JPS6311533A - Production of reaction pipe made of quartz - Google Patents
Production of reaction pipe made of quartzInfo
- Publication number
- JPS6311533A JPS6311533A JP15151886A JP15151886A JPS6311533A JP S6311533 A JPS6311533 A JP S6311533A JP 15151886 A JP15151886 A JP 15151886A JP 15151886 A JP15151886 A JP 15151886A JP S6311533 A JPS6311533 A JP S6311533A
- Authority
- JP
- Japan
- Prior art keywords
- temp
- reaction tube
- reaction pipe
- quartz
- quartz reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 53
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 47
- 239000010453 quartz Substances 0.000 title claims abstract description 46
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 32
- 239000011521 glass Substances 0.000 claims abstract description 18
- 229910021494 β-cristobalite Inorganic materials 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 10
- 238000006460 hydrolysis reaction Methods 0.000 claims description 2
- 238000010574 gas phase reaction Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 21
- 230000018044 dehydration Effects 0.000 abstract description 5
- 238000006297 dehydration reaction Methods 0.000 abstract description 5
- 239000010419 fine particle Substances 0.000 abstract description 5
- 238000004031 devitrification Methods 0.000 abstract description 2
- 230000004048 modification Effects 0.000 abstract 2
- 238000012986 modification Methods 0.000 abstract 2
- 238000007792 addition Methods 0.000 abstract 1
- 238000005352 clarification Methods 0.000 abstract 1
- 239000013307 optical fiber Substances 0.000 description 12
- 239000012071 phase Substances 0.000 description 6
- 239000000835 fiber Substances 0.000 description 5
- 208000005156 Dehydration Diseases 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910004014 SiF4 Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
- C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
- C03B32/02—Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Glass Melting And Manufacturing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業トの利用分野〉
本発明は１１００℃以上で使用しても変形しにくい多結
晶のβ−クリストバライトから高温加熱部を有する石英
製反応管の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION <Field of Industrial Application> The present invention relates to a method for manufacturing a quartz reaction tube having a high-temperature heating section from polycrystalline β-cristobalite, which is not easily deformed even when used at temperatures of 1100° C. or higher.
〈従来の技術〉
光ファイバや半導体などの製造を業分野において高温炉
を便用する場合には化学的安定性釘優れた透明石英製反
応管が用いられる。<Prior Art> When high-temperature furnaces are conveniently used in the industrial field of manufacturing optical fibers and semiconductors, transparent quartz reaction tubes with excellent chemical stability are used.
−例として光フアイバ用ガラス母材の製造における透明
石英反応管を内装した高温炉を第４図（ａ）に示す。同
図中、３は電気炉、４は発熱体２５は透明石英反応管で
あり、この透明石英反応管２５はＦ端部のガス供給口６
よりその内部にＨｅ、ＣＩ！２などのガスを供給できる
ようになっている。このように構成された高温炉におい
て、回転可能かつ上下動可能な軸２に取付けられている
多孔質母材１を１１００゜以トないし１７５０℃以下に
なっている透明石英製反応管２５内に挿入して添加・脱
水・透明化を行うことにより不純物の吸収がなく、丘つ
水酸基（ＯＨ）吸収が実質的にない尤ファイバが得られ
る。- As an example, a high-temperature furnace equipped with a transparent quartz reaction tube for manufacturing a glass base material for optical fibers is shown in FIG. 4(a). In the figure, 3 is an electric furnace, and 4 is a heating element 25, which is a transparent quartz reaction tube.
He, CI! It is possible to supply gases such as 2. In the high-temperature furnace configured as described above, the porous base material 1 attached to the rotatable and vertically movable shaft 2 is placed in a transparent quartz reaction tube 25 whose temperature is between 1100° and 1750°C. By inserting and performing addition, dehydration, and transparency, a fiber with no absorption of impurities and substantially no absorption of hydroxyl groups (OH) can be obtained.
