JPS63112336U - - Google Patents
Info
- Publication number
- JPS63112336U JPS63112336U JP242687U JP242687U JPS63112336U JP S63112336 U JPS63112336 U JP S63112336U JP 242687 U JP242687 U JP 242687U JP 242687 U JP242687 U JP 242687U JP S63112336 U JPS63112336 U JP S63112336U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support plate
- semiconductor wafer
- wafer support
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
Landscapes
- Weting (AREA)
Description
第１図はこの考案の半導体ウエハのウエツト処
理用治具の第１の実施例を示す斜視図、第２図は
同第１の実施例の断面図、第３図はこの考案の第
２の実施例を示す断面図である。
１…ウエハ支持板、２…突起、３…脚片、５…
半導体ウエハ。
Fig. 1 is a perspective view showing a first embodiment of the semiconductor wafer wet processing jig of this invention, Fig. 2 is a sectional view of the first embodiment, and Fig. 3 is a second embodiment of the jig of this invention. It is a sectional view showing an example. DESCRIPTION OF SYMBOLS 1... Wafer support plate, 2... Protrusion, 3... Leg piece, 5...
semiconductor wafer.
Claims (1)
にウエハずり落ち防止用の突起を設けた環状斜面
板からなるウエハ支持板と、 (b) このウエハ支持板の下端数個所に設けられ
た脚片とからなる半導体ウエハのウエツト処理用
治具。[Claims for Utility Model Registration] (a) A wafer support plate consisting of an annular sloped plate provided with a protrusion on the lower end of the upwardly facing outer or inner surface to prevent the wafer from falling; (b) this wafer support plate A semiconductor wafer wet processing jig consisting of leg pieces installed at several locations on the lower end of the semiconductor wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP242687U JPS63112336U (en) | 1987-01-13 | 1987-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP242687U JPS63112336U (en) | 1987-01-13 | 1987-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112336U true JPS63112336U (en) | 1988-07-19 |
Family
ID=30781256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP242687U Pending JPS63112336U (en) | 1987-01-13 | 1987-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112336U (en) |
-
1987
- 1987-01-13 JP JP242687U patent/JPS63112336U/ja active Pending