JPH01125356U - - Google Patents
Info
- Publication number
- JPH01125356U JPH01125356U JP1988021672U JP2167288U JPH01125356U JP H01125356 U JPH01125356 U JP H01125356U JP 1988021672 U JP1988021672 U JP 1988021672U JP 2167288 U JP2167288 U JP 2167288U JP H01125356 U JPH01125356 U JP H01125356U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- thin film
- forming apparatus
- wall
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988021672U JPH01125356U (enExample) | 1988-02-20 | 1988-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988021672U JPH01125356U (enExample) | 1988-02-20 | 1988-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125356U true JPH01125356U (enExample) | 1989-08-25 |
Family
ID=31239112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988021672U Pending JPH01125356U (enExample) | 1988-02-20 | 1988-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125356U (enExample) |
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1988
- 1988-02-20 JP JP1988021672U patent/JPH01125356U/ja active Pending