〈発明が解決しようと１−る問題点〉
しかしなから、上述のような高温炉にて透明石英製反応
管を１１００℃以上の高温下で使用した場合、短期間で
透明ＴＩ英製反応管の高温加熱部が著しく変形してしま
い、長期に司る使用が不ｉｉＪ能であった。これは反応
管に使用されている透明石英が特定の結晶構造をとらず
に準安定なガラス状態にあり、約１１００℃付近にひず
み点を打し、１１つこれより高温ではその粘性が低下し
てしまうことに起因する。<1-Problem to be Solved by the Invention> However, when a transparent quartz reaction tube is used at a high temperature of 1100°C or higher in a high-temperature furnace such as the one described above, the transparent TI quartz reaction tube is destroyed in a short period of time. The high-temperature heating part of the machine was significantly deformed, making it impossible to use it for a long period of time. This is because the transparent quartz used in the reaction tube does not have a specific crystal structure and is in a metastable glass state, with a strain point around 1100℃, and its viscosity decreases at higher temperatures. This is due to the fact that
例えば、上述のように、光フアイバ用ガラス８Ｎ材の製
造において、透明石英製反応管２５を用いて多孔Ｔ１ｎ
材１の添加・脱水・透明化を繰り返し実施すると、短期
間のうちに第４図（ｂ）に示すように、透明石英製反応
管２５の高温加熱部に変形が生じ、多孔質ガラス母材１
を３反応管２５内に保持すること及び通過させることが
不可能となる。For example, as described above, in the production of glass 8N material for optical fiber, a transparent quartz reaction tube 25 is used to create a porous T1n material.
When the addition, dehydration, and transparency of the material 1 are repeated, the high-temperature heated part of the transparent quartz reaction tube 25 deforms in a short period of time, as shown in FIG. 4(b), and the porous glass base material 1
It becomes impossible to hold and pass through the three reaction tubes 25.
このように透明石英製反応管は、１１００℃以北の高温
で使用すると短期間で変形してしまって使用不能となる
という欠点を有しており、この結果、製品の生産コスト
が大幅に１−４してしまうという問題があった。As described above, transparent quartz reaction tubes have the disadvantage that when used at high temperatures north of 1100°C, they become deformed in a short period of time and become unusable.As a result, the production cost of the product increases significantly. There was a problem that it ended up being -4.
本発明は、このような事情に鑑み、１１００℃以北で使
用しても変形しにくく長期に亘って安定して使用しうる
石英製反応管の製造方法を提供することを］］的とする
。In view of these circumstances, it is an object of the present invention to provide a method for manufacturing a quartz reaction tube that does not easily deform even when used at temperatures north of 1100°C and can be used stably for a long period of time. .
〈問題点を解法するための手段及び作用〉前記［１的を
達成する本発明の構成は、高温炉にて使用する透明石英
製反応管の高温加熱部を１２００℃以［に加熱して多結
晶のβ−クリストバライトへ相変態させ、以後この高温
加熱部を５００℃以上に保つことを特徴とする。<Means and operations for solving the problems> The configuration of the present invention that achieves the above-mentioned [1] is to heat the high-temperature heating section of a transparent quartz reaction tube used in a high-temperature furnace to 1200°C or higher. It is characterized by phase transformation into crystalline β-cristobalite, and thereafter maintaining this high-temperature heating section at 500°C or higher.
以下、本発明の構成及び作用を詳細に説明する。Hereinafter, the structure and operation of the present invention will be explained in detail.
透明石英を約１２００℃以上に加熱すると失速という現
象が生じることが一般に知られている。これは、ガラス
状態の透明石英が不均一核生成によって結晶化を開始し
て、ガラス状態よりも熱力学的及び構造的に安定な多結
晶のβ−クリストバライトへ相変態することによるもの
である。この多結晶のβ−クリストバライトは約５００
℃以トの温度で使用するかぎり、透明石英とほぼ同一の
諸物性をボし、且つ高温での粘度が透明石英と比較して
高い性質を有する。It is generally known that when transparent quartz is heated to about 1200° C. or higher, a phenomenon called stalling occurs. This is because transparent quartz in a glassy state starts to crystallize due to heterogeneous nucleation and undergoes a phase transformation into polycrystalline β-cristobalite, which is thermodynamically and structurally more stable than the glassy state. This polycrystalline β-cristobalite has approximately 500
As long as it is used at temperatures below 0.degree. C., it exhibits almost the same physical properties as transparent quartz, and has higher viscosity at high temperatures than transparent quartz.
本発明は従来の透明１ｉ英製反応管の高温加熱部をこの
β−クリストバライトへ相変態させ以後５００℃以１−
１に保つことにより高温でに時間使用しても変形が生じ
にくい石英製反応管を製造するものである。なおこの石
英製反応管の温度を５００℃より下げてしまうとβ−ク
リストバライトが他の相へ変化してクラックを牛してし
まう。In the present invention, the high-temperature heating part of the conventional transparent 1i British-made reaction tube is phase-transformed into this β-cristobalite, and thereafter the 1-
By maintaining the temperature at 1, a quartz reaction tube that is not easily deformed even when used at high temperatures for a long period of time is manufactured. Note that if the temperature of this quartz reaction tube is lowered below 500° C., β-cristobalite changes to another phase and prevents cracks.
