JPS63113301A - 非接触変位測定方法 - Google Patents
非接触変位測定方法Info
- Publication number
- JPS63113301A JPS63113301A JP25946486A JP25946486A JPS63113301A JP S63113301 A JPS63113301 A JP S63113301A JP 25946486 A JP25946486 A JP 25946486A JP 25946486 A JP25946486 A JP 25946486A JP S63113301 A JPS63113301 A JP S63113301A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical fiber
- measured
- distance
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 9
- 238000000691 measurement method Methods 0.000 title claims description 7
- 239000013307 optical fiber Substances 0.000 claims abstract description 69
- 238000000034 method Methods 0.000 claims description 5
- 230000001419 dependent effect Effects 0.000 abstract 1
- 238000002310 reflectometry Methods 0.000 abstract 1
- 239000000835 fiber Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25946486A JPS63113301A (ja) | 1986-10-30 | 1986-10-30 | 非接触変位測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25946486A JPS63113301A (ja) | 1986-10-30 | 1986-10-30 | 非接触変位測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63113301A true JPS63113301A (ja) | 1988-05-18 |
| JPH0577241B2 JPH0577241B2 (enrdf_load_stackoverflow) | 1993-10-26 |
Family
ID=17334433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25946486A Granted JPS63113301A (ja) | 1986-10-30 | 1986-10-30 | 非接触変位測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63113301A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014529740A (ja) * | 2011-08-26 | 2014-11-13 | クアルコム，インコーポレイテッド | 近接センサの較正 |
-
1986
- 1986-10-30 JP JP25946486A patent/JPS63113301A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014529740A (ja) * | 2011-08-26 | 2014-11-13 | クアルコム，インコーポレイテッド | 近接センサの較正 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0577241B2 (enrdf_load_stackoverflow) | 1993-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4813782A (en) | Method and apparatus for measuring the floating amount of the magnetic head | |
| JPS5849819B2 (ja) | ソウサシキケンサソウチ | |
| JPH0363001B2 (enrdf_load_stackoverflow) | ||
| JPH02173505A (ja) | 光波干渉型微細表面形状測定装置 | |
| JPH0423202B2 (enrdf_load_stackoverflow) | ||
| JPS63113301A (ja) | 非接触変位測定方法 | |
| JPH08285545A (ja) | 光ファイバの直径の変化を検出する方法、ならびに光ファイバの製造方法 | |
| JP3570488B2 (ja) | レーザビーム使用亜鉛メッキ鋼板合金化度測定方法 | |
| JPS6239365B2 (enrdf_load_stackoverflow) | ||
| JPS57199909A (en) | Distance measuring device | |
| RU2258903C2 (ru) | Способ измерения перемещения объекта и устройство для его осуществления (варианты) | |
| KR100409204B1 (ko) | 금속표면의 확산계수 측정장치 및 그 측정방법 | |
| JP2523334B2 (ja) | 光学式変位計 | |
| JPH06281418A (ja) | 凹凸を有する板状透明体の光学的厚さ測定方法 | |
| JPH01189506A (ja) | 膜厚測定方法 | |
| JPH0593613A (ja) | 微小間隔測定装置及び方法 | |
| SU1067953A1 (ru) | Способ измерени радиуса перет жки лазерного гауссового пучка | |
| FR2250119A1 (en) | Surface displacement measuring system - optic fibres reflect collimated light from surface towards light receiver | |
| JPS6316232A (ja) | レ−ザビ−ム径の測定方法 | |
| JPH0435682B2 (enrdf_load_stackoverflow) | ||
| JPS614906A (ja) | 線幅測定方法 | |
| JPS6217725B2 (enrdf_load_stackoverflow) | ||
| JPS6484104A (en) | Laser interference length measuring machine | |
| JPH0545895B2 (enrdf_load_stackoverflow) | ||
| JPS60161524A (ja) | 光学式変位検出装置 |