JPS63114035U - - Google Patents

Info

Publication number
JPS63114035U
JPS63114035U JP491387U JP491387U JPS63114035U JP S63114035 U JPS63114035 U JP S63114035U JP 491387 U JP491387 U JP 491387U JP 491387 U JP491387 U JP 491387U JP S63114035 U JPS63114035 U JP S63114035U
Authority
JP
Japan
Prior art keywords
wafer
spin chuck
arm
wafer position
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP491387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP491387U priority Critical patent/JPS63114035U/ja
Publication of JPS63114035U publication Critical patent/JPS63114035U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP491387U 1987-01-19 1987-01-19 Pending JPS63114035U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP491387U JPS63114035U (OSRAM) 1987-01-19 1987-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP491387U JPS63114035U (OSRAM) 1987-01-19 1987-01-19

Publications (1)

Publication Number Publication Date
JPS63114035U true JPS63114035U (OSRAM) 1988-07-22

Family

ID=30786016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP491387U Pending JPS63114035U (OSRAM) 1987-01-19 1987-01-19

Country Status (1)

Country Link
JP (1) JPS63114035U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018023918A (ja) * 2016-08-09 2018-02-15 株式会社ディスコ 薬液塗布装置
JP2018114479A (ja) * 2017-01-20 2018-07-26 株式会社ディスコ 位置合わせ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018023918A (ja) * 2016-08-09 2018-02-15 株式会社ディスコ 薬液塗布装置
JP2018114479A (ja) * 2017-01-20 2018-07-26 株式会社ディスコ 位置合わせ装置

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