本発明において高温加熱部を形成する透明石英をβ−ク
リストバライトへ相変態させるためには、該高温加熱部
を変形させないようにして長時間、１２００℃以上に保
持すればよいが、この相変態の速度（以後、失速速度と
いう）を高めるためには温度を上げ下−げした方がよい
。また、ガラス微粒子を高温加熱部の内壁及び外壁の少
なくとも一方に付着させると、その表面積が増大して不
均一核生成の進行が早まり、失速速度が大幅に向１：す
る。これにより、本発明の石英製反応管の製造効率が２
ないし５倍程度向トする。ここで、ガラス微粒子は後で
該反応管内で製造される製品への影響を考慮して化学気
相反応法または溶液加水分解法で作られる高純度のもの
を使用する必要がある。特に、後に光ファイバ８）材の
製造のための石英反応管を製造する場合には、金属不純
物の存在晴が無視しつるものでなければならず、具体的
にはＭが３０ｐｐｍ以下、（；Ｌｌが０．Ｏ５ｐｐｍ以
下、Ｆｅが３ ｐｐｍ以下である必要かある。一方、−
上述の方法によって得られるガラス微粒子は、それ自身
が強く負に帯電する特性を有しているので、この性質を
利用して静電気力により高温加熱部の外壁及び内壁に付
着させることができる。In the present invention, in order to phase-transform the transparent quartz forming the high-temperature heating section into β-cristobalite, it is sufficient to maintain the high-temperature heating section at 1200°C or higher for a long time without deforming it. In order to increase the speed (hereinafter referred to as stall speed), it is better to raise or lower the temperature. Further, when glass particles are attached to at least one of the inner wall and outer wall of the high-temperature heating section, the surface area thereof increases, the progress of heterogeneous nucleation is accelerated, and the stall speed is significantly increased. As a result, the manufacturing efficiency of the quartz reaction tube of the present invention is 2.
It will increase by about 5 times. Here, it is necessary to use high-purity glass particles produced by a chemical vapor phase reaction method or a solution hydrolysis method in consideration of the influence on the products later produced in the reaction tube. In particular, when manufacturing quartz reaction tubes for later manufacturing optical fiber 8) materials, the presence of metal impurities must be negligible, and specifically, M must be 30 ppm or less (; It is necessary that Ll be 0.05 ppm or less and Fe be 3 ppm or less.On the other hand, -
Since the glass particles obtained by the above-described method have the property of being strongly negatively charged, they can be attached to the outer and inner walls of the high-temperature heating section by electrostatic force using this property.
このようにガラス微粒子を付着させて失透速度を高めた
場合には、通常の状態で使用しなから相変態を行わせる
ことができ、これにより変形がなく、且つその後長期に
狂って安定に使用できる石英製反応管を製造することが
できる。If the rate of devitrification is increased by attaching glass fine particles in this way, it is possible to cause phase transformation to occur without using it under normal conditions, thereby preventing deformation and making it stable for a long period of time. A usable quartz reaction tube can be manufactured.
〈実 施 例〉
以下、本発明の実施例を図面に基づいて説明する。なお
実施例は光フアイバ用母材製造用反応管を例にして説明
するが、これに限定されるものではない。<Example> Hereinafter, an example of the present invention will be described based on the drawings. The embodiments will be described using a reaction tube for manufacturing an optical fiber base material as an example, but the present invention is not limited thereto.
第１図は光フアイバ用多孔質母材に対して添加・脱水・
透明化を施す高温炉を示す。Figure 1 shows the addition, dehydration, and
A high-temperature furnace that performs transparency is shown.
同図中、３は電気炉、４はカーボン等の発熱体、１５は
透明石英製反応管を示し、この内部で、回転可能且つ上
下動可能な軸２に取付けられている多孔質Ｐ４材１が添
加・脱水・透明化される。なお、６は透明石英製反応管
１５内にｌｌｅ、 Ｇ２．０２． ＳｉＦ４などのガス
を供給するためのカス供給口である。In the figure, 3 is an electric furnace, 4 is a heating element such as carbon, and 15 is a transparent quartz reaction tube, inside which a porous P4 material 1 is attached to a rotatable and vertically movable shaft 2 is added, dehydrated, and clarified. In addition, 6 is lle in the transparent quartz reaction tube 15, G2.02. This is a waste supply port for supplying gas such as SiF4.
