JPS63111931U - - Google Patents
Info
- Publication number
- JPS63111931U JPS63111931U JP8587U JP8587U JPS63111931U JP S63111931 U JPS63111931 U JP S63111931U JP 8587 U JP8587 U JP 8587U JP 8587 U JP8587 U JP 8587U JP S63111931 U JPS63111931 U JP S63111931U
- Authority
- JP
- Japan
- Prior art keywords
- optical unit
- light
- unit
- light irradiation
- processing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000010891 electric arc Methods 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 description 1
Landscapes
- Supply, Installation And Extraction Of Printed Sheets Or Plates (AREA)
- Printing Methods (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Drying Of Solid Materials (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8587U JPH053214Y2 (xx) | 1987-01-06 | 1987-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8587U JPH053214Y2 (xx) | 1987-01-06 | 1987-01-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63111931U true JPS63111931U (xx) | 1988-07-19 |
| JPH053214Y2 JPH053214Y2 (xx) | 1993-01-26 |
Family
ID=30776755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8587U Expired - Lifetime JPH053214Y2 (xx) | 1987-01-06 | 1987-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH053214Y2 (xx) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165023A (ja) * | 1989-11-24 | 1991-07-17 | Ushio Inc | 露光装置 |
| JPH03211556A (ja) * | 1990-01-17 | 1991-09-17 | Ushio Inc | 光学ユニット |
| JP2006313862A (ja) * | 2005-05-09 | 2006-11-16 | Tokyo Electron Ltd | 周縁露光装置、塗布、現像装置及び周縁露光方法 |
-
1987
- 1987-01-06 JP JP8587U patent/JPH053214Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165023A (ja) * | 1989-11-24 | 1991-07-17 | Ushio Inc | 露光装置 |
| JPH03211556A (ja) * | 1990-01-17 | 1991-09-17 | Ushio Inc | 光学ユニット |
| JP2006313862A (ja) * | 2005-05-09 | 2006-11-16 | Tokyo Electron Ltd | 周縁露光装置、塗布、現像装置及び周縁露光方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH053214Y2 (xx) | 1993-01-26 |