JPS63110620A - Method of forming electrode on ceramic green sheet - Google Patents

Method of forming electrode on ceramic green sheet

Info

Publication number
JPS63110620A
JPS63110620A JP61257333A JP25733386A JPS63110620A JP S63110620 A JPS63110620 A JP S63110620A JP 61257333 A JP61257333 A JP 61257333A JP 25733386 A JP25733386 A JP 25733386A JP S63110620 A JPS63110620 A JP S63110620A
Authority
JP
Japan
Prior art keywords
ceramic green
green sheet
electrode
ceramic
forming electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61257333A
Other languages
Japanese (ja)
Inventor
晋 齋藤
和明 内海
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61257333A priority Critical patent/JPS63110620A/en
Publication of JPS63110620A publication Critical patent/JPS63110620A/en
Pending legal-status Critical Current

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  • Manufacturing Of Printed Wiring (AREA)
  • Thermistors And Varistors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はセラミックグリーンシート上への電極形成方法
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of forming electrodes on ceramic green sheets.

(従来の技@) 電子部品用の多層セラミック基板および積層コンデンサ
、積層バリスタなどの積層磁器電子部品の従来の製造方
法では、その中間製品として金属酸化物等のセラミック
粉末をポリビニルブチラール、ポリビニルアルコール、
ポリアクリロイド等の有機バインダー溶解している分散
媒の中へ均一に分散させた混漿を製造し、これをキャス
ティング法によって数10pmから数1100pの厚さ
のセラミックグリーンシートに成膜し、この膜を所定の
大きさにパンチングした後、このグリーンシート表面−
Hに所望の形状の電極を電極形成用ペーストを用いてス
クリーン印刷等の公知の手段により印刷し、この電極を
印刷したセラミックグリーンシートを含む複数枚のセラ
ミックグリーンシートを積層し、圧着する工程がある。
(Conventional Techniques @) In conventional manufacturing methods for multilayer ceramic electronic components such as multilayer ceramic substrates for electronic components, multilayer capacitors, and multilayer varistors, ceramic powders such as metal oxides are mixed with polyvinyl butyral, polyvinyl alcohol, polyvinyl butyral, etc. as intermediate products.
A mixed matrix is prepared by uniformly dispersing it in a dispersion medium in which an organic binder such as polyacryloid is dissolved, and this is formed into a ceramic green sheet with a thickness of several 10 pm to several 1100 pm using a casting method. After punching the membrane to a predetermined size, the surface of this green sheet -
The step is to print electrodes of a desired shape on H using an electrode forming paste by known means such as screen printing, and to laminate and press-bond multiple ceramic green sheets, including a ceramic green sheet on which the electrodes have been printed. be.

(発明が解決しようとする問題点) F述した従来のセラミックグリーンシート上への電極形
成方法で゛は、有機バインダーや分散媒を含む電極形成
用ペーストを直接セラミックグリーンシート上へ印刷す
ζるため印刷した時に、セラミックグリーンシートを浸
蝕してしまったり、変形させてしまうことが多く製品歩
留りを下げる原因となっていた。近年、こうして作られ
る電子部品の積層密度を」二げることか強く要望される
結果、セラミックグリーンシートの厚みはますます薄く
することになり、このため」二記印刷時の電極ペースト
による浸蝕や変形の問題がもはや無視しえないものとな
り歩留りを著しく低下させているという欠点があった。
(Problems to be Solved by the Invention) In the conventional method for forming electrodes on ceramic green sheets as described above, an electrode forming paste containing an organic binder and a dispersion medium is directly printed onto the ceramic green sheets. Therefore, when printing, the ceramic green sheet is often eroded or deformed, resulting in a lower product yield. In recent years, there has been a strong demand for lowering the lamination density of electronic components produced in this way, and as a result, the thickness of ceramic green sheets has become thinner and thinner. There was a drawback in that the problem of deformation could no longer be ignored and the yield was significantly lowered.

(問題点を解決するための手段) 本発明はかかる従来欠点を除去したもので従来用いられ
ていた電極形成用ペーストおよびセラミックグリーンシ
ートの有機バインダー、分散媒等を変更することなく、
30pm以下の薄いセラミックグリーンシートの場合で
も電極形成時に、電極形成用ペーストによるセラミック
グリ−シートの浸蝕や変形を受けること等がなく、製品
の歩留りが改善されるという特徴を有する。
(Means for Solving the Problems) The present invention eliminates such conventional drawbacks, and without changing the organic binder, dispersion medium, etc. of the electrode forming paste and ceramic green sheet that have been conventionally used.
Even in the case of a thin ceramic green sheet of 30 pm or less, the ceramic green sheet is not eroded or deformed by the electrode forming paste during electrode formation, and the product yield is improved.

本発明によれば、支持体上にあらかじめ所定の形状に印
刷されている所望の電極をセラミックグリーンシート上
に転写させて電極形成セラミックグリーンシートを製造
することを特徴とするセラミックグリーンシート上への
電極形成方法が得られる。
According to the present invention, an electrode-forming ceramic green sheet is produced by transferring a desired electrode previously printed in a predetermined shape on a support onto a ceramic green sheet. A method for forming an electrode is obtained.