この第１実施例では透明石英製反応管１５の高温加熱部
の外壁に化学気相反応法によるガラス微粒子５を付着さ
せた後、光ファイバ用円材の脱水及び透明化処理を実施
することにより、透明石英製反応管１５の高温加熱部を
β−クリストバライトに相変態させた。このときの脱水
処理の温度が１０７０℃、透明化処理の温度が１６８０
℃であり、この条件で多孔質ｔｇ材１を１０本処理した
時点で高温加熱部の失速が開始した。その後同条件で４
００本以上処理したが反応管１５に全く変形が認められ
ず、安定した製造が実施できた。In this first embodiment, glass fine particles 5 are attached to the outer wall of the high-temperature heating section of a transparent quartz reaction tube 15 by a chemical vapor phase reaction method, and then the optical fiber circular material is dehydrated and transparentized. , the high temperature heating portion of the transparent quartz reaction tube 15 was phase transformed into β-cristobalite. At this time, the temperature of dehydration treatment was 1070℃, and the temperature of transparentization treatment was 1680℃.
℃, and when 10 pieces of porous TG material 1 were processed under these conditions, the high temperature heating section started stalling. Then under the same conditions 4
Although more than 0.000 tubes were processed, no deformation was observed in the reaction tube 15, and stable production could be carried out.
なお、これにより製造された光フアイバ用母材を用いて
シングルモードファイバを作成したところ、 １．３μ
ｍで０．３６ｄＢ／ｋｍ以ド、且つ１．５μｍ １？０
．２０ｄＢ／ｋｍ以下の特性が認められ、不純物の存在
も認められなかった。In addition, when a single mode fiber was made using the optical fiber base material manufactured in this way, the fiber diameter was 1.3μ.
0.36dB/km or more in m, and 1.5μm 1?0
．． A characteristic of 20 dB/km or less was observed, and no impurities were observed.
第２実施例は第２図に示すように透明石英製反応管１５
の高温加熱部の内壁にガラス微粒子５を付着させたもの
であり、他は上述の第１実施例と同様に操作した。この
実施例では多孔質母材１を約１５本処理した時点で高温
加熱部の失速が開始した。その後、約４００本以上の多
孔質母材１を処理したが、反応管１５に変形は全く認め
られなかった。また、この装置により得られた光フアイ
バ用母材を用いてシングルモードファイバを作成したと
ころ、第１実施例と同様に良好な特性の光ファイバが得
られた。In the second embodiment, as shown in FIG. 2, a transparent quartz reaction tube 15
Glass particles 5 were attached to the inner wall of the high-temperature heating section, and the other operations were the same as in the first embodiment described above. In this example, the high temperature heating section started to stall when about 15 porous base materials 1 were processed. Thereafter, approximately 400 or more porous base materials 1 were treated, but no deformation of the reaction tubes 15 was observed. Furthermore, when a single mode fiber was produced using the optical fiber preform obtained by this apparatus, an optical fiber with good characteristics similar to the first example was obtained.
第３実施例は第３図に示すように透明石英製反応管ｌの
高温加熱部の外壁及び内壁にガラス微粒子５を付着させ
たものであり、他は第１実施例と同様である。本実施例
の場合には、多孔質母材１を約７本処理した時点で失速
を開始し、その後、多孔質母材ｌを約４００本以上処理
したが、反応管１５の高温加熱部に全く変形が認められ
なかった。また、本実施例で得られた光ファイバ用Ｆｌ
材を用いてシングルモードファイバを作成したところ、
第１実施例と同様な特性を有する光ファイバが得られた
。In the third embodiment, as shown in FIG. 3, glass fine particles 5 are attached to the outer and inner walls of the high-temperature heating section of a transparent quartz reaction tube 1, but the rest is the same as the first embodiment. In the case of this example, stalling started when about 7 pieces of porous base material 1 were processed, and after that, more than about 400 pieces of porous base material 1 were processed, but the high temperature heating part of reaction tube 15 No deformation was observed at all. In addition, the Fl for optical fiber obtained in this example
When we created a single mode fiber using the material,
An optical fiber having characteristics similar to those of the first example was obtained.
なお、比較のため、第４図（ａ）に示すような透明石英
製反応管２５を用いてガラス微粒子を付着させないで、
上記実施例と同様な条件で多孔質母材１を処理しながら
透明石英をβ−クリストバライトへ相変態させようとし
たところ、約２５本処理した時点で第４図（ｂ）に示す
ように反応管２５の高温加熱部に著しい変形が生じ、β
−クリストバライトからなる高温加熱部を打する石英製
反応管は得られなかった。For comparison, a transparent quartz reaction tube 25 as shown in FIG. 4(a) was used without glass particles attached.
When an attempt was made to phase transform transparent quartz into β-cristobalite while treating the porous base material 1 under the same conditions as in the above example, a reaction occurred as shown in FIG. 4(b) after about 25 pieces had been treated. Significant deformation occurs in the high temperature heating part of the tube 25, and β
- A quartz reaction tube with a high-temperature heating section made of cristobalite could not be obtained.
