JPS63115221U - - Google Patents

Info

Publication number
JPS63115221U
JPS63115221U JP726787U JP726787U JPS63115221U JP S63115221 U JPS63115221 U JP S63115221U JP 726787 U JP726787 U JP 726787U JP 726787 U JP726787 U JP 726787U JP S63115221 U JPS63115221 U JP S63115221U
Authority
JP
Japan
Prior art keywords
section
wafer
test
carrier
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP726787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP726787U priority Critical patent/JPS63115221U/ja
Publication of JPS63115221U publication Critical patent/JPS63115221U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP726787U 1987-01-20 1987-01-20 Pending JPS63115221U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP726787U JPS63115221U (US07655688-20100202-C00086.png) 1987-01-20 1987-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP726787U JPS63115221U (US07655688-20100202-C00086.png) 1987-01-20 1987-01-20

Publications (1)

Publication Number Publication Date
JPS63115221U true JPS63115221U (US07655688-20100202-C00086.png) 1988-07-25

Family

ID=30790559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP726787U Pending JPS63115221U (US07655688-20100202-C00086.png) 1987-01-20 1987-01-20

Country Status (1)

Country Link
JP (1) JPS63115221U (US07655688-20100202-C00086.png)

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