JPS63102756U - - Google Patents
Info
- Publication number
- JPS63102756U JPS63102756U JP1986197671U JP19767186U JPS63102756U JP S63102756 U JPS63102756 U JP S63102756U JP 1986197671 U JP1986197671 U JP 1986197671U JP 19767186 U JP19767186 U JP 19767186U JP S63102756 U JPS63102756 U JP S63102756U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sputtering
- holder
- target
- mask member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986197671U JPS63102756U (enExample) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986197671U JPS63102756U (enExample) | 1986-12-23 | 1986-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102756U true JPS63102756U (enExample) | 1988-07-04 |
Family
ID=31157637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986197671U Pending JPS63102756U (enExample) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102756U (enExample) |
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1986
- 1986-12-23 JP JP1986197671U patent/JPS63102756U/ja active Pending