〈発明の効果〉
以上、実施例とともに具体的に説明したように、本発明
によれば、高温加熱部がβ−クリストバライトからなり
、１１００℃以−Ｆの高温で長期に１（つて使用しても
変形しにくい石英製反応管が得られる。こねにより、石
英製反応管の寿命が大幅に向Ｌｔ、、この反応管で製造
する製品の生産コストが大幅に低減される。<Effects of the Invention> As described above in detail with the embodiments, according to the present invention, the high-temperature heating part is made of β-cristobalite, and the high-temperature heating part is made of β-cristobalite, A quartz reaction tube that is not easily deformed can be obtained.The kneading greatly extends the life of the quartz reaction tube and greatly reduces the production cost of products manufactured using this reaction tube.
第１図〜第３図は、そわぞれ本発明の第１〜第３実施例
を概念的に示す説明図、第４図（ａ）。
（ｂ）は従来技術にかかる光ファイバ川母材製造用の高
温炉の説明図である。
図面中、
１は多孔質母材、
３は電気炉、
４は発熱体、
５はガラス微粒子、
１５は透明石英製反応管である。1 to 3 are explanatory diagrams conceptually showing the first to third embodiments of the present invention, and FIG. 4(a) is an explanatory diagram conceptually showing the first to third embodiments of the present invention. (b) is an explanatory diagram of a high-temperature furnace for producing an optical fiber base material according to the prior art. In the drawings, 1 is a porous base material, 3 is an electric furnace, 4 is a heating element, 5 is glass fine particles, and 15 is a transparent quartz reaction tube.
Claims (1)
を１２００℃以上に加熱して多結晶のβ−クリストバラ
イトへ相変態させ、以後この高温加熱部を５００℃以上
に保つことを特徴とする石英反応管の製造方法。 ２）透明石英製反応管の高温加熱部の内壁及び外壁の少
なくとも一方にガラス微粒子を付着させて加熱する特許
請求の範囲第１項記載の石英反応管の製造方法。 ３）ガラス微粒子が気相反応法で作られたガラス微粒子
である特許請求の範囲第２項記載の石英反応管の製造方
法。 ４）ガラス微粒子が溶液加水分解反応法で作られたガラ
ス微粒子である特許請求の範囲第２項記載の石英反応管
の製造方法。[Claims] 1) The high-temperature heating section of a transparent quartz reaction tube used in a high-temperature furnace is heated to 1200°C or higher to transform it into polycrystalline β-cristobalite, and thereafter the high-temperature heating section is heated to 500°C. A method for manufacturing a quartz reaction tube, characterized in that the quartz reaction tube is maintained at a temperature higher than or equal to 2) The method for manufacturing a quartz reaction tube according to claim 1, wherein glass particles are attached to at least one of the inner wall and outer wall of the high-temperature heating section of the transparent quartz reaction tube and heated. 3) The method for manufacturing a quartz reaction tube according to claim 2, wherein the glass particles are glass particles made by a gas phase reaction method. 4) The method for manufacturing a quartz reaction tube according to claim 2, wherein the glass particles are glass particles made by a solution hydrolysis reaction method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15151886A JPH0729801B2 (en) | 1986-06-30 | 1986-06-30 | Quartz reaction tube manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15151886A JPH0729801B2 (en) | 1986-06-30 | 1986-06-30 | Quartz reaction tube manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6311533A true JPS6311533A (en) | 1988-01-19 |
| JPH0729801B2 JPH0729801B2 (en) | 1995-04-05 |
Family
ID=15520262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15151886A Expired - Lifetime JPH0729801B2 (en) | 1986-06-30 | 1986-06-30 | Quartz reaction tube manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729801B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3428132A1 (en) * | 2017-07-10 | 2019-01-16 | Heraeus Quarzglas GmbH & Co. KG | Quartz glass component having high thermal stability, semi-finished product for same and method of manufacturing the same |
-
1986
- 1986-06-30 JP JP15151886A patent/JPH0729801B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3428132A1 (en) * | 2017-07-10 | 2019-01-16 | Heraeus Quarzglas GmbH & Co. KG | Quartz glass component having high thermal stability, semi-finished product for same and method of manufacturing the same |
| US11485669B2 (en) | 2017-07-10 | 2022-11-01 | Heraeus Quarzglas Gmbh & Co. Kg | Quartz glass component of high thermal stability, semifinished product therefor, and method for producing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729801B2 (en) | 1995-04-05 |
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| EXPY | Cancellation because of completion of term |