62112844U JP128386U JP128386U JPS62112844U JP S62112844 U JPS62112844 U JP S62112844U JP 128386 U JP128386 U JP 128386U JP 128386 U JP128386 U JP 128386U JP S62112844 U JPS62112844 U JP S62112844U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- focused
- aperture
- filter
- wien filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 6
- 238000000926 separation method Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128386U JPS62112844U (enExample) | 1986-01-08 | 1986-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128386U JPS62112844U (enExample) | 1986-01-08 | 1986-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62112844U true JPS62112844U (enExample) | 1987-07-18 |
Family
ID=30779047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP128386U Pending JPS62112844U (enExample) | 1986-01-08 | 1986-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62112844U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002532844A (ja) * | 1998-12-17 | 2002-10-02 | フィリップス エレクトロン オプティクス ビー ヴィ | オージェ電子の検出を含む粒子光学装置 |
| JP2007504606A (ja) * | 2003-08-28 | 2007-03-01 | シマヅ リサーチ ラボラトリー(ヨーロッパ)リミティド | 粒子光学装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6062045A (ja) * | 1983-09-14 | 1985-04-10 | Hitachi Ltd | イオンマイクロビ−ム打込み装置 |
-
1986
- 1986-01-08 JP JP128386U patent/JPS62112844U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6062045A (ja) * | 1983-09-14 | 1985-04-10 | Hitachi Ltd | イオンマイクロビ−ム打込み装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002532844A (ja) * | 1998-12-17 | 2002-10-02 | フィリップス エレクトロン オプティクス ビー ヴィ | オージェ電子の検出を含む粒子光学装置 |
| JP2007504606A (ja) * | 2003-08-28 | 2007-03-01 | シマヅ リサーチ ラボラトリー(ヨーロッパ)リミティド | 粒子光学装置 |
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