JPS63114047U - - Google Patents
Info
- Publication number
- JPS63114047U JPS63114047U JP611587U JP611587U JPS63114047U JP S63114047 U JPS63114047 U JP S63114047U JP 611587 U JP611587 U JP 611587U JP 611587 U JP611587 U JP 611587U JP S63114047 U JPS63114047 U JP S63114047U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- gate electrode
- control gate
- source
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Non-Volatile Memory (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP611587U JPS63114047U (id) | 1987-01-20 | 1987-01-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP611587U JPS63114047U (id) | 1987-01-20 | 1987-01-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63114047U true JPS63114047U (id) | 1988-07-22 |
Family
ID=30788327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP611587U Pending JPS63114047U (id) | 1987-01-20 | 1987-01-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63114047U (id) |
-
1987
- 1987-01-20 JP JP611587U patent/JPS63114047U/ja active Pending