JPS63115062U - - Google Patents

Info

Publication number

JPS63115062U

JPS63115062U JP529187U JP529187U JPS63115062U JP S63115062 U JPS63115062 U JP S63115062U JP 529187 U JP529187 U JP 529187U JP 529187 U JP529187 U JP 529187U JP S63115062 U JPS63115062 U JP S63115062U

Authority

JP

Japan

Prior art keywords

vacuum chamber

inner tube

tube

shaped

material supplied

Prior art date

1987-01-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008020 evaporation Effects 0.000 claims description 3
• 238000001704 evaporation Methods 0.000 claims description 3
• 239000002994 raw material Substances 0.000 claims description 3
• QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 2
• 229910052753 mercury Inorganic materials 0.000 claims description 2
• 239000003507 refrigerant Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000010409 thin film Substances 0.000 claims description 2
• 230000008021 deposition Effects 0.000 claims 2
• 238000010438 heat treatment Methods 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 230000008018 melting Effects 0.000 claims 1
• 238000002844 melting Methods 0.000 claims 1
• 238000007740 vapor deposition Methods 0.000 description 1
• 238000004804 winding Methods 0.000 description 1