JPS6245834U - - Google Patents
Info
- Publication number
- JPS6245834U JPS6245834U JP13793985U JP13793985U JPS6245834U JP S6245834 U JPS6245834 U JP S6245834U JP 13793985 U JP13793985 U JP 13793985U JP 13793985 U JP13793985 U JP 13793985U JP S6245834 U JPS6245834 U JP S6245834U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- wafer
- support plate
- semiconductor device
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000005357 flat glass Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13793985U JPS6245834U (OSRAM) | 1985-09-09 | 1985-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13793985U JPS6245834U (OSRAM) | 1985-09-09 | 1985-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6245834U true JPS6245834U (OSRAM) | 1987-03-19 |
Family
ID=31042460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13793985U Pending JPS6245834U (OSRAM) | 1985-09-09 | 1985-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6245834U (OSRAM) |
-
1985
- 1985-09-09 JP JP13793985U patent/JPS6245834U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0385707A3 (en) | Ion implanter end station | |
| JPH01170585U (OSRAM) | ||
| JPS6245834U (OSRAM) | ||
| JPS58193453U (ja) | 電子線装置における反射電子検出装置 | |
| JPH01142452U (OSRAM) | ||
| JPH02102653U (OSRAM) | ||
| JPS6196601U (OSRAM) | ||
| JPH0351360U (OSRAM) | ||
| JPS6397233U (OSRAM) | ||
| JPH0352723U (OSRAM) | ||
| JPS62101359U (OSRAM) | ||
| JPH0198161U (OSRAM) | ||
| JPS62120370U (OSRAM) | ||
| JPH01125361U (OSRAM) | ||
| JPS6338962U (OSRAM) | ||
| JPS58132834U (ja) | 分光光度計 | |
| JPS6029167U (ja) | エッチング装置等用試料駆動装置 | |
| JPS6158782U (OSRAM) | ||
| JPH0446547U (OSRAM) | ||
| JPH01124655U (OSRAM) | ||
| JPS60142206U (ja) | 長尺物移送装置 | |
| JPH02102539U (OSRAM) | ||
| JPS62138444U (OSRAM) | ||
| JPH01146336U (OSRAM) | ||
| JPS6258417U (OSRAM) |