(実施例) 以下、本発明の詳細を図面により説明する。まず金属酸
化物粉末を有機バインダとともに溶媒中に分散し、混漿
とする。
(Example) The details of the present invention will be explained below with reference to the drawings. First, metal oxide powder is dispersed in a solvent together with an organic binder to form a mixed solution.

これをキャスティング法によって第1図(a)の如く支
持体とする離型剤の塗布しである支持体1a(ポリエス
テルフィルム)上に10μm〜50pm程度の厚すの均
一なセラミックグリーンシート2として形成する。また
第1図(b)の如く前記のセラミックグリーンシートを
形成した支持体とは異なる支持体1b(ポリエステルフ
ィルム)上に、スクリーン印刷によって電極形成用ペー
ストを40mm X 20mmの面積で厚さ6pm程度
になるように印刷し、電極3とする。
This is formed into a uniform ceramic green sheet 2 with a thickness of about 10 μm to 50 pm by a casting method on a support 1a (polyester film) coated with a release agent as shown in FIG. 1(a). do. Further, as shown in FIG. 1(b), on a support 1b (polyester film) different from the support on which the ceramic green sheet was formed, electrode forming paste was applied by screen printing to a thickness of about 6 pm in an area of 40 mm x 20 mm. This is printed to form the electrode 3.

次に第2図に示す如く前記のセラミックグリーンシート
2を形成したポリエステルフィルム1aと電極3を形成
したポリエステルフィルム1bの2つをセラミックグリ
ーンシート2と電極3が直接に接するように重ねあわせ
た後、110°C程度に加熱した加圧用ローラー7a、
7bで10kg/cm2で加圧して第1図(c)の如く
、電極3をセラミックグリーンシート2に転写する。な
お第2図中5a、5b、5c、5dは巻きとりロール、
6a。
Next, as shown in FIG. 2, the polyester film 1a on which the ceramic green sheet 2 was formed and the polyester film 1b on which the electrode 3 was formed were placed one on top of the other so that the ceramic green sheet 2 and the electrode 3 were in direct contact with each other. , a pressure roller 7a heated to about 110°C,
7b to transfer the electrode 3 onto the ceramic green sheet 2 as shown in FIG. 1(c) by applying a pressure of 10 kg/cm2. In addition, 5a, 5b, 5c, and 5d in Fig. 2 are take-up rolls,
6a.

6b、6c、6dはガイドローラである。このとき電極
とセラミックグリーンシートではセラミックグリーンシ
ートの方がポリエステルフィルムとの接触面積が広く、
ポリエステルフィルムへの装着力が強いため電極がセラ
ミックグリーンシートの方へ転写することになる。こう
して電極3をセラミックグリーンシート2へ転写させて
得た電極形成セラミックグリーンシート4の電極形成部
を60m” X 40”mの大きさに打ち抜いて、パン
チング形状、電極部分の変形、電極ペーストのセラミッ
クグリーンシートへの浸蝕状態を観察した。その結果の
一例をまとめて示したのが第1表である。
6b, 6c, and 6d are guide rollers. At this time, between the electrode and the ceramic green sheet, the ceramic green sheet has a larger contact area with the polyester film.
Since the attachment force to the polyester film is strong, the electrodes will be transferred to the ceramic green sheet. The electrode forming part of the electrode forming ceramic green sheet 4 obtained by transferring the electrode 3 to the ceramic green sheet 2 in this way was punched out to a size of 60 m" x 40" m, and the punching shape, deformation of the electrode part, and the ceramic of the electrode paste were punched out. The state of erosion to the green sheet was observed. Table 1 shows an example of the results.

なお、第1表に示したパンチング形状の変化率は、電極
を形成した後セラミックグリーンシートを支持体からは
く離し、60mm X 40mmの大きさにパンチング
し、このセラミックグリーンシートの形状を測定し、長
さの変化率を百分率で表わした。
The rate of change in the punching shape shown in Table 1 was determined by peeling off the ceramic green sheet from the support after forming the electrodes, punching it to a size of 60 mm x 40 mm, and measuring the shape of the ceramic green sheet. The rate of change in length was expressed as a percentage.

表中で試料番号に杆1を付して参考のために示した従来
方法によるものの変化率はセラミックグリーンシートを
支持体からはく離し、60””X40mmの大きさにパ
ンチングし、これに印刷を行ない、乾燥した後のセラミ
ック生シート形状を測定し、長さの変化率を百分率で表
わしたものである。
The change rate of the conventional method, which is shown for reference with a bar 1 attached to the sample number in the table, is obtained by peeling off the ceramic green sheet from the support, punching it into a size of 60'' x 40 mm, and printing on it. The shape of the green ceramic sheet after drying was measured, and the rate of change in length was expressed as a percentage.

