JPS63112745U - - Google Patents
Info
- Publication number
- JPS63112745U JPS63112745U JP350187U JP350187U JPS63112745U JP S63112745 U JPS63112745 U JP S63112745U JP 350187 U JP350187 U JP 350187U JP 350187 U JP350187 U JP 350187U JP S63112745 U JPS63112745 U JP S63112745U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- generation chamber
- plasma generation
- chamber
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP350187U JPS63112745U (ko) | 1987-01-16 | 1987-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP350187U JPS63112745U (ko) | 1987-01-16 | 1987-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112745U true JPS63112745U (ko) | 1988-07-20 |
Family
ID=30783315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP350187U Pending JPS63112745U (ko) | 1987-01-16 | 1987-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112745U (ko) |
-
1987
- 1987-01-16 JP JP350187U patent/JPS63112745U/ja active Pending
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