JPS6389966U - - Google Patents
Info
- Publication number
- JPS6389966U JPS6389966U JP18563186U JP18563186U JPS6389966U JP S6389966 U JPS6389966 U JP S6389966U JP 18563186 U JP18563186 U JP 18563186U JP 18563186 U JP18563186 U JP 18563186U JP S6389966 U JPS6389966 U JP S6389966U
- Authority
- JP
- Japan
- Prior art keywords
- protective sheet
- processing chamber
- film forming
- chamber
- winding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18563186U JPS6389966U (enExample) | 1986-12-01 | 1986-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18563186U JPS6389966U (enExample) | 1986-12-01 | 1986-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389966U true JPS6389966U (enExample) | 1988-06-10 |
Family
ID=31134438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18563186U Pending JPS6389966U (enExample) | 1986-12-01 | 1986-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389966U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007126727A (ja) * | 2005-11-07 | 2007-05-24 | Hitachi Zosen Corp | 真空蒸着用防着装置 |
-
1986
- 1986-12-01 JP JP18563186U patent/JPS6389966U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007126727A (ja) * | 2005-11-07 | 2007-05-24 | Hitachi Zosen Corp | 真空蒸着用防着装置 |