また、電極部分の変形は、電極形成後の電極部分の凹凸
の程度を定性的に示したものであり、電極ペーストのセ
ラミックシートへの浸蝕状態は電極を形成した反対側の
セラミックグリーンシート面を観察し電極の浸み込みの
有無により判定したものである。
In addition, the deformation of the electrode part qualitatively indicates the degree of unevenness of the electrode part after the electrode is formed, and the state of erosion of the ceramic sheet by the electrode paste can be determined by looking at the surface of the ceramic green sheet on the opposite side where the electrode was formed. This was determined by observing the presence or absence of penetration of the electrode.

ここでパンチング形状の変化率を問題にする理由は多層
セラミック基板や積層セラミックコンデンサなどの積層
電子部品では、電極を印刷したセラミックグリーンシー
トをプレス金型の中に入れて積層圧着するが、この際パ
ンチングシートの外径寸法によって層間の電極位置の精
度が決まり製品の歩留りに大きく影響を及ぼすからであ
る。
The reason why the rate of change in punching shape is an issue here is that in multilayer electronic components such as multilayer ceramic substrates and multilayer ceramic capacitors, ceramic green sheets with printed electrodes are placed in a press mold and laminated and crimped. This is because the outer diameter of the punched sheet determines the accuracy of the electrode position between the layers, which greatly affects the yield of the product.

従って印刷後のパンチングシート形状の変化率はできる
だけ小さいことが望まれるわけで、積層コンデンサなど
では±0.2%以下であることが好ましい。
Therefore, it is desired that the rate of change in the shape of the punched sheet after printing is as small as possible, and for multilayer capacitors, etc., it is preferably ±0.2% or less.

(発明の効果) 第1表に示した例からも明らかなように、本発明の電極
形成方法によれば、セラミックグリーンシート上へ、電
極を形成するときに、電極形成用ペーストの印刷時にお
ける影響をほとんど除くことができ、この結果、得られ
る多層セラミック基板、積層セラミックコンデンサ、積
層セラミックバリスタなどの製品バリスタなどの製品歩
留りを著しく向上させることが可能になった。
(Effects of the Invention) As is clear from the examples shown in Table 1, according to the electrode forming method of the present invention, when printing an electrode forming paste on a ceramic green sheet, As a result, it has become possible to significantly improve the yield of product varistors such as multilayer ceramic substrates, multilayer ceramic capacitors, and multilayer ceramic varistors.

また電極の転写をプレスによっているのでセラミックグ
リーンシート製造時に発生した微細ピンホールを埋める
効果もあり、製品歩留り向上に寄与する効果もある。
In addition, since the electrodes are transferred by pressing, it has the effect of filling the minute pinholes that occur during the production of ceramic green sheets, which also has the effect of contributing to improving product yield.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)、(b)、(c)は本発明の実施例で電極
をセラミックグリーンシートに被着させる各工程を示す
断面図。第2図は本発明を実施するための装置の例を示
す全体構成図。 la、lb・・・支持体 2・・・セラミックグリーンシ一ト 3・・・電極
FIGS. 1(a), 1(b), and 1(c) are cross-sectional views showing each step of attaching an electrode to a ceramic green sheet in an embodiment of the present invention. FIG. 2 is an overall configuration diagram showing an example of an apparatus for carrying out the present invention. la, lb...Support 2...Ceramic green sheet 3...Electrode

Claims (1)

【特許請求の範囲】[Claims]  支持体上にあらかじめ所定形状に印刷されている所望
の電極をセラミックグリーンシートのすくなくとも片面
上に転写させることを特徴とするセラミックグリーンシ
ート上への電極形成方法。
1. A method for forming electrodes on a ceramic green sheet, which comprises transferring a desired electrode previously printed in a predetermined shape onto a support onto at least one side of the ceramic green sheet.
JP61257333A 1986-10-28 1986-10-28 Method of forming electrode on ceramic green sheet Pending JPS63110620A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61257333A JPS63110620A (en) 1986-10-28 1986-10-28 Method of forming electrode on ceramic green sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61257333A JPS63110620A (en) 1986-10-28 1986-10-28 Method of forming electrode on ceramic green sheet

Publications (1)

Publication Number Publication Date
JPS63110620A true JPS63110620A (en) 1988-05-16

Family

ID=17304903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61257333A Pending JPS63110620A (en) 1986-10-28 1986-10-28 Method of forming electrode on ceramic green sheet

Country Status (1)

Country Link
JP (1) JPS63110620A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01136306A (en) * 1987-11-24 1989-05-29 Koujiyundo Kagaku Kenkyusho:Kk Forming electrode
JPH0319297A (en) * 1989-06-15 1991-01-28 Nec Corp Manufacture of multilayer ceramic circuit board

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5063462A (en) * 1973-10-05 1975-05-29
JPS6178114A (en) * 1984-09-25 1986-04-21 日本電気株式会社 Manufacture of laminated ceramic capacitor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5063462A (en) * 1973-10-05 1975-05-29
JPS6178114A (en) * 1984-09-25 1986-04-21 日本電気株式会社 Manufacture of laminated ceramic capacitor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01136306A (en) * 1987-11-24 1989-05-29 Koujiyundo Kagaku Kenkyusho:Kk Forming electrode
JPH0319297A (en) * 1989-06-15 1991-01-28 Nec Corp Manufacture of multilayer ceramic circuit board

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