JPS63116037A - クリーンルームシステム用ユニット - Google Patents
クリーンルームシステム用ユニットInfo
- Publication number
- JPS63116037A JPS63116037A JP26119386A JP26119386A JPS63116037A JP S63116037 A JPS63116037 A JP S63116037A JP 26119386 A JP26119386 A JP 26119386A JP 26119386 A JP26119386 A JP 26119386A JP S63116037 A JPS63116037 A JP S63116037A
- Authority
- JP
- Japan
- Prior art keywords
- cold water
- unit
- air conditioning
- pipes
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 40
- 238000004378 air conditioning Methods 0.000 claims abstract description 30
- 238000010276 construction Methods 0.000 abstract description 3
- 238000005422 blasting Methods 0.000 abstract 1
- 238000009434 installation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004887 air purification Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26119386A JPS63116037A (ja) | 1986-11-03 | 1986-11-03 | クリーンルームシステム用ユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26119386A JPS63116037A (ja) | 1986-11-03 | 1986-11-03 | クリーンルームシステム用ユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63116037A true JPS63116037A (ja) | 1988-05-20 |
| JPH0362977B2 JPH0362977B2 (enExample) | 1991-09-27 |
Family
ID=17358435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26119386A Granted JPS63116037A (ja) | 1986-11-03 | 1986-11-03 | クリーンルームシステム用ユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63116037A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03117840A (ja) * | 1989-09-29 | 1991-05-20 | S B Plant:Kk | クリーンルーム |
| WO2024166344A1 (ja) * | 2023-02-10 | 2024-08-15 | 日立グローバルライフソリューションズ株式会社 | クリーンルーム施設 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61243238A (ja) * | 1985-04-18 | 1986-10-29 | Matsushita Seiko Co Ltd | 空気清浄装置 |
-
1986
- 1986-11-03 JP JP26119386A patent/JPS63116037A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61243238A (ja) * | 1985-04-18 | 1986-10-29 | Matsushita Seiko Co Ltd | 空気清浄装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03117840A (ja) * | 1989-09-29 | 1991-05-20 | S B Plant:Kk | クリーンルーム |
| WO2024166344A1 (ja) * | 2023-02-10 | 2024-08-15 | 日立グローバルライフソリューションズ株式会社 | クリーンルーム施設 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0362977B2 (enExample) | 1991-09-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |